| Patent application number | Description | Published |
|---|
| 20090026623 | BURIED METAL-SEMICONDUCTOR ALLOY LAYERS AND STRUCTURES AND METHODS FOR FABRICATION THEREOF - A method for forming a metal-semiconductor alloy layer uses particular thermal annealing conditions to provide a stress free metal-semiconductor alloy layer through interdiffusion of a buried semiconductor material layer and a metal-semiconductor alloy forming metal layer that contacts the buried semiconductor material layer within an aperture through a capping layer beneath which is buried the semiconductor material layer. A resulting semiconductor structure includes the metal-semiconductor alloy layer that further includes an interconnect portion beneath the capping layer and a contiguous via portion that penetrates at least partially through the capping layer. Such a metal-semiconductor alloy layer may be located interposed between a substrate and a semiconductor device having an active doped region. | 01-29-2009 |
| 20090152590 | METHOD AND STRUCTURE FOR SEMICONDUCTOR DEVICES WITH SILICON-GERMANIUM DEPOSITS - A method of forming a semiconductor device including forming a second deposit of silicon-germanium on a first deposit of silicon-germanium, the first deposit formed in a conduction terminal region of a substrate of the semiconductor device and having a first percentage of germanium, and the second deposit having a second percentage of germanium that is less than the first percentage and supports forming a silicide deposit on the second deposit. A structure is also provided. | 06-18-2009 |
| 20090315182 | SILICIDE INTERCONNECT STRUCTURE - A method for forming an interconnect structure includes forming a dielectric layer above a first layer having a conductive region defined therein. An opening is defined in the dielectric layer to expose at least a portion of the conductive region. A metal silicide is formed in the opening to define the interconnect structure. A semiconductor device includes a first layer having a conductive region defined therein, a dielectric layer formed above the first layer, and a metal silicide interconnect structure extending through the dielectric layer to communicate with the conductive region. | 12-24-2009 |
| 20100062597 | Interconnection for flip-chip using lead-free solders and having improved reaction barrier layers - An interconnection structure suitable for flip-chip attachment of microelectronic device chips to packages, comprising a two, three or four layer ball-limiting metallurgy including an adhesion/reaction barrier layer, and having a solder wettable layer reactive with components of a tin-containing lead free solder, so that the solderable layer can be totally consumed during soldering, but a barrier layer remains after being placed in contact with the lead free solder during soldering. One or more lead-free solder balls is selectively situated on the solder wetting layer, the lead-free solder balls comprising tin as a predominant component and one or more alloying components. | 03-11-2010 |
| 20110147809 | FORMING A CARBON CONTAINING LAYER TO FACILITATE SILICIDE STABILITY IN A SILICON GERMANIUM MATERIAL - A method includes forming a silicon germanium layer, forming a layer comprising carbon and silicon on a top surface of the silicon germanium layer, forming a metal layer above the layer comprising carbon and silicon, and performing a thermal treatment to convert at least the layer comprising carbon and silicon to form a metal silicide layer. | 06-23-2011 |
| 20110241115 | Schottky Junction Source/Drain FET Fabrication Using Sulfur or Flourine Co-Implantation - A Schottky field effect transistor (FET) includes a gate stack located on a silicon on insulator (SOI) layer, the gate stack comprising a gate silicide region; and source/drain silicide regions located in the SOI layer, the source/drain silicide regions comprising and at least one of sulfur and fluorine, wherein an interface comprising arsenic is located between each of the source/drain silicide regions and the SOI layer. A method of forming a contact, the contact comprising a silicide region adjacent to a silicon region, includes co-implanting the silicide region with arsenic and at least one of sulfur and fluorine; and drive-in annealing the co-implanted silicide region to diffuse the arsenic to an interface between the silicide region and the silicon region. | 10-06-2011 |
| 20110241116 | FET with FUSI Gate and Reduced Source/Drain Contact Resistance - A method for forming a field effect transistor (FET) includes forming a gate stack on a silicon layer, the gate stack comprising a gate polysilicon on top of a gate oxide layer; forming a fully silicided gate from the gate polysilicon and forming source/drain silicide regions in the silicon layer; implanting the gate silicide and the source/drain silicide with dopants; and performing rapid thermal annealing to form a gate interfacial layer in between the gate silicide and the gate oxide layer, and source/drain interfacial layers between the source/drain silicide regions and the silicon layer. | 10-06-2011 |
| 20110241213 | Silicide Contact Formation - A method for forming a silicide contact includes depositing a metal layer on silicon such that the metal layer intermixes with the silicon to form an intermixed region on the silicon; removing an unintermixed portion of the metal layer from the intermixed region; and annealing the intermixed region to form a silicide contact on the silicon. A semiconductor device comprising a silicide contact located over a silicon layer of the semiconductor device, the silicide contact comprising nickel (Ni) and silicon (Si) and having Ni amount equivalent to a thickness of about 21 angstroms or less. | 10-06-2011 |
