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| 20080213988 | SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD - A substrate heating apparatus having a heating unit for heating a substrate placed in a process chamber which can be evacuated includes a suscepter which is installed between the heating unit and a substrate, and on which the substrate is mounted, and a heat receiving member which is installed to oppose the suscepter with the substrate being sandwiched between them, and receives heat from the heating unit via the suscepter. A ventilating portion which allows a space formed between the heat receiving member and substrate to communicate with a space in the process chamber is formed. | 09-04-2008 |
| 20090191724 | Substrate Heating Apparatus, Heating Method, and Semiconductor Device Manufacturing Method - A substrate heating apparatus having a conductive heater which heats a substrate includes a filament arranged in the conductive heater and connected to a filament power supply to generate thermoelectrons, and an acceleration power supply which accelerates the thermoelectrons between the filament and conductive heater. The filament has inner peripheral portions formed at a predetermined interval along an inner circle concentric with the substrate, outer peripheral portions formed at a predetermined interval on an outer circle concentric with the inner circle and having a diameter larger than that of the inner circle, and a region formed by connecting the end point of each inner peripheral portions and the end point of a corresponding one of the outer peripheral portions. | 07-30-2009 |
| 20100006560 | SUBSTRATE HEATING APPARATUS AND SUBSTRATE HEATING METHOD - In a substrate heating apparatus including a vacuum vessel with an interior separated by a wall body into a first space and a second space, the first space being evacuated to a vacuum by a first exhaust means and accommodating a substrate to be heated, and the second space being evacuated to a vacuum by a second exhaust means and including a heating means for heating the substrate accommodated in the substrate, the time required to evacuate the first space to a vacuum by the first exhaust means is shortened, thus improving the throughput. The wall body has a non-coating surface, which is not coated, on part of a wall body surface which faces the second space. A coating is formed on the remaining portion of the wall body surface. | 01-14-2010 |
| 20100025695 | ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBSTRATE AND SEMICONDUCTOR DEVICE - In an atmosphere in which a silicon carbide (SiC) substrate implanted with impurities is annealed to activate the impurities, by setting a partial pressure of H | 02-04-2010 |
| 20100111512 | HEATING PROCESS APPARATUS - An object of the present invention is to provide a heating process apparatus capable of being controlled to a constant temperature and to temperatures in a high-temperature range higher than or equal to a 1850 degrees. A heating process apparatus includes: a process chamber; a heat-processed object support member provided in the process chamber; a heater provided inside the heat-processed object support member; and temperature measuring means for measuring the temperature of the heat-processed object support member; wherein the temperature measuring means is provided outside a transmissive window provided in a peripheral wall of the process chamber and through which infrared energy radiated from the heat-processed object support member can be transmitted; and the temperature measuring means comprises a collector collecting infrared energy radiated from the heat-processed object support member and a calculating unit calculating temperature based on the ratio between the intensities of two wavelengths in the infrared. | 05-06-2010 |
| 20110121317 | ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBSTRATE AND SEMICONDUCTOR DEVICE - In an atmosphere in which a silicon carbide (SiC) substrate implanted with impurities is annealed to activate the impurities, by setting a partial pressure of H | 05-26-2011 |
| 20110155059 | THIN FILM FORMING APPARATUS, THIN FILM FORMING METHOD, AND SHIELD COMPONENT - The inventors of this invention conducted a test and found out that to prevent peel-off of an adherent film, it is not of essential importance to set the radius of curvature equal to or larger than a predetermined threshold. The inventors of the present invention also found out that peel-off of an adherent film occurs in the region in which the curvature of a shield changes and is less likely to occur when the change in curvature of the shield is small. Accordingly, the key to the problem is the magnitude of a change in curvature of the shield, so changing the curvature stepwise makes it possible to suppress a large change in curvature, and thus to prevent peel-off of an adherent film free from any disadvantages such as deterioration in film thickness distribution, which may occur due to an increase in size of the shield. | 06-30-2011 |
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| 20090058928 | Image Forming Apparatus - An image forming apparatus is described. The image forming apparatus may include a casing including an image forming section, an ejecting section provided above the image forming section and an image scanning section provided above the ejecting section, formed with an ejecting port communicating with the ejecting section; and an operating section. A side surface of the casing closer to the ejecting port includes a generally vertical surface and an upper surface of the casing includes a generally horizontal surface. The casing is provided with an inclined surface inclined along a direction intersecting with the generally vertical surface and the generally horizontal surface for connecting the generally vertical surface and the generally horizontal surface with each other, and the ejecting port is formed on the inclined surface, while the operating section is arranged above the ejecting port on the inclined surface. | 03-05-2009 |
