| Patent application number | Description | Published |
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| 20090212557 | TWO-ELEMENT TANDEM FLEXIBLE JOINT - A flexible joint has an extension mounted to a housing for relative angular displacement. Two or more annular elastomeric flex elements are stacked in a co-axial fashion and joined mechanically to mount the extension to the housing so that the flex elements react in parallel to angular and axial displacements of the extension with respect to the housing so that tensile load upon the extension places each of the flex elements in compression to split and share the tensile load among the flex elements in proportion to their relative axial stiffnesses. Therefore, for a given housing size or footprint, the overall load capacity is increased, and the lifetime of the flexible joint is increased for a given load capacity. The flex elements may have a common center of rotation, and the flex elements may be disposed either on the same side of the center of rotation or on opposite sides. | 08-27-2009 |
| 20090212558 | PRESSURE ISOLATION SYSTEM FOR FLEXIBLE PIPE JOINTS - A flexible pipe joint has two annular elastomeric flex elements stacked in a co-axial fashion at an inner radius from a common center of rotation, and at least one elastomeric flex element disposed at an outer radius from the common center of rotation. The flex elements at the inner radius are coupled mechanically in series between the extension pipe and the housing of the flexible pipe joint, and the flex element at the outer radius is coupled mechanically in parallel with the series combination of the inner flex elements. The inner flex elements isolate the flex element at the outer radius from transport fluid, and the flex element at the outer radius reduces the axial compression of the inner flex elements. Thus, the inner flex elements may have a reduced radius and a different composition to handle a higher loading of heat and pressure. | 08-27-2009 |
| 20110012343 | DOUBLE-ENDED FLEXIBLE PIPE JOINT HAVING STACKED CO-AXIAL PRIMARY AND SECONDARY ANNULAR ELASTOMERIC FLEX ELEMENTS - A double-ended flexible pipe joint has first and second extension pipes extending from opposite ends of an outer housing, and first and second primary annular elastomeric flex elements mounting the first and second extension pipes to the outer housing. An inner housing is disposed in the outer housing, and first and second secondary annular elastomeric flex elements disposed in the inner housing mount the first and second extension pipes to the inner housing. Tension upon the first and second extension pipes places each of the first and second primary flex elements and each of the first and second secondary flex elements in compression. The first and second secondary flex elements contain fluid pressure within the first and second extension pipes so that the first and second primary flex elements are not subjected to the fluid pressure within the extension pipes. | 01-20-2011 |
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| 20080202588 | METHOD AND APPARATUS FOR CONTROLLING GAS FLOW TO A PROCESSING CHAMBER - A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing. | 08-28-2008 |
| 20080202609 | METHOD AND APPARATUS FOR CONTROLLING GAS FLOW TO A PROCESSING CHAMBER - A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing. | 08-28-2008 |
| 20080202610 | METHOD AND APPARATUS FOR CONTROLLING GAS FLOW TO A PROCESSING CHAMBER - A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing. | 08-28-2008 |
| 20100251828 | METHOD AND APPARATUS FOR GAS FLOW MEASUREMENT - A method and apparatus for measuring gas flow are provided. In one embodiment, a calibration circuit for gas control may be utilized to verify and/or calibrate gas flows utilized for backside cooling, process gas delivery, purge gas delivery, cleaning agent delivery, carrier gases delivery and remediation gas delivery, among others. | 10-07-2010 |
