Patent application number | Description | Published |
20100190345 | Selective Etch-Back Process for Semiconductor Devices - A semiconductor device having fins and a method of manufacture are provided. A patterned mask is formed over a substrate. Trenches are formed in the substrate and the trenches are filled with a dielectric material. Thereafter, the patterned mask is removed and one or more etch processes are performed to recess the dielectric material, wherein at least one of the etch processes is an etch process that removes or prevents fences from being formed along sidewalls of the trench. The etch process may be, for example, a plasma etch process using NH | 07-29-2010 |
20100213431 | Treated Chalcogenide Layer for Semiconductor Devices - A phase change memory and a method of manufacture are provided. The phase change memory includes a layer of phase change material treated to increase the hydrophobic nature of the phase change material. The hydrophobic nature of the phase change material improves adhesion between the phase change material and an overlying mask layer. The phase change material may be treated, for example, with a plasma comprising N | 08-26-2010 |
20100230757 | Hybrid STI Gap-Filling Approach - A method of forming an integrated circuit structure includes providing a semiconductor substrate including a top surface; forming an opening extending from the top surface into the semiconductor substrate; and performing a first deposition step to fill a first dielectric material into the opening. The first dielectric material is then recessed. A second deposition step is performed to fill a remaining portion of the opening with a second dielectric material. The second dielectric material is denser than the first dielectric material. The second dielectric material is recessed until a top surface of the second dielectric material is lower than the top surface of the semiconductor substrate. | 09-16-2010 |
20100252794 | COMPOSITE FILM FOR PHASE CHANGE MEMORY DEVICES - A phase change memory device and a method of manufacture are provided. The phase change memory device includes a phase change layer electrically coupled to a top electrode and a bottom electrode, the phase change layer comprising a phase change material. A mask layer is formed overlying the phase change layer. A first sealing layer is formed overlying the mask layer, and a second sealing layer is formed overlying the first sealing layer. | 10-07-2010 |
20100270604 | Non-Volatile Memories and Methods of Fabrication Thereof - Non-volatile memories and methods of fabrication thereof are described. In one embodiment, a method of fabricating a semiconductor device includes forming an oxide layer over a semiconductor substrate, and exposing the oxide layer to a first nitridation step to form a first nitrogen rich region. The first nitrogen rich region is disposed adjacent an interface between the oxide layer and the semiconductor substrate. After the first nitridation step, the oxide layer is exposed to a second nitridation step to form a second nitrogen rich region. A first gate electrode is formed on the oxide layer, wherein the second nitrogen rich region is disposed adjacent an interface between the oxide layer and the first gate electrode. | 10-28-2010 |
20110195559 | METHOD OF FORMING SHALLOW TRENCH ISOLATION STRUCTURE - An embodiment of the disclosure includes a method of forming a shallow trench isolation structure. A substrate is provided. The substrate includes a top surface. A trench is formed extending from the top surface into the substrate. The trench has sidewalls and a bottom surface. A liner oxide layer is formed on the sidewalls and the bottom surface. The liner oxide layer is treated in a plasma environment comprises at least one of NF | 08-11-2011 |
20120028473 | Method of Reducing Delamination in the Fabrication of Small-Pitch Devices - A method of forming an integrated circuit structure includes providing a substrate; forming a first hard mask layer over the substrate; forming a second hard mask layer over the first hard mask layer; patterning the second hard mask layer to form a hard mask; and, after the step of patterning the second hard mask layer, baking the substrate, the first hard mask layer, and the hard mask. After the step of baking, a spacer layer is formed, which includes a first portion on a top of the hard mask, and a second portion and a third portion on opposite sidewalls of the hard mask. The method further includes removing the first portion of the spacer layer; removing the hard mask; and using the second portion and the third portion of the spacer layer as masks to pattern the first hard mask layer. | 02-02-2012 |