| 20090060564 | IMAGE FORMING APPARATUS - An image forming apparatus is described. The image forming apparatus may include a casing including an image forming section, an ejecting section above the image forming section and an image scanning section above the ejecting section, formed with an ejecting port communicating with the ejecting section; and an operating section. A side surface of the casing closer to the ejecting port includes a generally vertical surface and an upper surface of the casing includes a generally horizontal surface. The casing is provided with an inclined surface inclined along a direction intersecting with the generally vertical surface and the generally horizontal surface for connecting the generally vertical surface and the generally horizontal surface with each other. The ejecting port is formed on the inclined surface. The operating section is inclined along a direction approaching a horizontal surface than the inclined surface under the ejecting port on the inclined surface. | 03-05-2009 |
| 20090060565 | Image Forming Apparatus - An image forming apparatus is described. The image forming apparatus may include a casing including an image forming section, an ejecting section provided above the image forming section and an image scanning section provided above the ejecting section, formed with an ejecting port communicating with the ejecting section; and an operating section. A side surface of the casing closer to the ejecting port includes a generally vertical surface and an upper surface of the casing includes a generally horizontal surface. The casing is provided with an inclined surface inclined along a direction intersecting with the generally vertical surface and the generally horizontal surface for connecting the generally vertical surface and the generally horizontal surface with each other, and the ejecting port is formed on the inclined surface, and the operating section is arranged under the ejecting port on the inclined surface. | 03-05-2009 |
| 20090060575 | IMAGE FORMING APPARATUS - An image forming apparatus is described. The image forming apparatus may include a first casing and a second casing above the first casing. The second casing is provided with an upper surface including a generally horizontal surface, a lower surface extending beyond the upper surface in a generally horizontal direction and a side surface connecting an end edge of the upper surface and an end edge of the lower surface with each other over the whole area. The first casing is provided with an upper surface coming into contact with the lower surface of the second casing over the whole area and a side surface including a generally vertical surface. An inclined surface connecting the generally vertical surface of the first casing and the generally horizontal surface of the second casing with each other, is provided continuously along the first casing and the second casing. | 03-05-2009 |
| 20110200354 | IMAGE FORMING APPARATUS - An image forming apparatus is described. The image forming apparatus may include a first casing and a second casing above the first casing. The second casing is provided with an upper surface including a generally horizontal surface, a lower surface extending beyond the upper surface in a generally horizontal direction and a side surface connecting an end edge of the upper surface and an end edge of the lower surface with each other over the whole area. The first casing is provided with an upper surface coming into contact with the lower surface of the second casing over the whole area and a side surface including a generally vertical surface. An inclined surface connecting the generally vertical surface of the first casing and the generally horizontal surface of the second casing with each other, is provided continuously along the first casing and the second casing. | 08-18-2011 |
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| 20090259372 | DRIVER ASSISTING SYSTEM, METHOD FOR ASSISTING DRIVER, AND VEHICLE INCORPORATING SAME - A driver assisting system calculates a risk perceived (RP) by a driver from the environment, and a potential risk. At least one actuator is coupled to a driver controlled input device (or a driver's seat) to provide a first force to the driver controlled input device to stimulate the driver with a first form of tactile stimulus thereby to forward the calculated risk perceived (RP) to the driver, and to provide a second force to the driver controlled input device to stimulate driver with a second form of tactile stimulus thereby to forward the calculated potential risk to the driver. | 10-15-2009 |
| 20100049407 | DRIVER ASSISTING SYSTEM FOR VEHICLE AND VEHICLE EQUIPPED WITH THE DRIVER ASSISTING SYSTEM - A system assists a driver occupying a seat within a vehicle traveling on a road. The system includes sensing apparatus that senses a plurality of different types of conditions regarding the vehicle. Information apparatus provides information regarding the different types of conditions to the driver by respective different types of haptic inputs. | 02-25-2010 |
| 20100274438 | DRIVING OPERATION ASSISTING SYSTEM, METHOD AND VEHICLE INCORPORATING THE SYSTEM - A driving assisting for calculating risk potential by considering a response delay by the driver and transmitting information related to the risk potential to the operator in a haptic manner. A controller is provided to estimate the response delay based on an operation performed by the operator. Based on the estimated response delay, the controller calculates a future position at which the risk potential is to be calculated. The longer the response delay, the remoter the future position is. The shorter the response delay, the nearer the future position is. The calculated risk potential at the future position may be transmitted to the operator via a pressing force from one of right and left side portions of a driver's seat occupied by the operator. | 10-28-2010 |
