Patent application number | Description | Published |
20080250384 | SYSTEMS AND METHODS FOR CREATING INSPECTION RECIPES - Systems and methods for creating inspection recipes are provided. One computer-implemented method for creating an inspection recipe includes acquiring a first design and one or more characteristics of output of an inspection system for a wafer on which the first design is printed using a manufacturing process. The method also includes creating an inspection recipe for a second design using the first design and the one or more characteristics of the output acquired for the wafer on which the first design is printed. The first and second designs are different. The inspection recipe will be used for inspecting wafers after the second design is printed on the wafers using the manufacturing process. | 10-09-2008 |
20090037134 | SEMICONDUCTOR DEVICE PROPERTY EXTRACTION, GENERATION, VISUALIZATION, AND MONITORING METHODS - Various methods, carrier media, and systems for monitoring a characteristic of a specimen are provided. One computer-implemented method for monitoring a characteristic of a specimen includes determining a property of individual pixels on the specimen using output generated by inspecting the specimen with an inspection system. The method also includes determining a characteristic of individual regions on the specimen using the properties of the individual pixels in the individual regions. The method further includes monitoring the characteristic of the specimen based on the characteristics of the individual regions. | 02-05-2009 |
20090080759 | SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS - Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media. | 03-26-2009 |
20100119144 | METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA - Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium. | 05-13-2010 |
20100142800 | METHODS AND SYSTEMS FOR DETECTING DEFECTS ON A RETICLE - Methods and systems for detecting defects on a reticle are provided. One method includes printing a single die reticle in first areas of a wafer using different values of a parameter of a lithography process and at least one second area using a nominal value of the parameter. The method also includes acquiring first images of the first areas and second image(s) of the at least one second area. In addition, the method includes separately comparing the first images acquired for different first areas to at least one of the second image(s). The method further includes detecting defects on the reticle based on first portions of the first images in which variations in the first images compared to the at least one second image are greater than second portions of the first images and the first portions that are common to two or more of the first images. | 06-10-2010 |
20110224932 | MONITORING OF TIME-VARYING DEFECT CLASSIFICATION PERFORMANCE - Systems and methods for monitoring time-varying classification performance are disclosed. A method may include, but is not limited to: receiving one or more signals indicative of one or more properties of one or more samples from one or more scanning inspection tools; determining populations of one or more defect types for the one or more samples according an application of one or more classification rules to the one or more signals received from the one or more scanning inspection tools; determining populations of the one or more defect types for the one or more samples using one or more high-resolution inspection tools; and computing one or more correlations between populations of one or more defect types for one or more samples determined from application of one or more classification rules applied to one or more signals received from the one or more scanning inspection tools and populations of the one or more defect types for the one or more samples determined using the one or more high-resolution inspection tools. | 09-15-2011 |
20110286656 | METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA - Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least to similar. The method further includes storing results of the binning step in a storage medium. | 11-24-2011 |
20110320149 | Selecting One or More Parameters for Inspection of a Wafer - Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are provided. | 12-29-2011 |
20140241610 | Generalized Virtual Inspector - Generalized virtual inspectors are provided. One system includes two or more actual systems configured to perform one or more processes on specimen(s) while the specimen(s) are disposed within the actual systems. The system also includes one or more virtual systems coupled to the actual systems to thereby receive output generated by the actual systems and to send information to the actual systems. The virtual system(s) are configured to perform one or more functions using at least some of the output received from the actual systems. The virtual system(s) are not capable of having the specimen(s) disposed therein. | 08-28-2014 |
20140376801 | Detecting Defects on a Wafer with Run Time Use of Design Data - Methods and systems for detecting defects on a wafer are provided. One method includes creating a searchable database for a design for a wafer, which includes assigning values to different portions of the design based on patterns in the different portions of the design and storing the assigned values in the searchable database. Different portions of the design having substantially the same patterns are assigned the same values in the searchable database. The searchable database is configured such that searching of the database can be synchronized with generation of output for the wafer by one or more detectors of a wafer inspection system. Therefore, as the wafer is being scanned, design information for the output can be determined as fast as the output is generated, which enables multiple, desirable design based inspection capabilities. | 12-25-2014 |