20120038015 | ANTIREFLECTIVE LAYER FOR BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING SAME - The present disclosure provides an image sensor device that exhibits improved quantum efficiency. For example, a backside illuminated (BSI) image sensor device is provided that includes a substrate having a front surface and a back surface; a light sensing region disposed at the front surface of the substrate; and an antireflective layer disposed over the back surface of the substrate. The antireflective layer has an index of refraction greater than or equal to about 2.2 and an extinction coefficient less than or equal to about 0.05 when measured at a wavelength less than 700 nm. | 02-16-2012 |
20120235273 | Hybrid Gap-fill Approach for STI Formation - A method of forming a shallow trench isolation region is provided. The method includes providing a semiconductor substrate comprising a top surface; forming an opening extending from the top surface into the semiconductor substrate; performing a conformal deposition method to fill a dielectric material into the opening; performing a first treatment on the dielectric material, wherein the first treatment provides an energy high enough for breaking bonds in the dielectric material; and performing a steam anneal on the dielectric material. | 09-20-2012 |
20130032908 | Hybrid Film for Protecting MTJ Stacks of MRAM - A method includes patterning a plurality of magnetic tunnel junction (MTJ) layers to form a MTJ stack, and forming a first dielectric cap layer over a top surface and on a sidewall of the MTJ stack. The step of patterning and the step of forming the first dielectric cap layer are in-situ formed in a same vacuum environment. A second dielectric cap layer is formed over and contacting the first dielectric cap layer. | 02-07-2013 |
20130075837 | TECHNIQUE FOR SMOOTHING AN INTERFACE BETWEEN LAYERS OF A SEMICONDUCTOR DEVICE - The present disclosure provides a semiconductor memory device. The device includes a pinning layer having an anti-ferromagnetic material and disposed over a first electrode; a pinned layer disposed over the pinning layer; a composite layer disposed over the pinned layer, the composite layer having a magnetic material randomly distributed in a non-magnetic material; a barrier layer disposed on the composite layer; a free layer disposed over the barrier layer; and a second electrode disposed over the free layer. | 03-28-2013 |
20130075838 | METHOD AND STRUCTURE FOR A MRAM DEVICE WITH A BILAYER PASSIVATION - The present disclosure provides a magnetoresistive random access memory (MRAM) device. The MRAM device includes a magnetic tunnel junction (MTJ) stack on a substrate; and a dual-layer passivation layer disposed around the MTJ stack. The dual-layer passivation layer includes an oxygen-free film formed adjacent sidewalls of the MTJ stack; and a moisture-blocking film formed around the oxygen-free film. | 03-28-2013 |
20130075839 | STRUCTURE AND METHOD FOR A MRAM DEVICE WITH AN OXYGEN ABSORBING CAP LAYER - The present disclosure provides a MTJ stack for an MRAM device. The MTJ stack includes a pinned ferromagnetic layer over a pinning layer; a tunneling barrier layer over the pinned ferromagnetic layer; a free ferromagnetic layer over the tunneling barrier layer; a conductive oxide layer over the free ferromagnetic layer; and a oxygen-based cap layer over the conductive oxide layer. | 03-28-2013 |
20130093048 | Deposited Material and Method of Formation - A system and method for manufacturing a semiconductor device is provided. An embodiment comprises forming a deposited layer using an atomic layer deposition (ALD) process. The ALD process may utilize a first precursor for a first time period, a first purge for a second time period longer than the first time period, a second precursor for a third time period longer than the first time period, and a second purge for a fourth time period longer than the third time period. | 04-18-2013 |
20130270663 | ANTI-REFLECTIVE LAYER FOR BACKSIDE ILLUMINATED CMOS IMAGE SENSORS - A method of forming an image sensor device includes forming a light sensing region at a front surface of a silicon substrate and a patterned metal layer there over. Thereafter, the method includes depositing a metal oxide anti-reflection laminate on the first surface of the substrate. The metal oxide anti-reflection laminate includes one or more composite layers of thin metal oxides stacked over the photodiode. Each composite layer includes two or more metal oxide layers: one metal oxide is a high energy band gap metal oxide and another metal oxide is a high refractive index metal oxide. | 10-17-2013 |
