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Chua, CA
Albert Chua, San Jose, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090021624 | Camera module back-focal length adjustment method and ultra compact components packaging - The present invention relates to methods of manufacturing ultra-compact camera modules, adjusting them, post production, to precise focal point settings, and sealing the precisely aligned assembly to maintain the focal point. Also, the invention specifically relates to ultra-compact camera module apparatuses. | 01-22-2009 |
| 20100325883 | CAMERA MODULE BACK-FOCAL LENGTH ADJUSTMENT METHOD AND ULTRA COMPACT COMPONENTS PACKAGING - The present invention relates to methods of manufacturing ultra-compact camera modules, adjusting them, post production, to precise focal point settings, and sealing the precisely aligned assembly to maintain the focal point. Also, the invention specifically relates to ultra-compact camera module apparatuses. | 12-30-2010 |
Albert John Y. Chua, San Jose, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20110102667 | Camera module with fold over flexible circuit and cavity substrate - A disclosed method of manufacturing a camera module includes providing an image capture device, providing an electronic component, providing a flexible circuit substrate, mounting the image capture device on a first portion of the flexible circuit substrate, mounting the electronic component on the second portion of the flexible circuit substrate, and positioning the second portion above the first portion. The method further includes providing a chip carrier including a bottom surface defining a cavity and a top surface adapted to receive the image capture device and positioning the chip carrier between the image capture device and the flexible circuit substrate. The method further includes mounting a second electronic component within the cavity. | 05-05-2011 |
Angel Barnachea Chua, Aliso Viejo, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20110153618 | SYSTEM AND METHOD FOR MANAGING MEDIA ADVERTISING ENTERPRISE DATA - A system and method for managing media advertising enterprise data. An enterprise data management (EDM) module can be configured to include a set of rules at an enterprise level to manage disparate and disconnected records. A scoring function with respect to each record can be computed based on the rules to determine the highest priority. The rules in association with the scoring function can be stored locally in an EDM database. A matching process can then be performed to accurately match similar records regardless of manual input, location, and format of the records in a distributed system. Each record can then be assigned with a parent enterprise advertiser. Such an optimization mechanism can interactively manage and report records at the enterprise level in a simple and efficient manner. | 06-23-2011 |
| 20110153628 | PROCESS AND WORKFLOW FOR ENTERPRISE DATA MATCHING - A method and system for managing a media advertising enterprise including process and workflow capabilities for enterprise data matching. An EDM (Enterprise Data Management) module can be configured to include a set of rules at an enterprise level to manage disparate and disconnected records associated with an entity. A number of unmatched and enterprise entities that matches with respect to an active entity can be returned based on a fuzzy logic. A matching process can then be performed to accurately match the active entity and the unmatched entities with respect to a parent enterprise entity. The unmatched entity can be put on hold if additional information is required for performing a right match after assigning the parent enterprise entity. A note can also be added in order to place the unmatched entity on hold. Such an optimization mechanism can interactively manage and report records at the enterprise level in a simple and efficient manner. | 06-23-2011 |
| 20110154230 | PROCESSES TO LEARN ENTERPRISE DATA MATCHING - A system and method for managing media advertising enterprise data including a process for learning enterprise data matching. An EDM (Enterprise Data Management) application module can be configured to include a set of rules at an enterprise level to manage disparate and disconnected records associated with an entity. A number of unmatched and enterprise entities that matches with respect to an active entity can be returned based on a fuzzy logic associated with various matching options stored in an EDM database. A matching process can then be performed to accurately match similar records regardless of manual input, location, and format of the records in a distributed system. Each unmatched record can then be assigned with a parent enterprise entity. Such an optimization mechanism can interactively manage and report records at the enterprise level in a simple and efficient manner. | 06-23-2011 |