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| 20090190873 | Sealing member for use in rolling bearing and rolling bearing - A sealing member, for sealing urea compound-containing grease enclosed in a rolling bearing, in which an elastic body deteriorates to a low extent when the rolling bearing is subjected to a high temperature and which is capable of maintaining a preferable sealing performance for a long time and excellent in reliability and durability. | 07-30-2009 |
| 20090302697 | HOUSING FOR FLUID DYNAMIC BEARING DEVICE - Provided is a housing for a resin fluid dynamic bearing device in which deterioration with time of a fixing force for another member is mitigated and which can maintain a high bearing performance for a long period of time. The housing formed of a resin composition exhibiting a compression creep amount of 8% or less when a compressive pressure of 80 MPa is applied for 168 hours at an atmosphere temperature of 80° C., provides a sufficient fixing force for the another member fixed with a press-fitting force, for example, a bearing sleeve press-fitted into an inner periphery of the housing even after a long term use. Thus, there is no fear of fixing positions of the another member with respect to the housing being deviated and a high bearing performance is maintained for a long period of time. | 12-10-2009 |
| 20100061669 | HOUSING FOR FLUID LUBRICATION BEARING APPARATUSES - A housing for fluid lubrication bearing apparatuses having improved adhesiveness with other components is provided at low costs. | 03-11-2010 |
| 20120126443 | HOUSING FOR FLUID DYNAMIC BEARING DEVICE - Provided is a housing for a resin fluid dynamic bearing device in which deterioration with time of a fixing force for another member is mitigated and which can maintain a high bearing performance for a long period of time. The housing formed of a resin composition exhibiting a compression creep amount of 8% or less when a compressive pressure of 80 MPa is applied for 168 hours at an atmosphere temperature of 80° C., provides a sufficient fixing force for the another member fixed with a press-fitting force, for example, a bearing sleeve press-fitted into an inner periphery of the housing even after a long term use. Thus, there is no fear of fixing positions of the another member with respect to the housing being deviated and a high bearing performance is maintained for a long period of time. | 05-24-2012 |
| 20120175984 | DYNAMIC BEARING DEVICE - Disclosed is a dynamic bearing device which allows production of a smaller housing at low cost and which suppresses ion elution from the resin portion to thereby maintain cleanliness in the dynamic bearing device and exert a desired bearing performance. A dynamic bearing device | 07-12-2012 |
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| 20090025609 | Coating Liquid for Forming Low Dielectric Constant Amorphous Silica-Based Coating Film and the Coating Film Obtained From the Same - A coating liquid for forming a low dielectric constant amorphous silica-based coating film with a dielectric constant of 3.0 or below and a film strength (Young's modulus) of 3.0 GPa or more, and also having a smooth surface with an excellent hydrophobicity. The coating liquid contains (1) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA) and alcoxysilane (AS) in the presence of tetraalkylammoniumhydroxide (TAAOH), or (2) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA), alcoxysilane (AS) and tetraalkylorthosilicate (TAOS) in the presence of tetraalkylammoniumhydroxide (TAAOH). | 01-29-2009 |
| 20090061199 | Coating liquid for formation of protective film for semiconductor processing, method for preparation of the same, and protective film for semiconductor processing made from the coating liquid - Disclosed is a coating liquid for forming a protective film having high film strength and a low specific dielectric constant for semiconductor processing, and a method for preparing the coating liquid. The coating liquid is a liquid composition comprising (a) silicon compound obtained by hydrolyzing tetraalkyl orthosilicate (TAOS) and alkoxysilane (AS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) and water, or a silicon compound obtained by hydrolyzing or partially hydrolyzing tetraalkyl orthosilicate (TAOS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) and water, mixing the hydrolyzed or partially hydrolyzed product with alkoxysilane (AS) or a hydrolyzed or partially hydrolyzed product thereof, and hydrolyzing all or a portion of the mixture, (b) an organic solvent, and (c) water. The coating liquid is characterized in that a quantity of water contained in the liquid composition is in the range from 35 to 65% by weight. | 03-05-2009 |
| 20100003181 | Method For Forming Amorphous Silica-Based Coating Film With Low Dielectric Constant And Thus Obtained Amorphous Silica-Based Coating Film - A method of forming on a substrate an amorphous silica-based coating film having a low dielectric constant of 3.0 or below and a film strength (Young's modulus) of 3.0 GPa or more, which comprises, as a typical one, the steps of; (a) coating on the substrate a liquid composition containing hydrolysate of an organic silicon compound or compounds hydrolyzed in the presence of tetraalkylammonium hydroxide (TAAOH); (b) setting the substrate in a chamber and then drying a coating film formed on the substrate at a temperature in the range from 25 to 340° C.; (c) heating the coating film at a temperature in the range from 105 to 450° C. with introduction of a superheated steam having such a temperature into the chamber, and (d) curing the coating film at a temperature in the range from 350 to 450° C. with introduction of a nitrogen gas into the chamber. | 01-07-2010 |
