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Choi, San Jose

Brian D. Choi, San Jose, CA US

Patent application numberDescriptionPublished
20100332013METHODS AND APPARATUS TO PREDICT ETCH RATE UNIFORMITY FOR QUALIFICATION OF A PLASMA CHAMBER - A method for predicting etch rate uniformity for qualifying health status of a processing chamber during substrate processing of substrates is provided. The method includes executing a recipe and receiving processing data from a first set of sensors. The method further includes analyzing the processing data utilizing a subsystem health check predictive model to determine calculated data, which includes at least one of etch rate data and uniformity data. The subsystem health check predictive model is constructed by correlating measurement data from a set of film substrates with processing data collected during analogous processing of a set of non-film substrates. The method yet also includes performing a comparison of the calculated data against a set of control limits as defined by the subsystem health check predictive model. The method yet further includes generating a warning if the calculated data is outside of the set of control limits.12-30-2010
20100332201METHODS AND APPARATUS FOR PREDICTIVE PREVENTIVE MAINTENANCE OF PROCESSING CHAMBERS - A method for assessing health status of a processing chamber is provided. The method includes executing a recipe. The method also includes receiving processing data from a set of sensors during execution of the recipe. The method further includes analyzing the processing data utilizing a set of multi-variate predictive models. The method yet also includes generating a set of component wear data values. The method yet further includes comparing the set of component wear data values against a set of useful life threshold ranges. The method moreover includes generating a warning if the set of component wear data values is outside of the set of useful life threshold ranges.12-30-2010

Calvin Choi, San Jose, CA US

Patent application numberDescriptionPublished
20110101525SEMICONDUCTOR DEVICE WITH TRENCH-LIKE FEED-THROUGHS - A semiconductor device (e.g., a flip chip) includes a substrate layer that is separated from a drain contact by an intervening layer. Trench-like feed-through elements that pass through the intervening layer are used to electrically connect the drain contact and the substrate layer when the device is operated.05-05-2011

Dongwon Choi, San Jose, CA US

Patent application numberDescriptionPublished
20100267224ENHANCED SCAVENGING OF RESIDUAL FLUORINE RADICALS USING SILICON COATING ON PROCESS CHAMBER WALLS - Methods and apparatus for processing a substrate are provided herein. In some embodiments, an apparatus for substrate processing includes a process chamber having a chamber body defining an inner volume; and a silicon containing coating disposed on an interior surface of the chamber body, wherein an outer surface of the silicon containing coating is at least 35 percent silicon (Si) by atom. In some embodiments, a method for forming a silicon containing coating in a process chamber includes providing a first process gas comprising a silicon containing gas to an inner volume of the process chamber; and forming a silicon containing coating on an interior surface of the process chamber, wherein an outer surface of the silicon containing coating is at least 35 percent silicon.10-21-2010

Gregory Choi, San Jose, CA US

Patent application numberDescriptionPublished
20090024801METHOD AND SYSTEM TO DETECT A CACHED WEB PAGE - A method and system to determine whether a web page has been cached is provided. An example system comprises a cookie generator, a cookie distributor, and a cookie evaluator. The cookie distributor may be configured to provide the code to a client system, in response to a request for web content from the client system. A value of the code to be updated at the client system in response to the client system initiating a request for the web content. The cookie evaluator may be configured to compare a value of the code to the default value. The cached status detector may be configured to use a result of the comparing to determine a cached status of the web content, the cached status to indicate whether the web content has been cached by the client system.01-22-2009
20090049423JAVASCRIPTTM PROGRAMMING EXTENSION - A JavaScript™ programming extension is provided. An example JavaScript™ programming extension comprises a code generator and a JavaScript™ reference converter. The code generator may be configured to access an existing JavaScript™ file, validate JavaScript™ definitions in the existing JavaScript™ file, and generate a Java™ representation of the existing JavaScript™ file. The JavaScript™ reference converter may be configured to generate a validated JavaScript™ file corresponding to the existing JavaScript™ file.02-19-2009
20110016449METHOD AND SYSTEM FOR INTEGRATING JAVA AND JAVASCRIPT TECHNOLOGIES - A method and system for integrating Java and JavaScript technologies is provided. An example system includes a JavaScript proxy generator and a runtime module. The JavaScript proxy generator may be configured to automatically generate a JavaScript proxy in a form of a Java application programming interface. The runtime module may be configured to call the JavaScript proxy from the Java module, pass control of execution to the JavaScript module, execute the JavaScript module to generate an output method or object, and pass control of execution to the Java module to continue execution of the Java module.01-20-2011