Beelee Chua, Fremont, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090131778 | DEVICES, SYSTEMS, METHODS AND TOOLS FOR CONTINUOUS GLUCOSE MONITORING - One aspect of the invention provides a glucose monitor having a plurality of tissue piercing elements, each tissue piercing element having a distal opening, a proximal opening and interior space extending between the distal and proximal openings; a sensing volume in fluid communication with the proximal openings of the tissue piercing elements; sensing fluid extending into the sensing volume; and a glucose sensor adapted to detect a concentration of glucose in the sensing fluid within the sensing volume. Another aspect of the invention provides A method of in vivo monitoring of an individual's interstitial fluid glucose concentration comprising: inserting distal ends of a plurality of tissue piercing elements through a stratum corneum area of the individual's skin, the tissue piercing elements each comprising a distal opening, a proximal opening, and an interior space extending between the distal and proximal opening; allowing interstitial fluid to flow into the interior space of the tissue piercing elements to substantially fill the interior space; filling substantially the entire interior space of the sensing area; and sensing a glucose concentration of the sensing fluid. | 05-21-2009 |
| 20100049021 | DEVICES, SYSTEMS, METHODS AND TOOLS FOR CONTINUOUS ANALYTE MONITORING - One aspect of the invention provides an analyte monitor including a sensing volume, an analyte extraction area in contact with the sensing volume adapted to extract an analyte into the sensing volume, and an analyte sensor adapted to detect a concentration of analyte in the sensing volume. The sensing volume is defined by a first face, a second face opposite to the first face, and a thickness equal to the distance between the two faces. The surface area of the first face is about equal to the surface area of the second face and the extraction area is about equal to the surface area of the first and second face of the sensing volume. The analyte sensor includes a working electrode in contact with the sensing volume, the working electrode having a surface area at least as large as the analyte extraction area, and a second electrode in fluid communication with the sensing volume. | 02-25-2010 |
Beelee Chua, Davis, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080312518 | ON-DEMAND ANALYTE MONITOR AND METHOD OF USE - An analyte monitor is provided with a sensor unit body configured for mounting on tissue, a sensor configured to detect an analyte in a fluid in the sensing area, an output device configured to communicate a result from the sensor to a user; and a user input device coupled with the sensor and the output device, wherein the monitor is configured to communicate a result to the user through the output device only after the user input device is activated. Systems, sensors and methods associated with the monitor are also disclosed. | 12-18-2008 |
| 20090099427 | MICRONEEDLE ARRAY WITH DIVERSE NEEDLE CONFIGURATIONS - The invention relates to a surface penetration device, a method to use the device, and an analyte monitor. Embodiments of the surface penetration device include a substrate with first and second surfaces, and first and second tissue piercing elements, the elements differing in configuration, but each associated with the first surface of the substrate. At least some of the tissue piercing elements have a distal and a proximal opening and a lumen extending between the openings. The proximal openings are in fluid communication with an opening in the second surface of the substrate. Embodiments of the analyte monitor include the features of the penetration device plus an analyte sensor that detects an analyte in a fluid. Embodiments of the method of penetrating tissue include providing a surface penetration device and urging the surface penetration device against a tissue surface until some of the first and second tissue piercing elements penetrate the tissue surface. | 04-16-2009 |
Bryan S.m. Chua, San Francisco, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080209749 | In-situ shear wall nailing template - A non-structural shear wall nailing template bears a pattern of shear wall nailing pattern markings. The template is made of an inexpensive sheeting material that will not interfere with the further construction of the building if the template remains in-situ after construction of the shear wall. In one example, the template is a strip. The strip bears lettering that indicates the type of nailing pattern to which the nailing pattern markings conform. After fixing the template to one or more sheathing panels such that the template is aligned in a predefined way with respect to framing members behind the panel(s), nails are driven at the locations of the markings on the template. By driving a nail at the location of each template marking, the shear wall is constructed with proper nail spacing. A set of templates is provided to facilitate nailing in different shear wall nailing patterns. | 09-04-2008 |