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| 20080290254 | IMAGING APPARATUS HAVING ELECTRON SOURCE ARRAY - An imaging apparatus includes an electron emission array having electron sources arranged in matrix form and having a plurality of horizontal scan lines, a photoelectric conversion film opposed to the electron emission array, and a control and drive circuit configured to select one or more of the horizontal scan lines in a given video signal output period and to cause the electron sources included in the selected one or more horizontal scan lines to emit electrons toward the photoelectric conversion film to produce a video signal, wherein the control and drive circuit is configured to cause the electron sources included in unselected one or more horizontal scan lines not selected in the given video signal output period to emit electrons toward the photoelectric conversion film in a blanking period immediately preceding the given video signal output period. | 11-27-2008 |
| 20080291307 | IMAGING APPARATUS HAVING ELECTRON SOURCE ARRAY - An imaging apparatus includes an electron emission array having electron sources arranged in matrix form, a photoelectric conversion film opposed to the electron emission array, and a control and drive circuit configured to select one or more horizontal scan lines in a given video signal output period and to cause the electron sources included in the selected one or more horizontal scan lines to emit electrons toward the photoelectric conversion film, wherein the control and drive circuit is further configured to cause the electron sources included in the selected one or more horizontal scan lines to emit electrons toward the photoelectric conversion film in any one or more blanking periods excluding both a blanking period immediately following the given video signal output period and a blanking period immediately preceding a next video signal output period in which the one or more horizontal scan lines will be selected next time. | 11-27-2008 |
| 20080291308 | IMAGING APPARATUS HAVING ELECTRON SOURCE ARRAY - An imaging apparatus includes an electron emission array having electron sources arranged in matrix form and having a plurality of horizontal scan lines, a photoelectric conversion film opposed to the electron emission array, and a control and drive circuit configured to select one or more of the horizontal scan lines in a given video signal output period and to cause the electron sources included in the selected one or more horizontal scan lines to emit electrons toward the photoelectric conversion film to produce a video signal, wherein the control and drive circuit is configured to control electron emission of the electron emission array in a blanking period in response to a signal level of the video signal produced in the given video signal output period. | 11-27-2008 |
| 20090096393 | Electron-Emissive Element and Display Element - Electron-emissive drive units of electron-emissive elements capable of being arranged with a smaller pitch. FET and emitter array units exist in matrix element areas partitioned by a control wiring and data wiring. An exemplary unit is composed of four emitter arrays. The control wiring and data wiring are driven by first and second drive circuits, respectively. Corresponding arrays between units are connected by selection wiring and driven by a third drive circuit. The third drive circuit drives each unit of data wiring every time the drive circuit sequentially drives the four units of control wiring, and the emitter array drive circuit drives each emitter array selection wiring every time the drive circuit sequentially drives the three units of data wiring. Electrons can be emitted in units of arrays smaller than the unit. | 04-16-2009 |
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| 20080203471 | NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR DEVICE - The nitride semiconductor device includes: a nitride semiconductor structure comprising an n-type first layer, a p-type second layer, and an n-type third layer, the nitride semiconductor structure comprising a mesa structure having a lateral surface which forms a wall surface extending from the first, second, to third layers; a gate insulating film formed on the wall surface of the mesa structure; a gate electrode formed as facing the wall surface in the second layer; a drain electrode electrically connected to the first layer; and a source electrode electrically connected to the third layer, the nitride semiconductor structure having a high dislocation region and a low dislocation region arranged along a direction parallel to a principal surface of lamination of the nitride semiconductor structure, a dislocation density of the low dislocation region being lower than that of the high dislocation region, the mesa structure being formed in the low dislocation region. | 08-28-2008 |
| 20100047976 | METHOD FOR FORMING NITRIDE SEMICONDUCTOR LAMINATED STRUCTURE AND METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR ELEMENT - The method for forming a nitride semiconductor laminated structure according to the present invention includes: a first layer forming step of forming an n-type or i-type first layer composed of a group III nitride semiconductor; a second layer forming step of laminating a p-type second layer composed of a group III nitride semiconductor and containing Mg on the first layer; and a third layer forming step of forming an n-type or i-type third layer composed of a group III nitride semiconductor on the second layer after the second layer forming step. | 02-25-2010 |