20130307045 | Non-Volatile Memories and Methods of Fabrication Thereof - Non-volatile memories and methods of fabrication thereof are described. In one embodiment, a method of fabricating a semiconductor device includes forming an oxide layer over a semiconductor substrate, and exposing the oxide layer to a first nitridation step to form a first nitrogen rich region. The first nitrogen rich region is disposed adjacent an interface between the oxide layer and the semiconductor substrate. After the first nitridation step, the oxide layer is exposed to a second nitridation step to form a second nitrogen rich region. A first gate electrode is formed on the oxide layer, wherein the second nitrogen rich region is disposed adjacent an interface between the oxide layer and the first gate electrode. | 11-21-2013 |
20140048893 | MAGNETORESISTIVE RANDOM ACCESS MEMORY CELL AND FABRICATING THE SAME - The present disclosure provides a semiconductor memory device. The device includes a pinning layer having an anti-ferromagnetic material and disposed over a first electrode; a pinned layer disposed over the pinning layer; a tunneling layer disposed over the pinned layer, a free layer disposed over the tunneling layer and a capping layer disposed over the free layer. The capping layer includes metal-oxide and metal-nitride materials. | 02-20-2014 |
20140291745 | Deposited Material and Method of Formation - A system and method for manufacturing a semiconductor device is provided. An embodiment comprises forming a deposited layer using an atomic layer deposition (ALD) process. The ALD process may utilize a first precursor for a first time period, a first purge for a second time period longer than the first time period, a second precursor for a third time period longer than the first time period, and a second purge for a fourth time period longer than the third time period. | 10-02-2014 |
20150034957 | NORMALLY-OFF ENHANCEMENT-MODE MISFET - The present disclosure relates to an enhancement mode MISFET device. In some embodiments, the MISFET device has an electron supply layer located on top of a layer of semiconductor material. A multi-dielectric layer, having two or more stacked dielectric materials sharing an interface having negative fixed charges, is disposed above the electron supply layer. A metal gate structure is disposed above the multi-dielectric layer, such that the metal gate structure is separated from the electron supply layer by the multi-dielectric layer. The multi-dielectric layer provides fixed charges at interfaces between the separate dielectric materials, which cause the transistor device to achieve a normally off disposition. | 02-05-2015 |
20150060774 | IMAGE SENSORS WITH ORGANIC PHOTODIODES AND METHODS FOR FORMING THE SAME - Embodiments of forming an image sensor with organic photodiodes are provided. Trenches are formed in the organic photodiodes to increase the PN-junction interfacial area, which improves the quantum efficiency (QE) of the photodiodes. The organic P-type material is applied in liquid form to fill the trenches. A mixture of P-type materials with different work function values and thickness can be used to meet the desired work function value for the photodiodes. | 03-05-2015 |
20150060775 | ORGANIC PHOTO DIODE WITH DUAL ELECTRON BLOCKING LAYERS - Embodiments of forming an image sensor with an organic photodiode are provided. The organic photodiode uses dual electron-blocking layers formed next to the anode of the organic photodiode to reduce dark current. By using dual electron-blocking layers, the values of highest occupied molecular orbital (HOMO) for the neighboring anode layer and the organic electron-blocking layer are matched by one of the dual electron-blocking layers to form a photodiode with good performance. The values of the lowest occupied molecular orbital (LOMOs) of the dual electron-blocking layers are selected to be lower than the neighboring anode layer to reduce dark current. | 03-05-2015 |
20150060861 | GaN Misfets with Hybrid AI203 As Gate Dielectric - Some embodiments of the present disclosure relates to a hybrid gate dielectric layer that has good interface and bulk dielectric properties. Surface traps can degrade device performance and cause large threshold voltage shifts in III-N HEMTs. This disclosure uses a hybrid ALD (atomic layer deposited)-oxide layer which is a combination of H2O-based and O3/O2-based oxide layers that provide both good interface and good bulk dielectric properties to the III-N device. The H2O-based oxide layer provides good interface with the III-N surface, whereas the O3/O2-based oxide layer provides good bulk properties. | 03-05-2015 |
20150060873 | Crystalline Layer for Passivation of III-N Surface - Some embodiments of the present disclosure relates to a crystalline passivation layer for effectively passivating III-N surfaces. Surface passivation of HEMTs reduces or eliminates the surface effects that can otherwise degrade device performance. The crystalline passivation layer reduces the degrading effects of surface traps and provides a good interface between a III-nitride surface and an insulator (e.g., gate dielectric formed over the passivation layer). | 03-05-2015 |