| 20090188124 | In-Situ shear wall nailing template - A non-structural shear wall nailing template bears a pattern of shear wall nailing pattern markings. The template is made of an inexpensive sheeting material that will not interfere with the further construction of the building if the template remains in-situ after construction of the shear wall. In one example, the template is a strip. The strip bears lettering that indicates the type of nailing pattern to which the nailing pattern markings conform. After fixing the template to one or more sheathing panels such that the template is aligned in a predefined way with respect to framing members behind the panel(s), nails are driven at the locations of the markings on the template. By driving a nail at the location of each template marking, the shear wall is constructed with proper nail spacing. A set of templates is provided to facilitate nailing in different shear wall nailing patterns. | 07-30-2009 |
Chee T. Chua, Fremont, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20100205504 | Automatic refresh for improving data retention and endurance characteristics of an embedded non-volatile memory in a standard CMOS logic process - A method for selectively refreshing data in a nonvolatile memory array based on failure type detected by an error correction code. If the page is determined to be error-free, no refresh operation takes place. Otherwise, if single-error words on a page contain erased and programmed bit errors, then a refresh operation, consisting of an erase and program, takes place. The erase operation is skipped if single-error words on a page solely contain a program failure. | 08-12-2010 |
| 20100208530 | Two Bits Per Cell Non-Volatile Memory Architecture - A memory circuit for holding a single binary value. A first bit cell holds one of a logical high value and a logical low value, and a second bit cell also holds one of a logical high value and a logical low value. Circuitry is provided for placing a logical high value in the first bit cell when the binary value in the memory circuit is to be a logical high value, and circuitry is provided for placing a logical high value in the second bit cell when the binary value in the memory circuit is to be a logical low value. In this manner, a logical high value exists within the memory circuit, whether the single binary value within the memory circuit is a logical high value or a logical low value. The difference between the two values of the binary value is which of the two bit cells holds the logical high value. Thus, this memory circuit can be sensed without the use of a sense amplifier. | 08-19-2010 |
Christopher Chua, San Jose, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20110062486 | FABRICATION FOR ELECTROPLATING THICK METAL PADS - A method of electroplating includes forming a seed region to be electroplated on a first portion of a substrate, forming a ground plane on a second portion of a substrate, electrically isolating the ground plane from the seed region, electroplating the region, wherein electroplating includes causing the ground plane and the region to make electrical connection, and then removing the ground plane region on the second portion of the substrate, but not removing the electrical isolation. This creates a structure having a substrate, a passivation layer on the substrate, and at least one electroplated, metal region on the substrate such that there is contiguous contact between the metal region and the passivation layer. And, after an additional flip-chip assembly to a bond pad/heat sinking chip, results in a device having a bond pad chip having bond pads, solder beads formed on the bond pads, and a component connected to the bond pads by the solder beads. Wherein, the component has a substrate, a passivation layer on the substrate, and at least one electroplated, metal region on the substrate such that there is contiguous contact between the metal region and the passivation layer. | 03-17-2011 |
Clint Chua, Alhambra, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090262108 | STREAMING GEOMETERY FOR USE IN DISPLAYING AND EDITING 3D IMAGERY - Method and systems are provided using streaming geometry in 3D imagery production. In one implementation a method for use in the display of 3D video images comprises receiving a first set of data corresponding to an output from a layout in a production pipeline, generating geometry data for one or more objects represented within the first set of data, merging the geometry data for each of the one or more objects to create one or more merged files, generating a table of contents, wherein the table of contents specifies the location of the geometry data for each of the one or more objects within the one or more merged files and storing the geometry data and the table of contents to a memory device for subsequent retrieval | 10-22-2009 |
James Chua, Bakersfield, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20100113956 | NASAL CANNULA FOR ACQUIRING BREATHING INFORMATION - A nasal cannula for monitoring symptoms of sleep apnea and hypopnea, including an elongated main body having a main body chamber and first and second nares to be received within first and second nasal passages of a patient's nose and at least one mouthpiece extending to a patient's mouth. The main body chamber communicates with first and second cannula inlet/outlets and each nare and the mouthpiece includes a gas flow passage extending from the nostril or mouth to the main body chamber. At least one nasal gas flow sensor is located in an gas flow passage of at least one of the nares and at least one oral gas flow sensor located in the mouthpiece gas flow passage, preferably in the regions of the gas flow passages adjacent the main body chamber. | 05-06-2010 |