20150324964 | Inspection Recipe Setup from Reference Image Variation - Systems and methods for generating information for use in a wafer inspection process are provided. One method includes acquiring output of an inspection system for die(s) located on wafer(s), combining the output for the die(s) based on within die positions of the output, determining, on a within die position basis, a statistical property of variation in values of characteristic(s) of the combined output, and assigning the within die positions to different groups based on the statistical properties determined for the within die positions. The method also includes storing information for the within die positions and the different groups to which the within die positions are assigned in a storage medium that is accessible to the inspection system for performing the wafer inspection process, which includes applying defect detection parameter(s) to additional output of the inspection system generated for a wafer based on the information thereby detecting defects on the wafer. | 11-12-2015 |
20160025648 | Virtual Inspection Systems with Multiple Modes - Methods and systems for determining one or more characteristics for defects detected on a specimen are provided. One system includes one or more computer subsystems configured for identifying a first defect that was detected on a specimen by an inspection system with a first mode but was not detected with one or more other modes. The computer subsystem(s) are also configured for acquiring, from the storage medium, one or more images generated with the one or more other modes at a location on the specimen corresponding to the first defect. In addition, the computer subsystem(s) are configured for determining one or more characteristics of the acquired one or more images and determining one or more characteristics of the first defect based on the one or more characteristics of the acquired one or more images. | 01-28-2016 |
20160027164 | DETERMINING COORDINATES FOR AN AREA OF INTEREST ON A SPECIMEN - Methods and systems for determining coordinates for an area of interest on a specimen are provided. One system includes one or more computer subsystems configured for, for an area of interest on a specimen being inspected, identifying one or more targets located closest to the area of interest. The computer subsystem(s) are also configured for aligning one or more images for the one or more targets to a reference for the specimen. The image(s) for the target(s) and an image for the area of interest are acquired by an inspection subsystem during inspection of the specimen. The computer subsystem(s) are further configured for determining an offset between the image(s) for the target(s) and the reference based on results of the aligning and determining modified coordinates of the area of interest based on the offset and coordinates of the area of interest reported by the inspection subsystem. | 01-28-2016 |
Patent application number | Description | Published |
20160004390 | Method and System for Generating a Smart Time-Lapse Video Clip - An electronic device with a display, processor(s), and memory displays a video monitoring user interface including a video feed from a camera located remotely from the client device in a first region and an event timeline in a second region, the event timeline including event indicators for motion events previously detected by the camera. The electronic device detects a user input selecting a portion of the event timeline, where the selected portion of the event timeline includes a subset of the event indicators. In response to the user input, the electronic device causes generation of a time-lapse video clip of the selected portion of the event timeline. The electronic device displays the time-lapse video clip, where motion events corresponding to the subset of the event indicators are played at a slower speed than the remainder of the selected portion of the event timeline. | 01-07-2016 |
20160005280 | Method and Device for Processing Motion Events - The disclosed embodiments include an electronic device with a display, processor(s), and memory. The electronic device displays a user interface on the display, the user interface including video information corresponding to a camera, the video information including a field of view of the camera. The electronic device receives user identification of a spatial zone within the user interface, the spatial zone corresponding to at least a portion of the field of view of the camera; and forgoes user notification of subsequent motion events involving the spatial zone. | 01-07-2016 |
20160005281 | Method and System for Processing Motion Event Notifications - The disclosed embodiments include a system for processing motion events. The system obtains a video stream from a camera, the video stream corresponding to a field of view of the camera and obtains identification of a spatial zone, the spatial zone corresponding to at least a portion of the field of view of the camera. For each motion event detected in the video stream: (1) the system determines whether the motion event involves the spatial zone; and (2), in accordance with a determination that the motion event involves the spatial zone, the system suppresses a first user notification for the motion event. | 01-07-2016 |
Patent application number | Description | Published |
20130089037 | INTELLIGENT BACKHAUL SYSTEM - A intelligent backhaul system is disclosed to manage and control multiple intelligent backhaul radios within a geographic zone. The intelligent backhaul system includes multiple intelligent backhaul radios (IBRs) that are able to function in both obstructed and unobstructed line of sight propagation conditions, one or more intelligent backhaul controllers (IBCs) connecting the IBRs with other network elements, and an intelligent backhaul management system (IBMS). The IBMS may include a private and/or public server and/or agents in one or more IBRs or IBCs. | 04-11-2013 |
