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Enyama
Juichi Enyama, Hitachi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090205194 | ELECTRIC ROTATING MACHINE AND MANUFACTURING METHOD OF THE SAME - A electric rotating machine includes a rotor winding constituting a part of a rotor, a conductor provided in a center portion in a radial direction of a rotor body for supplying electricity to the rotor winding from the outside, a leader drawn from the conductor to an outside diameter side, and a connecting line constructed by stacking a plurality of conductor plates to electrically connect the rotor winding and the leader. The connecting line consists of a radial direction linear portion which is straight in the radial direction on the leader side, and a bending portion which branches into two routes toward opposite directions to each other in a rotor shaft direction from the radial direction linear portion and has a linear portion formed at a part of the bending portion. The linear portion of the bending portion is joined to a bottom surface of the rotor winding. | 08-20-2009 |
Momoyo Enyama, Kunitachi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100065753 | CHARGED PARTICLE BEAM APPARATUS - With a multi-beam type charged particle beam apparatus, and a projection charged particle beam apparatus, in the case of off-axial aberration corrector, there is the need for preparing a multitude of multipoles, and power supply sources in numbers corresponding to the number of the multipoles need be prepared. In order to solve this problem as described, a charged particle beam apparatus is provided with at least one aberration corrector wherein the number of the multipoles required in the past is decreased by about a half by disposing an electrostatic mirror in an electron optical system. | 03-18-2010 |
Momoyo Enyama, Kokubunji JP
| Patent application number | Description | Published |
|---|---|---|
| 20090001267 | Charged particle beam apparatus and specimen inspection method - In a multi-charged-particle-beam apparatus, when an electric field and voltage on a surface of a specimen are varied according to characteristics of the specimen, a layout of plural primary beams on the surface of the specimen and a layout of plural secondary beams on each detector vary. Then, calibration is executed to adjust the primary beams on the surface of the specimen to an ideal layout corresponding to the variation of operating conditions including inspecting conditions such as an electric field on the surface and voltage applied to the specimen. The layout of the primary beams on the surface of the specimen is acquired as images displayed on a display of reference marks on the stage. Variance with an ideal state of the reference marks is measured based upon these images and is corrected by the adjustment of a primary electron optics system and others. | 01-01-2009 |