| 20100168600 | SUPPORT STRUCTURE FOR AIRFLOW TEMPERATURE SENSOR AND THE METHOD OF USING THE SAME - A temperature sensing device and method of using the same, for detecting breathing of a patient. The temperature sensing device comprises a sensor body contour for supporting the temperature sensing device on an upper lip of a patient and preventing undesired movement thereof and at least one temperature sensor being supported by the sensor body. The sensor body spaces the temperature sensor(s) from the skin of a patient, during use, so that a remote end of the at least one temperature sensor can be positioned adjacent at least one of a nasal cavity and a mouth of the patient for detecting breathing of the patient. The sensor body is preferably curved both upwardly and rearwardly with respect to planes extending through the sensor body. | 07-01-2010 |
| 20100168601 | COMBINED CANNULA AND AIRFLOW TEMPERATURE SENSOR AND THE METHOD OF USING THE SAME - A combined cannula and temperature sensing device for detecting breathing of a patient. The cannula comprising a cannula body defining at least one internal flow chamber therein, at least one tube being connected to the cannula body and communicating with the internal flow chamber, a pair of nasal prongs communicating with the internal flow chamber, and the cannula body having retaining mechanism for releasably attaching the temperature sensing device to the cannula. The temperature sensing device comprising a sensor body, at least one temperature sensor being supported by the sensor body, and the sensor body releasably engaging with the retaining mechanism of the cannula for positioning the at least one temperature sensor adjacent at least one of a nasal cavity and a mouth of the patient for detecting breathing of the patient. | 07-01-2010 |
| 20110125052 | RESPIRATORY THERAPY SYSTEM INCLUDING A NASAL CANNULA ASSEMBLY - A nasal cannula, for supplying a respiratory gas to a patient, comprising: a pair of spaced apart supply lines which each have a head at one end thereof with a discharge opening therein. The opposite end of each supply line is connectable to a respiratory gas source. Each head is sized to be snugly received and retained within one of the nasal cavities of the patient while forming a sufficient leakage passage, between a portion of inwardly facing nasal cavity skin of a patient and a portion of an exterior surface of the head, to facilitate exhausting of any excess respiratory gas supplied to the patient through the leakage passage and also facilitate inhalation of any room air required in excess of the respiratory gas to be supplied to the patient. The invention also relates to a respiratory therapy system incorporating the nasal cannula, a method of treating a patient with sleep disorder by using the nasal cannula, a diagnostic tool for measuring nasal cavity pressure of a patient, and a method of using the diagnostic tool for measuring nasal cavity pressure of a patient. | 05-26-2011 |
Leon O. Chua, Berkeley, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20110182104 | METHOD OF IMPLEMENTING MEMRISTOR-BASED MULTILEVEL MEMORY USING REFERENCE RESISTOR ARRAY - The present invention relates to a memristor, and more particularly, to a method of implementing a memristor-based multilevel memory using a reference resistor array and a write-in circuit and a read-out/restoration circuit for the memristor-based multilevel memory, in which a memristor can be used as a multilevel memory. In the present invention, a reference resistance value is written in a selected memristor of a memristor array by applying repeatedly the current pulses of which widths are proportional to the difference between the resistances of the selected memristor and the selected node of the reference resistor array. | 07-28-2011 |
Mei-Sze Chua, Menlo Park, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20100120631 | Methods for detecting hepatocellular carcinoma - A method for evaluating hepatocellular carcinoma in a subject is provided. In certain embodiments, the method comprises: a) obtaining a hepatocellular carcinoma protein marker profile for a sample obtained from the subject; and b) comparing the protein marker profile to a control profile. | 05-13-2010 |
Penelope Chua, San Francisco, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20100151112 | Novel Triglyceride and Fuel Compositions - Triglyceride oils and fuel compositions derived therefrom are disclosed. In some embodiments the novel oils contain levels of medium chain fatty acids such as those having chain lengths of 8, 10, 12, and 14 carbon atoms. Also disclosed are biodiesel and alkane diesel fuels derived from the novel oils. Byproduct animal feeds from the process of manufacturing the novel oils are also disclosed. | 06-17-2010 |
