| Patent application number | Description | Published |
|---|
| 20080289182 | METHOD OF FABRICATING STRUCTURE HAVING OUT-OF-PLANE ANGULAR SEGMENT - A structure fabricating method plastically deforms a target portion of a substrate, to thereby fabricate a structure having an inclined segment that is inclined relative to a principal surface of the substrate. The method includes forming a projection on the target portion to project from the principal surface of the substrate or from an opposing surface of the substrate on the side opposite to the principal surface, and applying a force to the projection to plastically deform the target portion such that the target portion is bent in a direction from one surface of the substrate on the side where the projection is formed, toward another surface on the side opposite to the one surface. | 11-27-2008 |
| 20090031548 | STRUCTURE FABRICATION METHOD - In a structure fabrication method for fabricating a structure including an inclined part inclined to a principal plane of a substrate by plastically deforming a work piece having the substrate with the principal plane, the structure fabrication method includes the steps of providing in the work piece a projection configured to protrude from a first surface and away from the principal plane of the substrate; and bending the work piece toward a second surface opposite to the first surface. The bending is accomplished by applying a force on a block including an inclined pressure plane that is abutted on the projection for plastically deforming the work piece, in which in bending the work piece, the direction of a first force applied on the work piece intersects with the direction of a second force of the inclined pressure plane pushing the projection. | 02-05-2009 |
| 20090114910 | SEMICONDUCTOR DEVICE - In the present invention, a thin film transistor is formed on a plastic film substrate ( | 05-07-2009 |
| 20090149030 | OXIDE ETCHING METHOD - There is provided an etching method of an amorphous oxide layer containing In and at least one of Ga and Zn, which includes etching the amorphous oxide layer using an etchant containing any one of acetic acid, citric acid, hydrochloric acid, and perchloric acid. | 06-11-2009 |
| 20090313808 | ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS - A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate. | 12-24-2009 |
| 20090313809 | ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS - A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element. | 12-24-2009 |
| 20090315217 | METHOD OF FABRICATING STRUCTURE - In a method of fabricating a structure by plastically deforming a processing portion provided at a movable segment, a restraint segment configured to restrain movement of the movable segment is provided before an external force is applied to the processing portion. After processing of the processing portion is completed, the restraint segment is removed. | 12-24-2009 |
| 20090320274 | ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS - A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate. | 12-31-2009 |
| 20100035378 | ETCHING METHOD, PATTERN FORMING PROCESS, THIN-FILM TRANSISTOR FABRICATION PROCESS, AND ETCHING SOLUTION - An etching method is provided in which selective etching can be carried out for an amorphous oxide semiconductor film including at least one of gallium and zinc, and indium. In the etching method, the selective etching is performed using an alkaline etching solution. The alkaline etching solution contains especially ammonia in a specific concentration range. | 02-11-2010 |
| 20100107758 | STRUCTURAL MEMBER HAVING A PLURALITY OF CONDUCTIVE REGIONS - A structural member having a plurality of conductive regions electrically insulated from each other, in which the plurality of conductive regions are electrically insulated from each other by continuous oxidized regions, and the oxidized regions are each formed of an oxide made of a material having a plurality of through holes or trenches formed therein. | 05-06-2010 |
| 20100123366 | ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME - An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane. | 05-20-2010 |
| 20100207484 | ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR - In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate. | 08-19-2010 |
| 20100213791 | OSCILLATOR DEVICE - An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions. | 08-26-2010 |
| 20100327380 | METHOD OF MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER AND CAPACITIVE ELECTROMECHANICAL TRANSDUCER - In a method of manufacturing a capacitive electromechanical transducer, a first electrode ( | 12-30-2010 |
| 20110031568 | STRUCTURE HAVING PLURAL CONDUCTIVE REGIONS AND PROCESS FOR PRODUCTION THEREOF - A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves. | 02-10-2011 |
| 20110062439 | SEMICONDUCTOR DEVICE - In the present invention, a thin film transistor is formed on a plastic film substrate ( | 03-17-2011 |
| 20110073968 | ELEMENT ARRAY, ELECTROMECHANICAL CONVERSION DEVICE, AND PROCESS FOR PRODUCING THE SAME - An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes. | 03-31-2011 |
| 20110095645 | ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR - In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are in contact with each other, and a remaining region of the vibration membrane other than the contact region is able to vibrate. There is an overlap region of the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region. | 04-28-2011 |
