Patent application number | Description | Published |
20110226949 | Inspection System - A combined inspection system for inspecting an object disposable in an object plane | 09-22-2011 |
20120199740 | Particle Beam System - Particle beam system, comprising: a particle beam, source for generating a particle beam; an objective lens for focusing the particle beam onto an object plane, wherein the objective lens comprises a focal length and an optical axis; and a scintillator arrangement, which comprises an electron receiving surface facing the object plane and which is arranged such that it is exposed to electrons, which emanate from the object plane, wherein the scintillator arrangement further comprises a light exit face, wherein the scintillator arrangement is configured such that light rays which are generated by electrons, which are incident on the electron receiving surface leave the scintillator arrangement at the light exit face. | 08-09-2012 |
20130187046 | Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements - The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles ( | 07-25-2013 |
20150069235 | Particle Optical System - A particle optical system comprises a beam generating system ( | 03-12-2015 |
20150083911 | Method of Detecting Electrons, an Electron-Detector and an Inspection System - An electron-detector comprises a scintillator plate | 03-26-2015 |
20150090879 | CHARGED PARTICLE MULTI-BEAM INSPECTION SYSTEM AND METHOD OF OPERATING THE SAME - A charged particle multi-beam inspection system comprises a beam generator directing a plurality of primary charged particle beams onto an object to produce an array of beam spots; an array of a first number of detection elements generating detection signals upon incidence of electrons; imaging optics imaging the array of beam spots onto the array of detection elements; wherein the beam generator includes a multi-aperture plate having an array of a second number of apertures greater than the first number; wherein the beam generator includes a selector having plural different states, wherein, in each of the plural different states, the apertures of a different group of apertures are each traversed by one primary charged particle beam, wherein a number of the apertures of the different group of apertures is equal to the first number. | 04-02-2015 |
20150348738 | PARTICLE BEAM SYSTEM - Particle beam system comprising a particle source; a first multi-aperture plate with a multiplicity of openings downstream of which particle beams are formed; a second multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams; an aperture plate with an opening which is penetrated by all the particles which also penetrate the openings in the first and the second multi-aperture plate; a third multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams, and with a multiplicity of field generators which respectively provide a dipole field or quadrupole field for a beam; and a controller for feeding electric potentials to the multi-aperture plates and the aperture plate so that the second openings in the second multi-aperture plate respectively act as a lens on the particle beams -and feed adjustable excitations to the field generators. | 12-03-2015 |
20150357157 | PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT - A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values. | 12-10-2015 |