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Egami
Glen Egami, San Jose, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080268651 | Catch-cup to diverter alignment leveling jig - An apparatus for leveling and centering a catch-cup chamber to a diverter chamber of a semiconductor processing chamber is described. In one embodiment, the apparatus has a frame with branches. A coupler is mounted to the end of each branch. A measuring device is mounted to each branch. The apparatus is placed in the diverter. The measuring device measures a distance from a branch to a top surface of the catch-cup chamber. | 10-30-2008 |
| 20090014323 | HIGH TEMPERATURE CATHODE FOR PLASMA ETCHING - The present invention generally is a cathode suitable for use in high temperature plasma etch applications. In one embodiment, the cathode includes a ceramic electrostatic chuck secured to a base. The base has cooling conduits formed therein. A rigid support ring is disposed between the chuck and the base, thereby maintaining the chuck and the base in a spaced-apart relation. | 01-15-2009 |
Glen Eric Egami, San Jose, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20110049779 | SUBSTRATE CARRIER DESIGN FOR IMPROVED PHOTOLUMINESCENCE UNIFORMITY - Embodiments of the present invention relate to methods and apparatus for supporting substrates during processing. One embodiment of the present invention provides a substrate carrier comprising a body configured to provide structure support to one or more substrates. One or more pockets are formed in the body from a top surface. Each pocket is configured to retain one substrate by contacting only a portion of a back side of the substrate. Each pocket has a bottom surface and sidewalls surrounding the bottom surface. The sidewalls define an opening larger than a surface area of the substrate so that at least a majority portion of a bevel edge of the substrate is not in contact with the sidewalls. | 03-03-2011 |
Tadashi Egami, Belmont, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080319797 | Chronic Illness Goal Management - A health management system includes a plurality of goal modules ( | 12-25-2008 |
| 20100094646 | PATIENT HEALTH CARE NETWORK GUIDED ENCOUNTER - In an environment where it is beneficial for chronic health care patients to receive individualized attention on a daily basis, a health care network ( | 04-15-2010 |
| 20100138232 | MOTIVATIONAL SYSTEMS FOR REMOTE PATIENT MANAGEMENT - A patient management system includes a scheduler ( | 06-03-2010 |
| 20100274575 | APPARATUS AND METHODS FOR MEDICAL PATIENT ROLE PLAYING/SIMULATION ACTIVITY - A health care apparatus ( | 10-28-2010 |
Yasuhiro Egami, Gottingen DE
| Patent application number | Description | Published |
|---|---|---|
| 20090010306 | Temperature Sensitive Paint for an Extended Temperature Range - A temperature sensitive paint comprises a binder for forming a polymer matrix, a transition metal complex embedded in the binder and displaying a temperature dependent fluorescence, the fluorescence of the transition metal complex showing a maximum relative temperature sensitivity per Kelvin at a first temperature, and a rare earth complex also embedded in the binder and displaying a temperature dependent fluorescence, the fluorescence of the rare earth complex showing a maximum relative temperature sensitivity per Kelvin at a second temperature. The second temperature is higher than the first temperature by 50 to 150 Kelvin so that the overall temperature range covered by both complexes as temperature probes is extended. | 01-08-2009 |