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Dominik Marcel
Dominik Marcel Vaudravange, Neuss DE
| Patent application number | Description | Published |
|---|---|---|
| 20080203325 | Method of Protecting a Radiation Source Producing Euv-Radiation and/or Soft X-Rays Against Short Circuits - The present invention relates to a method of protecting a radiation source producing extreme ultraviolet radiation (EUV) and/or soft X-rays against short circuits. The method applies to radiation sources producing said EUV-radiation and/or soft X-rays by means of an electrically operated discharge, which is ignited in a vapor between at least two electrodes ( | 08-28-2008 |
Dominik Marcel Vaudrevange, Neuss DE
| Patent application number | Description | Published |
|---|---|---|
| 20090206268 | METHOD OF INCREASING THE CONVERSION EFFICIENCY OF AN EUV AND/OR SOFT X-RAY LAMP AND A CORRESPONDING APPARATUS - The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma ( | 08-20-2009 |
| 20100194313 | HIGH VOLTAGE ELECTRICAL CONNECTION LINE - The present invention relates to a high voltage electrical connection line ( | 08-05-2010 |
| 20110127442 | METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS - The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma ( | 06-02-2011 |
Dominik Marcel Vaudrevange, Aachen DE
| Patent application number | Description | Published |
|---|---|---|
| 20090168967 | METHOD AND APPARATUS FOR GENERATING RADIATION IN THE WAVELENGTH RANGE FROM ABOUT 1 NM TO ABOUT 30 NM, AND USE IN A LITHOGRAPHY DEVICE OR IN METROLOGY - A description is given of a method and an apparatus for generating radiation ( | 07-02-2009 |