| Patent application number | Description | Published |
|---|
| 20090121268 | Semiconductor Memory Devices Having Vertical Channel Transistors and Related Methods - A semiconductor memory device may include a semiconductor substrate with an active region extending in a first direction parallel with respect to a surface of the semiconductor substrate. A pillar may extend from the active region in a direction perpendicular with respect to the surface of the semiconductor substrate with the pillar including a channel region on a sidewall thereof. A gate insulating layer may surround a sidewall of the pillar, and a word line may extend in a second direction parallel with respect to the surface of the semiconductor substrate. Moreover, the first and second directions may be different, and the word line may surround the sidewall of the pillar so that the gate insulating layer is between the word line and the pillar. A contact plug may be electrically connected to the active region and spaced apart from the word line, and a bit line may be electrically connected to the active region through the contact plug with the plurality of bit lines extending in the first direction. Related methods are also discussed. | 05-14-2009 |
| 20090174001 | SEMICONDUCTOR DEVICE HAVING FIN TRANSISTOR AND PLANAR TRANSISTOR AND ASSOCIATED METHODS OF MANUFACTURE - Disclosed is a fin transistor and a planar transistor and a method of forming the same. The fin transistor and the planar transistor are formed to have gate electrodes with similar thicknesses by selectively recessing a semiconductor substrate in a planar region where the planar transistor is formed. | 07-09-2009 |
| 20110049596 | Semiconductor Device Having Impurity Doped Polycrystalline Layer Including Impurity Diffusion Prevention Layer and Dynamic Random Memory Device Including the Semiconductor Device - Provided are semiconductor devices including a semiconductor substrate, an insulating layer including a contact hole through which the semiconductor substrate is exposed, and a polysilicon layer filling the contact hole. The polysilicon layer is doped with impurities and includes an impurity-diffusion prevention layer. In the semiconductor devices, the impurities included in the polysilicon layer do not diffuse into the insulating layer and the semiconductor substrate due to the impurity-diffusion prevention layers. | 03-03-2011 |
| 20110079857 | Semiconductor devices and methods of manufacturing the same - In semiconductor devices, methods of forming the same, the semiconductor device include a first gate structure having a first gate oxide layer pattern, a first polysilicon layer pattern containing atoms larger than silicon and a first hard mask layer pattern on substrates under tensile stress. N-type impurity regions are formed under the surface of the substrate on both sides of the first gate structure. A second gate structure having a second gate oxide layer pattern, a second polysilicon layer pattern containing atoms smaller than silicon and a second hard mask layer pattern on substrates under compressive stress. Additionally, P-type impurity regions are formed under the surface of the substrate on both sides of the second gate structure. The semiconductor devices have good device properties. | 04-07-2011 |
| 20110124172 | METHOD OF FORMING INSULATING LAYER AND METHOD OF MANUFACTURING TRANSISTOR USING THE SAME - Provided are a method of forming an insulating layer and a method of manufacturing a transistor using the method. The method of forming the insulating layer includes forming a preliminary insulating layer including silicon oxide (SiO | 05-26-2011 |
