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Chin-Sheng Yang

Chin-Sheng Yang, Hsinchu City TW

Patent application numberDescriptionPublished
20100084735SEMICONDUCTOR ASSEMBLY AND METHOD FOR FORMING SEAL RING - A method for forming a seal ring is disclosed. First, a substrate including a MEMS region, a logic region and a seal ring region is provided. Second, a trench is formed in the MEMS region and multiple recesses are formed in the seal ring region. An oxide fills the trench and the recesses. Later, a MOS is form in the logic region and a dielectric layer is formed on the substrate. Then, an etching procedure is carried out to partially remove the dielectric layer and simultaneously remove the oxide in the multiple recesses completely to form a seal ring space. Afterwards, a metal fills the seal ring space to from the seal ring.04-08-2010
20100096726METAL CAPACITOR AND METHOD OF MAKING THE SAME - A method of making a metal capacitor includes the following steps. A dielectric layer having a metal interconnection and a capacitor electrode is provided. Then, a treatment is performed to increase the dielectric constant of the dielectric layer surrounding the capacitor electrode. The treatment can be UV radiation, a plasma treatment or an ion implantation. Accordingly, the metal capacitor will have a higher capacitance and RC delay between the metal interconnection and the dielectric layer can be prevented.04-22-2010
20110012227SEMICONDUCTOR ASSEMBLY - A semiconductor assembly includes a substrate with at least a CMOS region and a seal ring region and an optional micro electro mechanical system (MEMS) region, a shallow trench isolation disposed in the CMOS region of the substrate, an optional micro electro mechanical system device disposed in the micro electro mechanical system region, a plurality of recesses disposed in the seal ring region of the substrate, a first metal-oxide semiconductor disposed in the CMOS region, a dielectric layer disposed on the substrate and on the recesses, and a seal ring disposed in the seal ring region and embedded in the dielectric layer to cover and fill up the recesses, wherein the seal ring region surrounds at least the CMOS region and the optional MEMS region.01-20-2011

Chin-Sheng Yang, Taipei City TW

Patent application numberDescriptionPublished
20100040859Nanostructured thin-film formed by utilizing oblique-angle deposition and method of the same - The present invention discloses a transparent conductive nanostructured thin-film by oblique-angle deposition and method of the same. An electron beam system is utilized to evaporate the target source. Evaporation substrate is disposed on a plurality of adjustable sample stage. Multiple gas control valve and heat source is provided to control the gas flow and temperature within the process chamber. An annealing process is performed after the evaporation to improve the thin-film structure and optoelectronic properties.02-18-2010
20100261001NANOSTRUCTURED THIN-FILM FORMED BY UTILIZING OBLIQUE-ANGLE DEPOSITION AND METHOD OF THE SAME - The present invention discloses a transparent conductive nanostructured thin-film by oblique-angle deposition and method of the same. An electron beam system is utilized to evaporate the target source. Evaporation substrate is disposed on a plurality of adjustable sample stage. Multiple gas control valve and heat source is provided to control the gas flow and temperature within the process chamber. An annealing process is performed after the evaporation to improve the thin-film structure and optoelectronic properties.10-14-2010

