Patent application number | Description | Published |
20100099229 | METHOD FOR FORMING A THIN FILM RESISTOR - A method for forming a thin film resistor includes providing a substrate having a transistor region and a thin film resistor region defined thereon, sequentially forming a dielectric layer, a metal layer and a first hard mask layer on the substrate, patterning the first hard mask layer to form at least a thin film resistor pattern in the thin film resistor region, sequentially forming a polysilicon layer and a second hard mask layer on the substrate, patterning the second hard mask layer to form at least a gate pattern in the transistor region, and performing an etching process to form a gate and a thin film resistor respectively in the transistor region and the thin film resistor region. | 04-22-2010 |
20100109080 | PSEUDO-DRAIN MOS TRANSISTOR - A pseudo-drain MOS transistor is disclosed. The transistor includes a semiconductor substrate; a gate structure disposed on the semiconductor substrate; a source, a pseudo-drain, a drain, and a shallow trench isolation disposed in the semiconductor substrate, a p-well disposed in the semiconductor substrate and under the source and the gate structure; and an n-well disposed under the drain. The source and the pseudo-drain are disposed adjacent to two sides of the gate structure and the shallow trench isolation is disposed between the pseudo-drain and the drain, and the n-well is extended toward the pseudo-drain while not reaching the area below the gate structure. | 05-06-2010 |
20100148263 | SEMICONDUCTOR DEVICE STRUCTURE AND FABRICATING METHOD THEREOF - A semiconductor device structure including a substrate, a resistor, and a first gate structure is provided. The substrate includes a resistor region and a metal-oxide-semiconductor (MOS) transistor region. The resistor is disposed on the substrate within the resistor region. The resistor includes a first dielectric layer, a metal layer, a second dielectric layer, and a semiconductor layer sequentially stacked on the substrate. The first gate structure is disposed on the substrate within the MOS transistor region. The first gate structure includes the first dielectric layer, the metal layer, and the semiconductor layer sequentially stacked on the substrate. | 06-17-2010 |
20100200947 | DIE SEAL RING - A die seal ring disposed outside of a die region of a semiconductor substrate is disclosed. The die seal ring includes a first isolation structure, a second isolation structure, and at least one third isolation structure disposed between the first isolation structure and the second isolation structure; a plurality of first regions between the first isolation structure, the second isolation structure and the third isolation structure; a second region under the first region and the third isolation structure; and a third region under the first isolation structure. | 08-12-2010 |
20100271750 | CAPACITOR STRUCTURE - A capacitor structure is provided. The capacitor structure comprises a plurality of parallel conductive line levels and a plurality of vias. Each conductive line level comprises first conductive lines parallel to each other and second conductive lines parallel to each other. Also, the first conductive lines on different conductive line levels are aligned to each other and the second conductive lines on different conductive line levels are aligned to each other so as to form first conductive line co-planes and second conductive line co-planes. The vias are located on the conductive line co-planes and between the conductive line levels for connecting the conductive lines on the neighboring conductive line levels. The vias, on a height level of each of the conductive line co-planes, are arranged only on one of the neighboring conductive line co-planes. | 10-28-2010 |
20100320540 | SEMICONDUCTOR DEVICE STRUCTURE AND FABRICATING METHOD THEREOF - A semiconductor device structure including a substrate, a resistor, and a first gate structure is provided. The substrate includes a resistor region and a metal-oxide-semiconductor (MOS) transistor region. The resistor is disposed on the substrate within the resistor region. The resistor includes a first dielectric layer, a metal layer, a second dielectric layer, and a semiconductor layer sequentially stacked on the substrate. The first gate structure is disposed on the substrate within the MOS transistor region. The first gate structure includes the first dielectric layer, the metal layer, and the semiconductor layer sequentially stacked on the substrate. | 12-23-2010 |