20130089041 | Intelligent Backhaul Radio with Multi-Interface Switching - A intelligent backhaul system is disclosed to manage and control multiple intelligent backhaul radios within a geographic zone. The intelligent backhaul system includes multiple intelligent backhaul radios (IBRs) that are able to function in both obstructed and unobstructed line of sight propagation conditions, one or more intelligent backhaul controllers (IBCs) connecting the IBRs with other network elements, and an intelligent backhaul management system (IBMS). The IBMS may include a private and/or public server and/or agents in one or more IBRs or IBCs. | 04-11-2013 |
20130089042 | Intelligent Backhaul Management System - A intelligent backhaul system is disclosed to manage and control multiple intelligent backhaul radios within a geographic zone. The intelligent backhaul system includes multiple intelligent backhaul radios (IBRs) that are able to function in both obstructed and unobstructed line of sight propagation conditions, one or more intelligent backhaul controllers (IBCs) connecting the IBRs with other network elements, and an intelligent backhaul management system (IBMS). The IBMS may include a private and/or public server and/or agents in one or more IBRs or IBCs. | 04-11-2013 |
20130089083 | Intelligent Backhaul Controller - A intelligent backhaul system is disclosed to manage and control multiple intelligent backhaul radios within a geographic zone. The intelligent backhaul system includes multiple intelligent backhaul radios (IBRs) that are able to function in both obstructed and unobstructed line of sight propagation conditions, one or more intelligent backhaul controllers (IBCs) connecting the IBRs with other network elements, and an intelligent backhaul management system (IBMS). The IBMS may include a private and/or public server and/or agents in one or more IBRs or IBCs. | 04-11-2013 |
Patent application number | Description | Published |
20130117040 | Method and System for Supporting a Health Regimen - A method and user interface for supporting a health regimen comprising: grouping a plurality of participants into a matched group; providing, to each participant of the matched group, a body metric measurement device configured to communicate remotely with a network; receiving a set of body metric measurement data over the network from the participant and a portion of the participants of the matched group; storing the set of body metric measurement data on a server; determining a trend in the body metric measurement of the participant; determining a trend in the body metric measurement of the portion of the matched group; providing feedback to the participant based on the trend of the participant relative to the trend of the portion of the matched group; providing, to each participant of the matched group, a health regimen curriculum; and providing a physical motivational incentive to the participant. | 05-09-2013 |
20140004492 | System, Method, and Article to Prompt Behavior Change | 01-02-2014 |
20140214442 | Systems and Methods for Tracking Participants in a Health Improvement Program - System and methods for tracking participants in a health improvement program are provided herein. A method includes receiving a plurality of requests to participate in a health program from a plurality of participants, each of the plurality of participants being associated with a health condition requiring improvement, matching participants into a participant group, defining a group program, the group program having an overall program time frame, the group program further having a series of sub-programs that when executed by the participants in the participant group aid the participants in achieving the common heath goal, initiating a first sub-program of the series of sub-programs for all participants at a specified start time, and tracking performance of the participants in the participant group during the series of sub-programs until completion of the group program. | 07-31-2014 |
20140214443 | Systems and Methods for Displaying Metrics Associated With a Health Improvement Program - System and methods for tracking participants in a health improvement program are provided herein. A method includes tracking performance of participants in a group program, the group program having an overall program time frame, the group program having one or more sub-programs that when executed by the participants in the participant group aid the participants in achieving the common heath goal, each of the sub-programs comprising a task to be completed by the participant; and generating, for each participant in the group program, a first visual display that represents a current completion percentage for at least one of a sub-program and the group program, the current completion percentage being calculated from a completion percentage of each of the one or more sub-programs, and a second visual display that represents a current completion percentage of the group program. | 07-31-2014 |
20140222454 | Systems and Methods That Administer a Health Improvement Program and an Adjunct Medical Treatment - Systems and methods that administer a health improvement program and an adjunct medical treatment are provided herein. A method includes tracking performance of a participant in a health improvement program, the health improvement program designed to improve the health condition of the participant, comparing the performance of the participant to a minimum threshold requirement that signals that the participant is not adequately improving under the health improvement program, identifying when the performance of the participant falls below the minimum threshold level, and when the performance of the participant falls below the minimum threshold level, outputting a message to at least one of the participant or a third party that the participant is a potential candidate for an adjunct medical treatment. | 08-07-2014 |