Chin-Sheng Yang, Hsinchu TW

Patent application numberDescriptionPublished
20080237144METHOD FOR REMOVING MICRO-BUBBLES AND/OR PARTICLES FROM LIQUID, LIQUID SUPPLY APPARATUS AND IMMERSION EXPOSURE APPARATUS - A liquid supply apparatus capable of removing micro-bubbles and particles is described, including a pipe, a laser provider and at least one micro-bubble/particle outlet. The laser provider provides a laser crossing the pipe, wherein the laser is provided in a manner such that a micro-bubble/particle blocking/repelling barrier is formed crossing the pipe blocking or repelling micro-bubbles, particles or both in the liquid in the pipe. The micro-bubble/particle outlet is disposed on the pipe between the barrier and the liquid inlet of the pipe, adjacent to the barrier for discharging micro-bubbles, particles or both.10-02-2008
20080237659SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device is provided. Devices are formed on a core region and a non-core region in a substrate. A strain process is performed to the device on the core region but is not performed to the device on the non-core region.10-02-2008
20080246061STRESS LAYER STRUCTURE - A stress layer structure disposed on a substrate including a device region and a non-device region is provided. The device region includes active regions and a non-active region. The stress layer structure has stress patterns, at least one partition line, and at least one dummy stress pattern. Each of the stress patterns is disposed on the substrate of each of the active regions, respectively. The partition line exposes a portion of the substrate and divides the two adjacent stress patterns. The dummy stress pattern is disposed on the substrate in the partition line.10-09-2008
20080296695SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor is provided. The semiconductor device includes a transistor, a first strain layer and a second strain layer on a substrate. The first strain layer is configured at the periphery of the transistor. The second strain layer covers the transistor and a region exposed by the first strain layer. The stress provided by the second strain layer is different from that by the first strain layer.12-04-2008
20090079083INTERCONNECT STRUCTURE AND FABRICATING METHOD OF THE SAME - A fabricating method of an interconnect structure is provided. A first dielectric layer is formed on a substrate for covering an air gap region and a non-air gap region. Next, interconnects are formed in the first dielectric layer on the air gap region and in the first dielectric layer on the non-air gap region. Then, a cap layer is formed on the first dielectric layer. Thereafter, on the air gap region, a portion of the cap layer and a portion of the first dielectric layer are removed for forming first openings, and thereby a portion of the first dielectric layer are left between the interconnects for forming support pillars. After that, a second dielectric layer is formed over the substrate for covering the cap layer and the first openings, so as to form an air gap in each of the first openings.03-26-2009
20090212368SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device including transistors and strain layers is provided. Each transistor includes a source region and a drain region on a substrate and a gate structure on a channel region between the source region and the drain region. Lengths of the channel regions of these transistors are the same, but at least one source or drain region has a width along a channel length direction and the width is different from widths of other source or drain regions. The strain layers include first and second strain layers embedded separately at two sides of each gate structure in the substrate. A first width of each first strain layer along the channel length direction is the same, and a second width of each second strain layer along the channel length direction is the same.08-27-2009
20100090749MULTI-FUNCTION CHIP - A multi-function chip including a circuit and at least one control circuit is provided. The circuit having multiple functions includes an interconnection. The interconnection has at least one resistance-variable segment. The control circuit is electronically connected to the resistance-variable segment. One of the functions is carried out by adjusting the resistance of the resistance-variable segment with the control circuit.04-15-2010

Patent applications by Chin-Sheng Yang, Hsinchu TW

Chin-Sheng Yang, Hsin-Chu City TW

Patent application numberDescriptionPublished
20090095990METAL-OXIDE-SEMICONDUCTOR TRANSISTOR AND METHOD OF FORMING THE SAME - A method of forming a metal-oxide-semiconductor (MOS) transistor device is provided. First, a semiconductor substrate is prepared. Subsequently, a gate structure is formed on the semiconductor substrate. The gate structure includes a first strip portion and a second strip portion that is not parallel to the first strip portion. The gate structure further includes a junction between the first strip portion and the second strip portion. Thereafter, a stressed cap layer is formed on the semiconductor substrate, and covers the gate structure. Next, a portion of the stressed cap layer is removed to expose the junction between the first strip portion and the second strip portion.04-16-2009
20090127643PHOTODIODE OF AN IMAGE SENSOR AND FABRICATING METHOD THEREOF - A method for fabricating a photodiode of an image sensor includes providing a substrate having a first conductive type and photo sensing regions, respectively forming photodiodes in the photo sensing region, and performing an ion implantation to form an implanted reflective layer having a second conductive type under the plurality of photodiodes for reflecting light and creating depletion regions in the substrate.05-21-2009