| 20100151535 | Renewable Chemical Production from Novel Fatty Acid Feedstocks - Disclosed herein are methods of manufacturing renewable chemicals through the manufacture of novel triglyceride oils followed by chemical modification of the oils. Methods such as transesterification, hydrogenation, hydrocracking, deoxygenation, isomerization, interesterification, hydroxylation, hydrolysis and saponification are disclosed. Novel oils containing fatty acid chain lengths of C8, C10, C12 or C14 are also disclosed and are useful as feedstocks in the methods of the invention. | 06-17-2010 |
| 20100151538 | Cellulosic Cultivation of Oleaginous Microorganisms - Methods are disclosed for cultivation of oleaginous microorganisms on feedstocks including depolymerized cellulosic material such as corn stover, | 06-17-2010 |
| 20100151539 | Recombinant Microalgae Cells Producing Novel Oils - Disclosed herein are obligate heterotrophic microalgae cells containing an exogenous gene. In some embodiments the gene is a sucrose utilization gene, and further disclosed are methods of manufacturing triglyceride oils using sugar cane or sugar beets as a feedstock in a heterotrophic fermentation. In other embodiments the feedstock is depolymerized cellulosic material. Also disclosed are cells that produce medium chain fatty acids at levels not produced in non-recombinant cells of the same species and genus. | 06-17-2010 |
| 20100151567 | Nucleic Acids Useful in the Manufacture of Oil - Novel gene sequences from microalgae are disclosed, as well as novel gene sequences useful in the manufacture of triglyceride oils. Also disclosed are sequences and vectors that allow microalgae to be cultivated on sugar cane and sugar beets as a feedstock. In some embodiments, the vectors are useful for the purpose of performing targeted modifications to the nuclear genome of heterotrophic microalgae. | 06-17-2010 |
| 20110165634 | RENEWABLE CHEMICAL PRODUCTION FROM NOVEL FATTY ACID FEEDSTOCKS - Disclosed herein are methods of manufacturing renewable chemicals through the manufacture of novel triglyceride oils followed by chemical modification of the oils. Methods such as transesterification, hydrogenation, hydrocracking, deoxygenation, isomerization, interesterification, hydroxylation, hydrolysis and saponification are disclosed. Novel oils containing fatty acid chain lengths of C8, C10, C12 or C14 are also disclosed and are useful as feedstocks in the methods of the invention. | 07-07-2011 |
Peter Chua, San Diego, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090264423 | SERINE-THREONINE PROTEIN KINASE AND PARP MODULATORS - The invention relates in part to molecules having certain biological activities that include, but are not limited to, inhibiting cell proliferation, modulating protein kinase activity and modulating polymerase activity. Molecules of the invention can modulate casein kinase (CK) activity and/or poly(ADP-ribose)polymerase (PARP) activity. The invention also relates in part to methods for using such molecules. | 10-22-2009 |
Peter C. Chua, San Diego, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080280889 | Inhibitors of Akt Activity - The present invention is directed to compounds which contain substituted pyridazines and pyrimidines moieties which inhibit the activity of Akt, a serine/threonine protein kinase. The invention is further directed to chemotherapeutic compositions containing the compounds of this invention and methods for treating cancer comprising administration (if the compounds of the invention. | 11-13-2008 |
| 20090082565 | METHODS OF PREPARING QUINOLONE ANALOGS - The present invention relates to the preparation of compounds which are capable of inducing cell death such as apoptotic cell death (apoptosis), and/or for reducing a cell proliferative disorder. | 03-26-2009 |
| 20090105233 | SERINE-THREONINE PROTEIN KINASE AND PARP MODULATORS - The invention relates in part to molecules having certain biological activities that include, but are not limited to, inhibiting cell proliferation, modulating protein kinase activity and modulating polymerase activity. Molecules of the invention can modulate casein kinase (CK) activity and/or poly(ADP-ribose)polymerase (PARP) activity. The invention also relates in part to methods for using such molecules. | 04-23-2009 |
| 20100075970 | INHIBITORS OF AKT ACTIVITY - The present invention is directed to compounds which contain substituted pyridazines and pyrimidines moieties which inhibit the activity of Akt, a serine/threonine protein kinase. The invention is further directed to chemotherapeutic compositions containing the compounds of this invention and methods for treating cancer comprising administration of the compounds of the invention. | 03-25-2010 |
Pong Kian Chua, San Jose, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090004664 | HCV NS3 replicon shuttle vectors - The present invention provides for novel HCV NS3 replicon shuttle vectors useful for cloning in HCV polynucleotide sequences from samples of HCV-infected patients and testing the resulting replicons for drug susceptibility. | 01-01-2009 |
