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Christopher D. Muzzy, Burlington US

Christopher D. Muzzy, Burlington, VT US

Patent application numberDescriptionPublished
20080244904Contour Structures to Highlight Inspection Regions - An integrated circuit has a wiring layer below an insulator layer. A pad comprises a conductive material that is on the insulator layer. The pad has a wirebond connection region and a probe pad region. An inspection mark is between the wirebond connection region and the probe pad region. The inspection mark comprises an opening in the insulator layer that is filled with the conductive material. In addition, a contact that is through the insulator layer is adapted to electrically connect the conductor wire in the wiring layer to the pad. The contact is formed of the same conductive material used for the pad and the inspection mark.10-09-2008
20090057908WIRE BOND PADS - A wire bond pad and method of fabricating the wire bond pad. The method including: providing a substrate; forming an electrically conductive layer on a top surface of the substrate; patterning the conductive layer into a plurality of wire bond pads spaced apart; and forming a protective dielectric layer on the top surface of the substrate in spaces between adjacent wire bond pads, top surfaces of the dielectric layer in the spaces coplanar with coplanar top surfaces of the wire bond pads.03-05-2009
20090127710UNDERCUT-FREE BLM PROCESS FOR PB-FREE AND PB-REDUCED C4 - A system and method for eliminating undercut when forming a C4 solder bump for BLM (Ball Limiting Metallurgy) and improving the C4 pitch. In the process, a barrier layer metal stack is deposited above a metal pad layer. A top layer of the barrier layer metals (e.g., Cu) is patterned by CMP with a bottom conductive layer of the barrier metal stack removed by etching. The diffusion barrier and C4 solder bump may be formed by electroless plating, in one embodiment, using a maskless technique, or by an electroplating techniques using a patterned mask. This allows the pitch of the C4 solder bumps to be reduced.05-21-2009
20090189286FINE PITCH SOLDER BUMP STRUCTURE WITH BUILT-IN STRESS BUFFER - A fine pitch solder bump structure with a built-in stress buffer that is utilized in electronic packages, and a method of producing the fine pitch solder bump structure with built-in stress buffer. Employed is a very thick final passivation layer that is constituted of a polyimide as a so-called “cushion” for a minimal thickness of UBM (BLM) pad and solder material, while concurrently completely separating the resultingly produced polyimide islands, so that the polyimide material provides most of the physical height for the “standoff” of a modified C4 (controlled collapse chip connection) structure. In employing the polyimide material as the primary structural component of the vertical chip package interconnect in this particular inventive manner, the inherent stress buffering property of the polyimide material is utilized to full advantage by effectively reducing the high stresses encountered during chip manufacture processing steps, such as chip join, reflow, preconditioning and reliability thermal cycle stressing.07-30-2009
20090200663POLYMER AND SOLDER PILLARS FOR CONNECTING CHIP AND CARRIER - A method of connecting chips to chip carriers, ceramic packages, etc. (package substrates) forms smaller than usual first solder balls and polymer pillars on the surface of a semiconductor chip and applies adhesive to the distal ends of the polymer pillars. The method also forms second solder balls, which are similar in size to the first solder balls, on the corresponding surface of the package substrate to which the chip will be attached. Then, the method positions the surface of the semiconductor chip next to the corresponding surface of the package substrate. The adhesive bonds the distal ends of the polymer pillars to the corresponding surface of the package substrate. The method heats the first solder balls and the second solder balls to join the first solder balls and the second solder balls into solder pillars.08-13-2009
20090218688OPTIMIZED PASSIVATION SLOPE FOR SOLDER CONNECTIONS - A semiconductor structure includes at least one bond pad. An insulator layer is on the surface of the semiconductor chip and on a portion of the bond pad. The polyimide layer comprises a bottom surface contacting and coplanar with the surface of the semiconductor chip, a top surface opposite and parallel to the bottom surface of the polyimide layer, and a sloped side between corresponding ends of the top surface of the polyimide layer and the bottom surface of the polyimide layer. The sloped side joins the bottom surface of the polyimide layer at the top surface of the bond pad. The sloped side of the polyimide layer forms an angle less than 50° with the bottom surface of the polyimide layer.09-03-2009
20090230547DESIGN STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE AND PACKAGING THEREOF - A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a dielectric material formed between a design sensitive structure and a passivation layer. The design sensitive structure comprising a lower wiring layer electrically and mechanically connected to a higher wiring level by a via farm. A method and structure is also provided.09-17-2009
20090235212DESIGN STRUCTURE, FAILURE ANALYSIS TOOL AND METHOD OF DETERMINING WHITE BUMP LOCATION USING FAILURE ANALYSIS TOOL - A failure analysis tool, a method of using the tool and a design structure for designing a mask for protecting a critical area of wiring failure in a semiconductor chip during packaging is provided. The failure analysis tool includes a computer infrastructure operable to determine a risk area for wiring layer failure during solder bump formation by determining a distance from a center of a chip to a location for a solder bump processing and identifying an area at an edge of the location for the solder bump processes at a predetermined distance and greater from the center of the chip.09-17-2009