Hok-Kin Choi, San Jose, CA US

Patent application numberDescriptionPublished
20080241401METHOD OF MONITORING ELECTROLESS PLATING CHEMISTRY - Methods and associated structures of forming a microelectronic device are described. Those methods may include an electroless plating process, that may comprise an electroless plating bath, wherein the electroless plating bath comprises a stabilizer and a suppressor, separating the stabilizer and the suppressor by using a HPLC, determining the concentration of a UV/VIS detectable one of the stabilizer and the suppressor by using a UV/VIS, and determining the concentration of an ELSD detectable one of the suppressor and the stabilizer by using an ELSD.10-02-2008

Patent applications by Hok-Kin Choi, San Jose, CA US

Jinhan Choi, San Jose, CA US

Patent application numberDescriptionPublished
20090104745INTEGRATION METHOD FOR DUAL DOPED POLYSILICON GATE PROFILE AND CD CONTROL - In accordance with the present teachings, methods of making dual doped polysilicon gates are provided. The method can include providing a semiconductor structure including a plurality of polysilicon gates having a first critical dimension disposed over a dielectric layer and planarizing the plurality of polysilicon gates with a spin-on material to form a plurality of planarized polysilicon gates. The method can further include doping an exposed first region with p-type dopants to form a plurality of p-doped planarized polysilicon gates and doping an exposed second region with n-type dopants to form a plurality of n-doped planarized polysilicon gates. The method can also include removing the spin-on material to form a plurality of p-doped polysilicon gates and a plurality of n-doped polysilicon gates, wherein critical dimension of each of the plurality of n-doped polysilicon gates and the plurality of p-doped polysilicon gates are substantially similar to the first critical dimension.04-23-2009

Patent applications by Jinhan Choi, San Jose, CA US

Kenric Choi, San Jose, CA US

Patent application numberDescriptionPublished
20090283252GAS HEATER - A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.11-19-2009

Kenric T. Choi, San Jose, CA US

Patent application numberDescriptionPublished
20090194026PROCESSING SYSTEM FOR FABRICATING COMPOUND NITRIDE SEMICONDUCTOR DEVICES - One embodiment of a processing system for fabricating compound nitride semiconductor devices comprises one or more processing chamber operable with form a compound nitride semiconductor layer on a substrate, a transfer chamber coupled with the processing chamber, a loadlock chamber coupled with the transfer chamber, and a load station coupled with the loadlock chamber, wherein the load station comprises a conveyor tray movable to convey a carrier plate loaded with one or more substrates into the loadlock chamber. Compared to a single chamber reactor, the multi-chamber processing system expands the potential complexity and variety of compound structures. Additionally, the system can achieve higher quality and yield by specialization of individual chambers for specific epitaxial growth processes. Throughput is increased by simultaneous processing in multiple chambers.08-06-2009
20090232986HEATED VALVE MANIFOLD FOR AMPOULE - Embodiments of the invention provide an apparatus and a method for generating a gaseous chemical precursor that may be used in a vapor deposition processing system. In one embodiment, the apparatus contains a valve manifold assembly, which includes a valve assembly body having at least one embedded electric heater, an inlet channel passing through the valve assembly body, a first pneumatic valve and a first manual valve coupled to the valve assembly body and positioned to control fluid flow within the inlet channel, an outlet channel passing through the valve assembly body, and a second pneumatic valve and a second manual valve coupled to the valve assembly body and positioned to control fluid flow within the outlet channel. The valve manifold assembly further contains a bypass channel connected to and between the inlet and outlet channels, and containing a bypass valve positioned to control fluid flow within the bypass channel.09-17-2009
20100119734LAMINAR FLOW IN A PRECURSOR SOURCE CANISTER - A canister apparatus for supplying a precursor material is disclosed. The canister apparatus includes a container defining an interior volume adapted to confine a precursor material, a tubular member adapted to introduce a carrier gas into the container, wherein the tubular member includes a distal end, and perforated portion spaced apart from the distal end that includes a plurality of radial holes, and an outlet adapted to flow out the precursor material and the carrier gas.05-13-2010

