| Patent application number | Description | Published |
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| 20090200464 | TEM WITH ABERRATION CORRECTOR AND PHASE PLATE - The invention relates to a TEM with a corrector ( | 08-13-2009 |
| 20100072366 | METHOD FOR CORRECTING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS - The invention relates to a method for correcting distortions introduced by the projection system ( | 03-25-2010 |
| 20100159370 | METHOD FOR FORMING MICROSCOPIC STRUCTURES ON A SUBSTRATE - The invention relates to a method for forming microscopic structures. By scanning a focused particle beam over a substrate in the presence of a precursor fluid, a patterned seed layer is formed. By now growing this layer with Atomic Layer Deposition or Chemical Vapour Deposition, a high quality layer can be grown. | 06-24-2010 |
| 20100224592 | CHARGED PARTICLE BEAM PROCESSING - Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes. | 09-09-2010 |
| 20100255213 | Method for Forming Microscopic 3D Structures - A method for forming microscopic 3D structures. In the method according to the invention a substrate ( | 10-07-2010 |
| 20110097706 | MICRO-REACTOR FOR OBSERVING PARTICLES IN A FLUID - The invention relates to a micro-reactor for observing small particles, cells, bacteria, viruses or protein molecules in a fluid. The micro-reactor shows a first channel formed between two layers for containing the fluid, with an inlet and an outlet, the two layers separated by a first distance. A likewise second channel with an inlet and an outlet is placed adjacent to the first channel. A gap connects the first channel and the second channel, at the gap at least one layer showing a window transparent to the method of inspection and at the window the two layers being separated by a very small distance of, for example, 1 μm or less. | 04-28-2011 |
| Patent application number | Description | Published |
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| 20080297744 | Lithographic apparatus and device manufacturing method - An immersion lithographic apparatus is described with a drain configured to remove liquid from a gap between an edge of the substrate and the substrate table on which the substrate is supported. The drain is provided with a means to provide liquid to the drain irrespective of the position of the substrate table and/or a means to saturate gas within the drain. Those measures reduce the variations in heat load due to evaporation of liquid in the drain. | 12-04-2008 |
| 20090055114 | METHOD AND ARRANGEMENT FOR CORRECTING THERMALLY-INDUCED FIELD DEFORMATIONS OF A LITHOGRAPHICALLY EXPOSED SUBSTRATE - The invention provides a method for correcting thermally-induced field deformations of a lithographically exposed substrate. First, a model is provided to predict thermally-induced field deformation information of a plurality of fields of the substrate. The pre-specified exposure information used to configure an exposure of the fields is then modified based on the thermally-induced deformation information as predicted by the model. Finally a pattern is exposed onto the fields in accordance with the pre-specified exposure information as modified. The predicting of thermally-induced field deformation information by the model includes predicting of deformation effects of selected points on the substrate. It is based on a time-decaying characteristic as energy is transported across substrate; and a distance between the selected points and an edge of the substrate. | 02-26-2009 |
| 20090055115 | METHOD AND ARRANGEMENT FOR PREDICTING THERMALLY-INDUCED DEFORMATION OF A SUBSTRATE, AND A SEMICONDUCTOR DEVICE - The invention provides a method for correcting thermally-induced field deformations of a lithographically exposed substrate. First, a model is provided to predict thermally-induced field deformation information of a plurality of fields of the substrate. The pre-specified exposure information used to configure an exposure of the fields is then modified based on the thermally-induced deformation information as predicted by the model. Finally a pattern is exposed onto the fields in accordance with the pre-specified exposure information as modified. The predicting of thermally-induced field deformation information by the model includes predicting of deformation effects of selected points on the substrate. It is based on a time-decaying characteristic as energy is transported across substrate; and a distance between the selected points and an edge of the substrate. | 02-26-2009 |
| 20100321650 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A lithographic apparatus is described having a liquid supply system configured to at least partly fill a space between a projection system of the lithographic apparatus and a substrate with liquid, a barrier member arranged to substantially contain the liquid within the space, and one or more elements to control and/or compensate for evaporation of liquid from the substrate. | 12-23-2010 |
| Patent application number | Description | Published |
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| 20080219889 | System for Automatically Processing a Biological Sample - The invention provides a system, a processing apparatus, a sample unit, a reagent unit and a method for processing a biological sample in the inside of the sample unit. The system comprises at least a processing apparatus and a sample unit, the sample unit comprises a plurality of microfluidic elements, the processing apparatus comprises actuation means capable of actuating at the microfluidic elements such that a quick, cheap and accurate analysis of the biological sample is possible. | 09-11-2008 |
| 20090040595 | ARRAY OF SPATIAL LIGHT MODULATORS AN DMETHOD OF PRODUCTION OF A SPATIAL LIGHT MODULATOR DEVICE - For the production of a SLM device, one mounts a spatial light modulator (SLM) ( | 02-12-2009 |
| 20100047774 | CARTRIDGE, SYSTEM AND METHOD FOR AUTOMATED MEDICAL DIAGNOSTICS - Disclosed is a cartridge for the detection of the presence, absence and/or amount of a target nucleotide sequence in a sample comprising one or more nucleic acid sequences. The cartridge comprises a generic part and one or more separate application-specific parts, which are connectable to the generic part. Also disclosed is a system for the detection of the presence, absence and/or amount of a target nucleotide sequence in a sample comprising one or more nucleic acid sequences. This system comprising a reusable apparatus, wherein said apparatus is configured to receive a cartridge and to control a process for the detection of the presence, absence and/or amount of a target nucleotide sequence in the sample, being present in said cartridge. | 02-25-2010 |
| 20100151565 | CARTRIDGE FOR AUTOMATED MEDICAL DIAGNOSTICS - The present invention relates to a cartridge for the detection of the presence, absence and/or amount of a target nucleotide sequence in a sample comprising one or more nucleic acid sequences. The cartridge comprises a first component and a second component being connectable to each other, the first component comprising at least a first fluid opening and a first sealing surface and the second component comprising at least a second fluid opening and a second sealing surface. Upon connection of the first and second component the first and second fluid opening are placeable in fluid communication and the first and second sealing surfaces are placeable against each other to seal the fluid communication between the first and second fluid opening. The invention is characterized in that the cartridge comprises biasing means for biasing the second sealing surface in the direction of the first sealing surface. | 06-17-2010 |
| 20100233682 | FLUID PROCESSING AND VOLUME DETERMINATION SYSTEM - A fluid processing system is described having at least two chambers. Each of said chambers is separated in a first and a second part by a flexible membrane, the first part, in use, comprising essentially a gas and the second part, in use comprising essentially a non-gaseous fluid, an inlet and/or an outlet means. One or more channels are provided connecting said second parts of said at least two chambers, wherein at least one of said one or more channels includes a pressure sensitive one-way valve. Further, means for exerting pressure on said first part of at least one of said at least two chambers is provided to allow transfer of a sample liquid. | 09-16-2010 |
