Patent application number | Description | Published |
20100002358 | HIGH-STABILITY THIN-FILM CAPACITOR AND METHOD FOR MAKING THE SAME - The dielectric of a capacitor is formed by superposition of at least two thin layers made from the same metal oxide, respectively in crystalline and amorphous form and respectively presenting quadratic voltage coefficients of capacitance of opposite signs. The respective thicknesses d | 01-07-2010 |
20100072057 | PROCESS FOR FORMING A CERAMIC OXIDE MATERIAL WITH A PYROCHLORE STRUCTURE HAVING A HIGH DIELECTRIC CONSTANT AND IMPLEMENTATION OF THIS PROCESS FOR APPLICATIONS IN MICROELECTRONICS - The invention relates to a process for forming a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase, which process comprises the following steps: a) a step of depositing at least one amorphous layer of said lead-based ceramic oxide material on a substrate; and b) a crystallization annealing step carried out on said amorphous layer at a temperature not exceeding 550° C., by means of which a lead-based ceramic oxide dielectric material comprising at least one pyrochlore phase is obtained. Application to the fabrication of capacitors on integrated circuits. | 03-25-2010 |
20110061215 | PROCESS FOR FABRICATING AN OPTIMALLY-ACTUATING PIEZOELECTRIC MEMBRANE - In a process for fabricating a membrane, including, on a substrate, a thin-film multilayer including a film of piezoelectric material placed between a top electrode film and a bottom electrode film and an elastic film supporting said piezoelectric film, the process includes: determining at least one concavity/convexity curvature of said membrane along an axis parallel to the plane of the films so that at least one inflection point is defined, said point allowing a first region and a second region, corresponding to a concave part and a convex part or vice versa, to be isolated; depositing, on the surface of the substrate, a thin-film multilayer including at least one film of piezoelectric material, one bottom electrode film and one top electrode film; and structuring at least one of the electrode films to define at least said first membrane region, in which an electric field perpendicular to the plane of the films may be applied, and at least said second region, in which an electric field parallel to the plane of the films may be applied. | 03-17-2011 |
20110072901 | DEVICE AND METHOD FOR DETECTING ELEMENTS IN A FLUID ENVIRONMENT - The device for detecting elements in a fluidic medium comprises at least one acoustic resonator having a surface intended for fixing the elements. The resonator includes means for generating and measuring Lamb waves, favouring the generation of symmetrical Lamb waves. The device analyses the resonant frequency of the resonator in order to determine the variation in the resonant frequency of the symmetrical Lamb waves representative of the presence of the elements. | 03-31-2011 |
20110080069 | PIEZOELECTRIC ACTUATION STRUCTURE INCLUDING AN INTEGRATED PIEZORESISTIVE STRAIN GAUGE AND ITS PRODUCTION METHOD - The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure. | 04-07-2011 |
20110221307 | ELECTROMECHANICAL TRANSDUCER DEVICE AND METHOD OF FORMING A ELECTROMECHANICAL TRANSDUCER DEVICE - A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer having a first thermal response characteristic, at least one layer of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer. The thermal compensation layer is different to the at least one layer and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature. | 09-15-2011 |
20110233693 | ELECTROMECHANICAL TRANSDUCER DEVICE AND METHOD OF FORMING A ELECTROMECHANICAL TRANSDUCER DEVICE - A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure comprising at least one mechanical layer having a first thermal response characteristic and a first mechanical stress response characteristic, at least one layer of the actuating structure, the at least one layer having a second thermal response characteristic different to the first thermal response characteristic and a second mechanical stress response characteristic different to the first mechanical stress response characteristic, a first compensation layer having a third thermal response characteristic and a third mechanical stress characteristic, and a second compensation layer having a fourth thermal response characteristic and a fourth mechanical stress response characteristic. The first and second compensation layers are arranged to compensate a thermal effect produced by the different first and second thermal response characteristics of the mechanical structure and the at least one layer of the actuating structure such that movement of the movable structure is substantially independent of variations in temperature and to adjust a stress effect produced by the different first and second stress response characteristics of the mechanical structure and the at least one layer of the actuating structure such that the movable structure is deflected a predetermined amount relative to the substrate when the electromechanical transducer device is in an inactive state. | 09-29-2011 |
20110248602 | ACOUSTIC RESONATOR COMPRISING AN ELECTRET AND METHOD OF PRODUCING SAID RESONATOR, APPLICATION TO SWITCHABLE COUPLED RESONATOR FILTERS - Acoustic resonator comprising an electret, and method of producing said resonator, application to switchable coupled resonator filters. | 10-13-2011 |
20110266594 | METHOD FOR OBTAINING A LAYER OF ALN HAVING SUBSTANTIALLY VERTICAL SIDES - A method is disclosed, for producing a layer of AlN having substantially vertical sides relative to the surface of a substrate, comprising:
| 11-03-2011 |
20110280276 | TIME-RELATED TEMPERATURE VARIATION TRANSDUCER, ELECTRONIC CHIP INCORPORATING THIS TRANSDUCER AND METHOD OF FABRICATION OF THIS CHIP - A transducer for transducing time-related temperature variations into a difference in potentials includes an upper conductive electrode designed to be exposed to a time-related temperature variation to be measured, a lower conductive electrode, and at least one layer of pyroelectric material based on a III-V nitride directly interposed between the upper and lower conductive electrodes to generate, between the upper and lower conductive electrodes, a difference in potentials corresponding to the temperature variation even in the absence of external mechanical stress. | 11-17-2011 |
