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Cheng-Hui

Cheng-Hui Shen, Hukou Township TW

Patent application numberDescriptionPublished
20090230329ION IMPLANTATION METHOD - An ion implantation method is provided. The method, before ion implanting, is to rotate the substrate by an angle and shift the scan path of the ion beam with an interlace pitch in the direction perpendicular to the scan direction and on the plane of the substrate. Therefore a plurality of interlaced and not overlapped ion implantation scan lines are formed on the surface of the substrate, so the method can enhance the uniformity of the dose of the ion implantation in the substrate.09-17-2009

Cheng-Hui Shen, Hsinchu County TW

Patent application numberDescriptionPublished
20090194704METHOD AND DEVICE OF ION SOURCE GENERATION - An implanter is equipped with an ion beam current detector, a temperature sensor, a temperature controller and a cooling system to increase the ratio of a specific ion cluster in the ion source chamber of the implanter. Therefore, the implanting efficiency for a shallow ion implantation is increased consequently.08-06-2009

Cheng-Hui Wu, Taipei TW

Patent application numberDescriptionPublished
20110164345METAL-INSULATOR-METAL CAPACITOR AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a metal-insulator-metal capacitor, which includes: a substrate, a copper-based bottom electrode overlying the substrate, wherein the copper based bottom electrode is doped with rhenium nitride or ruthenium nitride, a top electrode overlying the copper based bottom electrode, and a capacitor insulator between and adjoining the copper based bottom electrode and the top electrode.07-07-2011

Cheng-Hui Yang, Hsinchu City TW

Patent application numberDescriptionPublished
20090240868MANAGEMENT METHOD, MANAGEMENT APPARATUS, AND CONTROLLER FOR MEMORY DATA ACCESS - A management method, a management apparatus, and a controller for memory data access are provided. The management apparatus is disposed between a host and a device for managing the data transmitted between the host and the device, wherein the management apparatus includes a control unit and a storage unit. When the control unit receives a data writing command from the host, it searches for a set mapped to the data in the storage unit and updates the data in the set. Then, the control unit collects the other parts of the data in the storage unit and the device, integrates all parts of the data, and writes the integrated data into the device. Accordingly, the efficiency in data transmission can be improved, and the number of data writing operations can be reduced so that the lifespan of the device can be prolonged.09-24-2009