20100320544 | METAL GATE TRANSISTOR AND RESISTOR AND METHOD FOR FABRICATING THE SAME - A method for fabricating metal gate transistor and resistor is disclosed. The method includes the steps of: providing a substrate having a transistor region and a resistor region; forming a shallow trench isolation in the substrate of the resistor region; forming a tank in the shallow trench isolation of the resistor region; forming at least one gate in the transistor region and a resistor in the tank of the resistor region; and transforming the gate into a metal gate transistor. | 12-23-2010 |
20100327378 | SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME - A semiconductor structure and a method of forming the same are provided. The semiconductor structure includes a substrate, a resistor and a metal gate structure. The substrate has a first area and a second area. The resistor is disposed in the first area, wherein the resistor does not include any metal layer. The metal gate structure is disposed in the second area. | 12-30-2010 |
20100328022 | METHOD FOR FABRICATING METAL GATE AND POLYSILICON RESISTOR AND RELATED POLYSILICON RESISTOR STRUCTURE - An integrated method includes fabricating a metal gate and a polysilicon resistor structure. A photoresistor layer is defined by an SAB photo mask and covers a part of a polysilicon structure of the polysilicon resistor. When the gate conductor of a poly gate transistor is etched, the part of the polysilicon structure is protected by the patterned photoresistor layer. After the polysilicon resistor and the metal gate are formed. The polysilicon resistor still has sufficient resistance and includes two metal structures for electrical connection. | 12-30-2010 |
20110073957 | METAL GATE TRANSISTOR WITH RESISTOR - A resistor is disclosed. The resistor is disposed on a substrate, in which the resistor includes: a dielectric layer disposed on the substrate; a polysilicon structure disposed on the dielectric layer; two primary resistance structures disposed on the dielectric layer and at two ends of the polysilicon structure; and a plurality of secondary resistance structures disposed on the dielectric layer and interlaced with the polysilicon structures. | 03-31-2011 |
20110156161 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A semiconductor device including a substrate, a first device, a second device and an interlayer dielectric layer is provided. The substrate has a first area and a second area. The first device is disposed in the first area of the substrate and includes a first dielectric layer on the substrate and a metal gate on the first dielectric layer. The second device is in the second area of the substrate and includes a second dielectric layer on the substrate and, a polysilicon layer on the second dielectric layer. It is noted that the height of the polysilicon layer is less than that of the metal gate of the first device. The interlayer dielectric layer covers the second device. | 06-30-2011 |
20110171810 | METAL GATE TRANSISTOR AND RESISTOR AND METHOD FOR FABRICATING THE SAME - A method for fabricating metal gate transistor and resistor is disclosed. The method includes the steps of: providing a substrate having a transistor region and a resistor region; forming a shallow trench isolation in the substrate of the resistor region; forming a tank in the shallow trench isolation of the resistor region; forming at least one gate in the transistor region and a resistor in the tank of the resistor region; and transforming the gate into a metal gate transistor. | 07-14-2011 |
20110292565 | CAPACITOR STRUCTURE - A capacitor structure includes a plurality of conductive line levels located over the substrate. Each of the conductive line levels includes a first conductive line and a second conductive line. The first conductive lines in the conductive line levels form a first conductive line co-plane and the second conductive lines in the conductive line levels form a second conductive line co-plane. A first conductive end is electrically connected to the first conductive lines on the conductive line levels. A second conductive end is electrically connected to the second conductive lines on the conductive line levels. A plurality of vias are located between the neighboring conductive line levels and placed on only one of the first and second conductive line co-planes on a same level. | 12-01-2011 |
20120214284 | METHOD FOR FABRICATING METAL GATE TRANSISTOR AND POLYSILICON RESISTOR - An integrated method includes fabricating a metal gate transistor and a polysilicon resistor structure. A photoresistor layer is defined by an SAB photo mask and covers a part of a high resistance structure of the polysilicon resistor. When the dummy gate of the transistor is etched, the part of the high resistance structure is protected by the patterned photoresistor layer. The polysilicon resistor is formed simultaneously with the transistor. Furthermore, the polysilicon resistor still has sufficient resistance and includes two metal structures for electrical connection. | 08-23-2012 |