20090273081PAD CUSHION STRUCTURE AND METHOD OF FABRICATION FOR Pb-FREE C4 INTEGRATED CIRCUIT CHIP JOINING - A controlled collapse chip connection (C4) method and integrated circuit structure for lead (Pb)-free solder balls with stress relief to the underlying insulating layers of the integrated circuit chip by deposing soft thick insulating cushions beneath the solder balls and connecting the metallization of the integrated circuit out-of-contact of the cushions but within the pitch of the solder balls.11-05-2009
20100038780UNDERFILL FLOW GUIDE STRUCTURES AND METHOD OF USING SAME - Underfill flow guide structures and methods of using the same are provided with a module. In particular the underfill flow guide structures are integrated with a substrate and are configured to prevent air entrapment from occurring during capillary underfill processes.02-18-2010
20100065965METHODS OF FORMING SOLDER CONNECTIONS AND STRUCTURE THEREOF - A method comprises depositing a first metal containing layer into a trench structure, which contacts a metalized area of a semiconductor structure. The method further includes patterning at least one opening in a resist to the first metal containing layer. The opening should be in alignment with the trench structure. At least a pad metal containing layer is formed within the at least one opening (preferably by electroplating processes). The resist and the first metal layer underlying the resist are then etched (with the second metal layer acting as a mask, in embodiments). The method includes flowing solder material within the trench and on pad metal containing layer after the etching process. The structure is a controlled collapse chip connection (C4) structure comprising at least one electroplated metal layer formed in a resist pattern to form at least one ball limiting metallurgical layer. The structure further includes an underlying metal layer devoid of undercuts.03-18-2010
20100164096Structures and Methods for Improving Solder Bump Connections in Semiconductor Devices - Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The structure includes a via formed in a dielectric layer to expose a contact pad and a capture pad formed in the via and over the dielectric layer. The capture pad has openings over the dielectric layer to form segmented features. The solder bump is deposited on the capture pad and the openings over the dielectric layer.07-01-2010
20100164104Structures and Methods for Improving Solder Bump Connections in Semiconductor Devices - Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The method includes forming an upper wiring layer in a dielectric layer and depositing one or more dielectric layers on the upper wiring layer. The method further includes forming a plurality of discrete trenches in the one or more dielectric layers extending to the upper wiring layer. The method further includes depositing a ball limiting metallurgy or under bump metallurgy in the plurality of discrete trenches to form discrete metal islands in contact with the upper wring layer. A solder bump is formed in electrical connection to the plurality of the discrete metal islands.07-01-2010
20100167522STRUCTURES AND METHODS FOR IMPROVING SOLDER BUMP CONNECTIONS IN SEMICONDUCTOR DEVICES - Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The method includes forming a plurality of trenches in a dielectric layer extending to an underlying metal layer. The method further includes depositing metal in the plurality of trenches to form discrete metal line islands in contact with the underlying metal layer. The method also includes forming a solder bump in electrical connection to the plurality of metal line islands.07-01-2010
20110006422Structures and methods to improve lead-free C4 interconnect reliability - Controlled collapse chip connection (C4) structures and methods of manufacture, and more specifically to structures and methods to improve lead-free C4 interconnect reliability. A structure includes a ball limited metallization (BLM) layer and a controlled collapse chip connection (C4) solder ball formed on the BLM layer. Additionally, the structure includes a final metal pad layer beneath the BLM layer and a cap layer beneath the final metal pad layer. Furthermore, the structure includes an air gap formed beneath the C4 solder ball between the final metal pad layer and one of the BLM layer and the cap layer.01-13-2011
20110031616STRUCTURES AND METHODS FOR IMPROVING SOLDER BUMP CONNECTIONS IN SEMICONDUCTOR DEVICES - Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The method includes forming a plurality of trenches in a dielectric layer extending to an underlying metal layer. The method further includes depositing metal in the plurality of trenches to form discrete metal line islands in contact with the underlying metal layer. The method also includes forming a solder bump in electrical connection to the plurality of metal line islands.02-10-2011
20110133307DAMAGE PROPAGATION BARRIER - A conductor-filled damage propagation barrier is formed extending into a low-k dielectric layer between a fuse and an adjacent circuit element for preventing propagation of damage during a fuse blow operation. Conductor material filling the damage propagation barrier is formed from the same conductor layer as that used to form an interconnect structure.06-09-2011
20110140271 INTEGRATED CIRCUIT CHIP WITH PYRAMID OR CONE-SHAPED CONDUCTIVE PADS FOR FLEXIBLE C4 CONNECTIONS AND A METHOD OF FORMING THE INTEGRATED CIRCUIT CHIP - Disclosed is a chip and method of forming the chip with improved conductive pads that allow for flexible C4 connections with a chip carrier or with another integrated circuit chip. The pads have a three-dimensional geometric shape (e.g., a pyramid or cone shape) with a base adjacent to the surface of the chip, a vertex opposite the base and, optionally, mushroom-shaped cap atop the vertex. Each pad can include a single layer of conductive material or multiple layers of conductive material (e.g., a wetting layer stacked above a non-wetting layer). The pads can be left exposed to allow for subsequent connection to corresponding solder bumps on a chip carrier or a second chip. Alternatively, solder balls can be positioned on the conductive pads to allow for subsequent connection to corresponding solder-paste filled openings on a chip carrier or a second chip.06-16-2011

Patent applications by Christopher D. Muzzy, Burlington, VT US