Patent application number | Description | Published |
20080248427 | Composition for Coating over a Photoresist Pattern Comprising a Lactam - The present invention relates to an aqueous coating composition for coating a photoresist pattern comprising a polymer containing a lactam group of structure (1) | 10-09-2008 |
20090087782 | PHOTOACTIVE COMPOUNDS - The present application relates to a compound of formula A-X—B, where (i) A-X—B form an ionic compound Ai Xi Bi where Ai and Bi are each individually an organic onium cation; and Xi is anion of the formula Q-R | 04-02-2009 |
20100119979 | Antireflective Coating Composition Comprising Fused Aromatic Rings - The present invention relates to an organic spin coatable antireflective coating composition comprising with (i) at least one unit with fused aromatic rings in the backbone of the polymer of structure (1), (ii) at least one aromatic unit ring in the backbone of the polymer of structure (2) where the aromatic ring has a pendant alkylene(fusedaromatic) group and a pendant hydroxy group, and, (iii) at least one unit with an aliphatic moiety in the backbone of the polymer of structure (3). | 05-13-2010 |
20100151392 | ANTIREFLECTIVE COATING COMPOSITIONS - The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer, a linking component, a crosslinker, and an acid generator. The invention further relates to a process for imaging the present composition. | 06-17-2010 |
20120219919 | Composition for Coating over a Photoresist Pattern Comprising a Lactam - The present invention relates to an aqueous coating composition for coating a photoresist pattern comprising a polymer containing a lactam group of structure ( | 08-30-2012 |
20120251956 | ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF - The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): | 10-04-2012 |
20140038109 | ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF - The invention relates to an antireflective coating composition comprising a crosslinkable polymer, where the crosslinkable polymer comprises at least one unit of fused aromatic moiety, at least one unit with a phenylene moiety in the backbone of the polymer, and at least one hydroxybiphenyl unit, furthermore where the polymer comprises a crosslinking moiety of structure (4), | 02-06-2014 |
20140159278 | STABLE METAL COMPOUNDS, THEIR COMPOSITIONS AND METHODS - The present disclosure relates to soluble, multi-ligand-substituted metal compounds with improved stability as well as compositions made from them and methods of their use. | 06-12-2014 |
20140370444 | ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF - The present invention relates to an absorbing hard mask antireflective coating composition comprising a novel polymer, where the novel polymer comprises in the backbone of the polymer four repeat units -A-, -B-, -C- and -D-, where A is repeat unit which comprises a fused aromatic ring in its backbone, B has the structure (1), C is a hydroxylbiphenyl of structure (2) and D is a derivatized fluorene of structure (3), | 12-18-2014 |