20150187864 | METAL-INSULATOR-METAL (MIM) CAPACITOR TECHNIQUES - Some embodiments relate to a metal-insulator-metal (MIM) capacitor. The MIM capacitor includes a capacitor bottom metal (CBM) electrode, a high-k dielectric layer arranged over the CBM electrode, and a capacitor top metal (CTM) electrode arranged over the high-k dielectric layer. A capping layer is arranged over the CTM electrode. A lower surface of the capping layer and an upper surface of the CTM electrode meet at an interface. Protective sidewalls are adjacent to outer sidewalls of the CTM electrode. The protective sidewalls have upper surfaces at least substantially aligned to the interface at which the upper surface of the CTM electrode meets the lower surface of the capping layer. | 07-02-2015 |
20150236121 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A semiconductor device comprising a substrate, a channel layer over the substrate, an active layer over the channel layer and a laminate layer in contact with the active layer. The active layer has a band gap discontinuity with the channel layer. | 08-20-2015 |
20150243730 | MULTI-STEP METHOD OF FORMING A METAL FILM - The present disclosure relates to an integrated chip having a titanium nitride film that provides for a reduced leakage path, and an associated method of formation. In some embodiments, the integrated chip comprises a semiconductor substrate. A titanium nitride film is disposed over the semiconductor substrate. The titanium nitride film comprises a plurality of titanium nitride layers having grain boundaries abutting vertical column-like structures of titanium nitride. The grain boundaries are discontinuous between a top surface of the titanium nitride film and a bottom surface of the titanium nitride film. The discontinuity of the grain boundaries between the different titanium nitride layers reduces leakage paths through the titanium nitride film (e.g., and thereby can improve operation of a MIM capacitor having titanium nitride electrodes). | 08-27-2015 |
20150279922 | METHOD TO IMPROVE MIM DEVICE PERFORMANCE - The present disclosure relates to a method of forming a MIM capacitor using a post capacitor bottom metal treatment process to reduce a roughness of a top surface of a capacitor bottom metal layer, and an associated apparatus. In some embodiments, the method is performed by forming a capacitor bottom metal layer having a first metal material over a semiconductor substrate. A top surface of the capacitor bottom metal layer is exposed to one or more post capacitor bottom metal (CBM) treatment agents having oxygen. The one or more post CBM treatment agent reduce a roughness of the top surface and form an interface layer having the first metal material and oxygen onto and in direct contract with the top surface of the capacitor bottom metal layer. A capacitor dielectric layer is formed over the interface layer and a capacitor top metal layer is formed over the capacitor dielectric layer. | 10-01-2015 |
20150287917 | HIGH YIELD RRAM CELL WITH OPTIMIZED FILM SCHEME - The present disclosure relates to a method of forming a resistive random access memory (RRAM) cell having a good yield, and an associated apparatus. In some embodiments, the method is performed by forming a bottom electrode over a lower metal interconnect layer, and forming a variable resistance dielectric data storage layer having a first thickness onto the bottom electrode. A capping layer is formed onto the dielectric data storage layer. The capping layer has a second thickness that is in a range of between approximately 2 to approximately 3 times thicker than the first thickness. A top electrode is formed over the capping layer, and an upper metal interconnect layer is formed over the top electrode. | 10-08-2015 |
20150287918 | RRAM CELL BOTTOM ELECTRODE FORMATION - The present disclosure relates to a method of forming a resistive random access memory (RRAM) cell having a reduced leakage current, and an associated apparatus. In some embodiments, the method is performed by forming a bottom electrode over a lower metal interconnect layer using an atomic layer deposition (ALD) process to form at least a top portion of the bottom electrode. A dielectric data storage layer is formed onto the top portion of the bottom electrode in-situ with forming the top portion of the bottom electrode. A top electrode is formed over the dielectric data storage layer, and an upper metal interconnect layer is formed over the top electrode. By forming the top portion of the bottom electrode using an ALD process that is in-situ with the formation of the overlying dielectric data storage layer, leakage current, leakage current distribution and device yield of the RRAM cell are improved. | 10-08-2015 |