| Patent application number | Description | Published |
|---|
| 20080265419 | SEMICONDUCTOR STRUCTURE COMPRISING AN ELECTRICALLY CONDUCTIVE FEATURE AND METHOD OF FORMING THE SAME - A method of forming a semiconductor structure comprises providing a semiconductor substrate comprising a layer of a dielectric material. A recess is provided in the layer of dielectric material. A first glue layer and a second glue layer are formed over the recess. The first glue layer comprises titanium and the second glue layer comprises tungsten nitride. The recess is filled with a material comprising tungsten. | 10-30-2008 |
| 20090001526 | TECHNIQUE FOR FORMING AN INTERLAYER DIELECTRIC MATERIAL OF INCREASED RELIABILITY ABOVE A STRUCTURE INCLUDING CLOSELY SPACED LINES - By removing excess material of an interlayer dielectric material deposited by SACVD, the gap filling capabilities of this deposition technique may be exploited, while, on the other hand, negative effects of this material may be reduced. In other aspects, a buffer material, such as silicon dioxide, may be formed prior to depositing the interlayer dielectric material on the basis of SACVD, thereby creating enhanced uniformity during the deposition process when depositing the interlayer dielectric material on dielectric layers having different high intrinsic stress levels. Consequently, the reliability of the interlayer dielectric material may be enhanced while nevertheless maintaining the advantages provided by an SACVD deposition. | 01-01-2009 |
| 20090061645 | SEMICONDUCTOR DEVICE INCLUDING FIELD EFFECT TRANSISTORS LATERALLY ENCLOSED BY INTERLAYER DIELECTRIC MATERIAL HAVING INCREASED INTRINSIC STRESS - By appropriately treating an interlayer dielectric material above P-channel transistors, the compressive stress may be significantly enhanced, which may be accomplished by expanding the interlayer dielectric material, for instance, by providing a certain amount of oxidizable species and performing an oxidation process. | 03-05-2009 |
| 20090085030 | INCREASED RELIABILITY FOR A CONTACT STRUCTURE TO CONNECT AN ACTIVE REGION WITH A POLYSILICON LINE - By forming a direct contact structure connecting, for instance, a polysilicon line with an active region on the basis of an increased amount of metal silicide by removing the sidewall spacers prior to the silicidation process, a significantly increased etch selectivity may be achieved during the contact etch stop layer opening. Hence, undue etching of the highly doped silicon material of the active region would be suppressed. Additionally or alternatively, an appropriately designed test structure is disclosed, which may enable the detection of electrical characteristics of contact structures formed in accordance with a specified manufacturing sequence and on the basis of specific design criteria. | 04-02-2009 |
| 20090085145 | SEMICONDUCTOR STRUCTURE COMPRISING AN ELECTRICALLY CONDUCTIVE FEATURE AND METHOD OF FORMING A SEMICONDUCTOR STRUCTURE - A semiconductor structure comprises a semiconductor substrate. A layer of an electrically insulating material is formed over the semiconductor substrate. An electrically conductive feature is formed in the layer of electrically insulating material. A first layer of a semiconductor material is formed between the electrically conductive feature and the layer of electrically insulating material. | 04-02-2009 |
| 20090087999 | TECHNIQUE FOR COMPENSATING FOR A DIFFERENCE IN DEPOSITION BEHAVIOR IN AN INTERLAYER DIELECTRIC MATERIAL - By selectively providing a buffer layer having an appropriate thickness, height differences occurring during the deposition of an SACVD silicon dioxide may be reduced during the formation of an interlayer dielectric stack of advanced semiconductor devices. The buffer material may be selectively provided after the deposition of contact etch stop layers of both types of internal stress or may be provided after the deposition of one type of dielectric material and may be used during the subsequent patterning of the other type of dielectric stop material as an efficient etch stop layer. | 04-02-2009 |
| 20090108462 | DUAL INTEGRATION SCHEME FOR LOW RESISTANCE METAL LAYERS - By forming a metal line extending through the entire interlayer dielectric material in resistance sensitive metallization layers, enhanced uniformity of these metallization layers may be obtained. The patterning of respective via openings may be accomplished on the basis of a recess formed in a cap layer, which additionally acts as an efficient etch stop layer during the patterning of the trenches, which extend through the entire interlayer dielectric material. Consequently, for a given design width of metal lines in resistance sensitive metallization layers, a maximum cross-sectional area may be obtained for the metal line with a high degree of process uniformity irrespective of a variation of the via density. | 04-30-2009 |
| 20100285668 | TECHNIQUE FOR COMPENSATING FOR A DIFFERENCE IN DEPOSITION BEHAVIOR IN AN INTERLAYER DIELECTRIC MATERIAL - By selectively providing a buffer layer having an appropriate thickness, height differences occurring during the deposition of an SACVD silicon dioxide may be reduced during the formation of an interlayer dielectric stack of advanced semiconductor devices. The buffer material may be selectively provided after the deposition of contact etch stop layers of both types of internal stress or may be provided after the deposition of one type of dielectric material and may be used during the subsequent patterning of the other type of dielectric stop material as an efficient etch stop layer. | 11-11-2010 |
| 20110117723 | NANO IMPRINT TECHNIQUE WITH INCREASED FLEXIBILITY WITH RESPECT TO ALIGNMENT AND FEATURE SHAPING - By forming metallization structures on the basis of an imprint technique, in which via openings and trenches may be commonly formed, a significant reduction of process complexity may be achieved due to the omission of at least one further alignment process as required in conventional process techniques. Furthermore, the flexibility and efficiency of imprint lithography may be increased by providing appropriately designed imprint molds in order to provide via openings and trenches exhibiting an increased fill capability, thereby also improving the performance of the finally obtained metallization structures with respect to reliability, resistance against electromigration and the like. | 05-19-2011 |