| 20100078688 | NITRIDE SEMICONDUCTOR DEVICE, NITRIDE SEMICONDUCTOR PACKAGE, AND METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR DEVICE - A nitride semiconductor device of the present invention includes: a nitride semiconductor laminated structure including an n-type first layer, a second layer that is laminated on the first layer and contains a p-type impurity, and an n-type third layer laminated on the second layer, each layer of the nitride semiconductor laminated structure being made of a Group III nitride semiconductor, and having a wall surface extending from the first, second, to third layers; a fourth layer that is formed on the wall surface in the second layer and that has a different conductive characteristic from that of the second layer; a gate insulating film formed to contact the fourth layer; and a gate electrode formed as facing the fourth layer with the gate insulating film being sandwiched between the gate electrode and the fourth layer. | 04-01-2010 |
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| 20080258656 | Control apparatus for electric vehicles - In a hybrid vehicle control apparatus, a motor control unit executes input power control on a MG unit to stabilize a system voltage. This input power control for MG unit is executed independently from torque control on an AC motor so that the input power control and the torque control are stabilized. The motor control unit further adjusts a current control gain for torque control in accordance with an input power amount of the MG unit. As a result, the current control gains of a q-axis current and a d-axis current for torque control are varied in correspondence to variations in torque variation rate in the q-axis direction and the d-axis direction in accordance with the input power amount, so that the torque is restricted from varying with variations in the q-axis current or the d-axis current. | 10-23-2008 |
| 20080281480 | CONTROL APPARATUS FOR ELECTRIC VEHICLES - A motor control unit controls the input electric power of a MG unit to thereby suppress variations of a system voltage and stabilize the system voltage. The torque control of an AC motor and the input electric power control of the MG unit are executed independently from each other, so that the torque control and the input electric power control are stabilized. Further, torque variation zeroing control for correcting a phase of a pulse waveform voltage is executed so that a difference between a first estimated torque computed based on a torque control detection current vector of the AC motor and a second estimated torque computed based on a detection motor current vector is reduced to zero. Thus, uncomfortable torque variation is suppressed in a transient condition of the input electric power control of the MG unit. | 11-13-2008 |
| 20090278483 | CONTROL APPARATUS FOR ELECTRIC VEHICLES - A motor control apparatus for an electric vehicle has an AC motor system including a power conversion unit and a motor/generator. The power conversion unit performs conversion between DC power and AC power to drive the motor/generator. The motor control apparatus further includes a decoupling control section configured to perform decoupling control, which restricts interference between system voltage control and motor torque control, by correcting a control state amount of one of the system voltage control and the motor torque control by a control state amount of the other of the system voltage control and the motor torque control. | 11-12-2009 |
| 20100137098 | VEHICLE DRIVE SYSTEM - In a drive system of a vehicle, the drive power of an engine is divided by a planetary gear set to drive two power transfer shafts. One of the two shafts includes a continuously variable transmission unit and a clutch. The output sides of the two shafts are coupled to a common power output shaft, which is coupled to an AC motor. In a power transfer condition of the clutch, the vehicle is driven with only the output drive power of the engine or both drive powers of the engine and the AC motor. In a power interruption condition of the clutch, the vehicle is driven with only the drive power of the AC motor. The kinetic energy generated at deceleration of the vehicle is converted into electric energy by the AC motor thereby to perform regenerative braking. | 06-03-2010 |
| 20110062904 | ALTERNATING CURRENT MOTOR CONTROL SYSTEM - An alternating current motor control system includes a three-phase synchronous alternating current motor, a rotational position sensor, and a motor control portion. The three-phase synchronous alternating current motor includes a rotor. The rotational position sensor detects a rotational position of the rotor. The motor control portion digitizes a detection signal of the rotational position sensor into a rotational position signal with a resolution that a quotient when an electrical angle of 360 degrees is divided by a multiple of 3 is set to a quantization unit. The motor control portion performs a rectangular wave control of applying a rectangular wave voltage based on the rotational position signal so that an energizing current of the three-phase synchronous alternating current motor is commutated every electrical angle of 60 degrees. | 03-17-2011 |
| 20120165149 | DRIVE FORCE OUTPUT APPARATUS AND VEHICLE HAVING THE SAME - Planetary ratios of first and second planetary gear mechanisms are set such that all of the following values become equal to each other: a maximum value of a drive force of a first MG, which is generated when a total input-to-output speed ratio is a minimum value upon operation of the first MG as a motor; a maximum value of a drive force of the first MG, which is generated when the total input-to-output speed ratio is a maximum value upon operation of the first MG as the motor; and a maximum value of a drive force of the first MG, which is generated when the total input-to-output speed ratio is in a range from the minimum value to the maximum value upon operation of the first MG as a generator. | 06-28-2012 |
