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Ellert

Christoph Ellert, Feldkirch AT

Patent application number	Description	Published
20090025632	VACUUM TREATMENT INSTALLATION FOR THE PRODUCTION OF A DISK-SHAPED WORKPIECE BASED ON A DIELECTRIC SUBSTRATE - A vacuum treatment installation has a vacuum receptacle with a first planar metallic electrode face, a second dielectric electrode face facing the first planar metallic electrode face which forms a surface of a dielectric areal configuration, a metallic coupling face facing a backside of the areal configuration, electric connections on the coupling and on the first electrode face, a gas line system through the coupling face and an areal distributed pattern of apertures through the areal configuration and wherein the areal dielectric configuration is formed by several ceramic tiles.	01-29-2009

Christoph Ellert, Walenstadt CH

Patent application number	Description	Published
20110162582	DEPOSITION OF ACTIVE FILMS - A plasma reactor (	07-07-2011

Christoph Ellert, Sion CH

Patent application number	Description	Published
20110203610	REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD - A vacuum processing system with a vacuum chamber has an inlet, at least first and second outlets, exhaust means at a first of said outlets and a remote plasma source RPS, wherein the RPS is attached to a connecting point to the second of said outlets. In a method for remote plasma cleaning of a vacuum processing system with such an arrangement a flow of radicals is generated by said remote plasma source and directed to the first of said outlets whilst operating exhaust means via the second of said outlets.	08-25-2011

Richard Ellert, New Territories HK

Patent application number	Description	Published
20110205184	ELECTRONIC INTERACTIVE DEVICE, AND RELATED MEMORY - An electronic interactive device including a support base (	08-25-2011