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Derra, Aachen
Guenther Hans Derra, Aachen DE
| Patent application number | Description | Published |
|---|---|---|
| 20100051064 | METHOD OF CLEANING AND AFTER TREATMENT OF OPTICAL SURFACES IN AN IRRADIATION UNIT - The present invention relates to a method of cleaning and after treatment of optical surfaces in an irradiation unit, said irradiation unit comprising a radiation source ( | 03-04-2010 |
| 20100051827 | METHOD OF CLEANING OPTICAL SURFACES OF AN IRRADIATION UNIT IN A TWO-STEP PROCESS - The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces thereby forming a volatile compound with a first portion of said contaminations. In an operation pause of the irradiation unit prior to the cleaning step, a pretreatment step is performed, in which a second gas or gas mixture is brought into contact with said optical surfaces. Said second gas or gas mixture is selected to react with a second portion of said contaminations different from said first portion to form a reaction product, which is able to form a volatile compound with said first gas or gas mixture. | 03-04-2010 |
| 20110002569 | DEBRIS MITIGATION DEVICE WITH ROTATING FOIL TRAP AND DRIVE ASSEMBLY - The present invention relates to a debris mitigation device for use with a radiation source ( | 01-06-2011 |
| 20110048452 | METHOD AND DEVICE FOR CLEANING AT LEAST ONE OPTICAL COMPONENT - A method of cleaning at least one optical component of at least one irradiation device is described, which device comprises at least one radiation source in a vacuum chamber, which source generates in particular extreme ultraviolet and/or soft X-ray radiation whose rays are guided via the optical component onto a workpiece to be treated, during which said optical component is at least partly polluted because of an inorganic substance introduced by the radiation source. | 03-03-2011 |
| 20110133621 | ROTATING WHEEL ELECTRODE DEVICE FOR GAS DISCHARGE SOURCES COMPRISING WHEEL COVER FOR HIGH POWER OPERATION - The present invention relates to an electrode device ( | 06-09-2011 |
| 20110133641 | ELECTRODE DEVICE FOR GAS DISCHARGE SOURCES AND METHOD OF OPERATING A GAS DISCHARGE SOURCE HAVING THIS ELECTRODE DEVICE - The present invention relates to an electrode device for gas discharge sources, a gas discharge source comprising such an electrode device and to a method of operating the gas discharge source. The electrode device comprises an electrode wheel ( | 06-09-2011 |
Gunther Hans Derra, Aachen DE
| Patent application number | Description | Published |
|---|---|---|
| 20080212044 | Debris Mitigation System with Improved Gas Distribution - The present invention relates to a debris mitigation system, in particular for use in a radiation unit for EUV radiation and/or X-rays. The debris mitigation system comprises a foil trap ( | 09-04-2008 |
| 20080298552 | Method and Device for Generating in Particular Euv Radiation And/or Soft X-Ray Radiation - A method of generating in particular EUV radiation ( | 12-04-2008 |
| 20080315786 | Method and Circuit Arrangement For the Operation of a Discharge Lamp - A method and a circuit arrangement for the operation of a discharge lamp, in particular of a high-pressure gas mercury discharge lamp (HID[high intensity discharge]) lamp or a UHP [ultra high performance] lamp, are described, which are used to improve the color rendering index of the light. This is essentially achieved by feeding the lamp current on which current pulses with a suitably adjusted amplitude I | 12-25-2008 |