Roy L. Chua, Cupertino, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090077618 | Segmented Network Identity Management - A service category associates a set of authenticators and a set of authentication and authorization policies. When an authenticator attempts to connect the network, the service category for such authenticator determined and the authentication and authorization policies applied. A feature of the present invention is that these policies are segmented into several sub-policies to support multiple services and apply different authentication and authorization policies for each type of service. These sub-policies are a tunnel policy, a credential validation policy, in inner tunnel policy and an authorization policy. Successful negotiation of each policy allows the authenticator to connect a network. | 03-19-2009 |
Roy Liang Chua, Cupertino, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20110055900 | DISTRIBUTED AUTHENTICATION, AUTHORIZATION AND ACCOUNTING - In some embodiments, computer systems, storage mediums, and methods are provided for controlling a connecting device's access to a plurality of computer networks. In other embodiments, the provided computer systems, storage mediums, and methods may provide for authentication, authorization, and accounting of connecting devices connecting to a plurality of computer networks. In other embodiments, the provided computer systems, storage mediums, and methods may provide for the distribution of authentication routing data and authorization policies among a plurality of computer networks. In yet other embodiments, the provided computer systems, storage mediums, and methods may provide for the distribution of accounting among a plurality of computer networks. | 03-03-2011 |
Steven Chua, San Diego, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090167870 | Method for Creating Custom Digital Images Utilizing Background Replacement Technology Over a Network - A system and method for allowing a consumer to create a custom digital image with consumer selected backgrounds and foregrounds. Digital images are taken by a photographer and uploaded to a server. A consumer can log in to the server through a web browser and view the digital images. The background of the digital image can be removed. After selecting a digital image, the consumer can change the digital image's background and foreground, and change the position and size of the digital image relative to the background and foreground. Multiple photographers can use the same system to create a custom website that enables consumers to create custom digital images and order prints of the custom digital image or items that have the custom digital image printed on it. After the order is completed, the custom digital image is processed and printed, and mailed to the consumer or made available for pickup. | 07-02-2009 |
| 20100030872 | System for remote processing, printing, and uploading of digital images to a remote server via wireless connections - A system that includes a digital camera, a digital image processing unit, a printer, and a remote server. The digital camera wirelessly transmits a digital image to the digital image processing unit. The digital image processing unit, once it receives the digital image, can store the image locally on a hard disk and print the digital image. The digital image processing unit can also include a mobile internet card, thereby enabling it to connect directly to the internet to upload the stored digital images directly to a remote server without first needing to connect to a local network. Alternatively, the camera and the digital image processing unit can be one and the same, and transmit the digital image wirelessly to a printer, a remote server, or both. The settings and preferences of the system can also be updated automatically when it connects to a remote server. | 02-04-2010 |
Thai Cheng Chua, Cupertino, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080241419 | DEVICE THAT ENABLES PLASMA IGNITION AND COMPLETE FARADAY SHIELDING OF CAPACITIVE COUPLING FOR AN INDUCTIVELY-COUPLED PLASMA - A method and apparatus for igniting a gas mixture into plasma using capacitive coupling techniques, shielding the plasma and other contents of the plasma reactor from the capacitively-coupled electric field, and maintaining the plasma using inductive coupling are provided. For some embodiments, the amount of capacitive coupling may be controlled after ignition of the plasma. Such techniques are employed in an effort to prevent damage to the surface of a substrate from excessive ion bombardment caused by the highly energized ions and electrons accelerated towards and perpendicular to the substrate surface by the electric field of capacitively-coupled plasma. | 10-02-2008 |
| 20090035952 | METHODS FOR LOW TEMPERATURE OXIDATION OF A SEMICONDUCTOR DEVICE - Methods of fabricating an oxide layer on a semiconductor substrate are provided herein. In some embodiments, a method of forming an oxide layer on a semiconductor substrate includes placing a substrate to be oxidized on a substrate support in a vacuum chamber of a plasma reactor, the chamber having an ion generation region remote from the substrate support; introducing a process gas into the chamber, the process gas comprising at least one of hydrogen (H | 02-05-2009 |