Steve Choi, San Jose, CA US

Patent application numberDescriptionPublished
20100039095Method of measuring flash memory cell current - In the present method of measuring the current of a first current source, the current thereof may be combined with either the current of a second current source, or the current of a third current source. Based on a combination of the current of the first current source and either (a) the current of the second current source or (b) the current of the third current source, a digital output is provided. If this digital output is of a first value, the state of combining the current of the first current source with the current of the second current source becomes in effect. If this digital output is of a second value, the state of combining the current of the first current source with the current of the second current source becomes in effect.02-18-2010
20100097876APPARATUS AND METHOD FOR GENERATING WIDE-RANGE REGULATED SUPPLY VOLTAGES FOR A FLASH MEMORY - A voltage regulator is provided. The voltage regulator provides an output voltage that is proportional to a digital multi-bit select signal. The voltage regulator includes a coarse voltage regulator and a fine voltage regulator. The coarse voltage regulator provides a coarse output voltage based on an output of a voltage divider selected based on the most significant bits of the select signal. The fine voltage regulator provides the output voltage from the coarse output voltage. The output of the fine voltage regulator is adjusted by adjusting the output of an adjustable current source that is provided to a resistor that is coupled between the output and one of the inputs of the fine voltage regulator.04-22-2010

Wilson Choi, San Jose, CA US

Patent application numberDescriptionPublished
20090160475Test pin reduction using package center ball grid array - An apparatus and method for reducing the number of package pins in a chip package which must be budgeted for test purposes. In one embodiment, the invention achieves this by housing test balls in the depopulated center of a package ball array. The test balls are used to test a chip package prior to connection with a printed wiring board (PWB)/printed circuit board (PCB). After tests are completed, and when the chip package is connected to a PWB/PCB, the test balls may be left electrically isolated and unconnected. In another embodiment, the test balls are located in previously unused interstitial sites in a package ball array.06-25-2009

Woncheol Choi, San Jose, CA US

Patent application numberDescriptionPublished
20080286715SYSTEM AND METHOD FOR PROVIDING AN IMAGE GUIDED IMPLANT SURGICAL GUIDE - An impression tray includes a tray holder; a U-shaped body coupled to the tray holder; and a plurality of indicators positioned on the tray holder and the U-shaped body. The impression tray allows the scanning process to be simplified as the indicators are used for registering the scanned model to patient anatomy. Doctors can examine the scan of the patient first and then make decision for surgical guide. The fabrication system setup is relatively simple. There is no specialized orientation jig. Regardless of the position of the stone model, the coordinates of the drill can be easily calculated.11-20-2008
20100171464System and Method For Charging A Mobile Device - A system and method for charging a mobile device is disclosed. According to one embodiment, a mobile charging system comprises a mobile device having a battery, a robotic device removably connected to the mobile device, and a charging station removably connected to the robotic device. The robotic device is adapted to detect docking of the mobile device. If the docking of the mobile device is detected, the robotic device autonomously returns to the charging station for charging the battery of the mobile device. The robotic device receives an instruction from the mobile device or a user and performs tasks associated with the instruction.07-08-2010

Patent applications by Woncheol Choi, San Jose, CA US

Zae Yong Choi, San Jose, CA US

Patent application numberDescriptionPublished
20090074106MULTI-MODE AND MULTI-BAND TRANSMITTERS FOR WIRELESS COMMUNICATION - Transmitters supporting multiple modulation modes and/or multiple frequency bands are described. A transmitter may perform large signal polar modulation, small signal polar modulation, and/or quadrature modulation, which may support different modulation schemes and systems. Circuit blocks may be shared by the different modulation modes to reduce cost and power. For example, a single modulator and a single power amplifier may be used for small signal polar modulation and quadrature modulation. The transmitter may apply pre-distortion to improve performance, to allow a power amplifier to support multiple frequency bands, to allow the power amplifier to operate at higher output power levels, etc. Envelope and phase distortions due to non-linearity of the power amplifier may be characterized for different input levels and different bands and stored at the transmitter. Thereafter, envelope and phase signals may be pre-distorted based on the stored characterizations to compensate for non-linearity of the power amplifier.03-19-2009
20090138226SYSTEMS AND METHODS FOR MEASURING NON-LINEAR CHARACTERISTICS OF A POWER AMPLIFIER - A method for measuring non-linear characteristics of a power amplifier is described. A calibration waveform is calculated during a testing procedure period. Amplitude characteristics of the calibration waveform at the output of the power amplifier are measured during the testing procedure period. Phase characteristics of the calibration waveform at the output of the power amplifier are measured during the testing procedure period. Pre-distortion techniques are configured based on the amplitude characteristics and the phase characteristics to be used during a normal operation period of a transmitter.05-28-2009