20120007666 | DEVICE FOR IMPEDANCE MATCHING A COMPONENT, COMPRISING A FILTER HAVING MATCHABLE IMPEDANCE, BASED ON A PEROVSKITE TYPE MATERIAL - A device comprises at the input a first component (PA) having a first output impedance (Z | 01-12-2012 |
20120056299 | Integrated Capacitor Comprising an Electrically Insulating Layer Made of an Amorphous Perovskite-Type Material and Manufacturing Process - An integrated capacitor comprises a layer of dielectric material known as functional dielectric material based on crystallized material of perovskite type, between at least one first electrode known as a bottom electrode at the surface of a substrate and at least one second electrode known as a top electrode, said electrodes being electrically insulated by a layer of electrically insulating material in order to allow at least one contact on the top electrode. The electrically insulating material is made of an amorphous dielectric material of perovskite type having a dielectric constant lower than that of the crystallized material of perovskite type. The contact is formed from an etched contacting layer in contact with the electrically insulating dielectric layer level with its surface parallel to the plane of the layers. A process for manufacturing such an integrated capacitor is also provided. | 03-08-2012 |
20120056308 | METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE - A method of forming an electromechanical transducer device comprises forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure. The method further comprises providing a stress trimming layer on at least part of the movable structure, after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device, and after releasing the movable structure changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state. | 03-08-2012 |
20120145667 | Process for Fabricating an Acoustic Wave Resonator Comprising a Suspended Membrane - A process for fabricating an acoustic wave resonator comprising a suspended membrane comprising a piezoelectric material layer, comprises the following steps: production of a first stack comprising at least one layer of first piezoelectric material on the surface of a first substrate; production of a second stack comprising at least one second substrate; production of at least one non-bonding initiating zone by deposition or creation of particles of controlled sizes leaving the surface of one of said stacks endowed locally with projecting nanostructures before a subsequent bonding step; direct bonding of said two stacks creating a blister between the stacks, due to the presence of the non-bonding initiating zone; and, thinning of the first stack to eliminate at least the first substrate. | 06-14-2012 |
20120206216 | ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME - An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material. | 08-16-2012 |
20120273904 | MINERAL ELECTRET-BASED ELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING SAME - This device includes a dielectric stack including at least one electret layer ( | 11-01-2012 |
20120306322 | Electrical Component Comprising a Material with a Perovskite Structure and Optimized Electrodes and Fabrication Process - An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation. | 12-06-2012 |
20130106243 | Acoustic Wave Electromechanical Device Comprising a Transduction Region and an Extended Cavity | 05-02-2013 |
20130342075 | OPTIMIZED DEVICE FOR CONVERTING MECHANICAL ENERGY INTO ELECTRICAL ENERGY - An apparatus for converting vibratory mechanical energy into electrical energy includes a mobile mass, a support, first and second beams, the second being piezoelectric, and a junction element. The first beam extends longitudinally between the support and the mass, each of which has a beam end embedded therein. The second beam links the support and the mobile mass. Its elongation stiffness is lower than that of the first beam. The junction element extends between the beams. A first assembly, with a first bending stiffness, comprises the first beam, the second beam, and the junction element. A second assembly consists of the first assembly minus the second beam. Its bending stiffness is less than or equal to half of that of the first assembly. | 12-26-2013 |
20140036449 | Method for limiting the variation in the temperature of an electrical component - A method for limiting temperature variation of an electrical component includes detecting a switch from passive to active states and, in response, varying a potential difference between capacitor electrodes from a first value to a second value, the electrodes being mechanically and electrically insulated from each other by a layer of electrocaloric dielectric, and in response to detecting a switch from active to passive states, varying the potential difference between the electrodes from the second to the first value. | 02-06-2014 |
20140345296 | MODULE FOR WARMING AND, ALTERNATELY, FOR COOLING - A module for warming and, alternately, for cooling, this module comprising an electrocaloric capacitor, an electrical energy storage device and a controllable circuit for transferring electrical energy between the electrocaloric capacitor and the energy storage device. The controllable circuit comprising an inductor connected between the electrocaloric capacitor and the storage device and at least one controllable switch. There is further included a unit programmed to control the switch so as to cause the transfer circuit to toggle successively into the following states and in the following order: an energy recovery state, a disabled state in which it electrically isolates the electrocaloric capacitor and the energy storage device, an energy release state and the disabled state, and each time to maintain the transfer circuit in the disabled state for a duration greater than a predetermined threshold. | 11-27-2014 |