Patent application number | Description | Published |
20080237611 | ELECTROLUMINESCENT DEVICE HAVING IMPROVED CONTRAST - A method for increasing ambient light contrast ratio within an electroluminescent device, including: a reflective electrode and a transparent electrode having an EL unit formed there-between. The EL unit includes a light-emitting layer containing quantum dots. Additionally, the method includes locating a contrast enhancement element on a side of the transparent electrode opposite the EL unit. The contrast enhancement element includes a patterned reflective layer and a patterned light-absorbing layer whose patterns define one or more transparent openings, so that light emitted by the light-emitting layer passes through the one or more transparent openings. The patterned reflective layer is located between the patterned light absorbing layer and the transparent electrode. | 10-02-2008 |
20090081842 | PROCESS FOR ATOMIC LAYER DEPOSITION - The present invention relates to a process of making thin film electronic components and devices, such as thin film transistors, environmental barrier layers, capacitors, insulators and bus lines, where most or all of the layers are made by an atmospheric atomic layer deposition process. | 03-26-2009 |
20090130397 | Multicolor mask - The invention relates to a process for forming a stacked transparent structure comprising providing a support, coating one side of said support with a multicolored mask, coating the other side of the support with a layer curable by visible light, and exposing the light-curable layer through the mask with visible light to cure the layer curable by light in exposed portions to form a cured pattern. | 05-21-2009 |
20090130610 | Integrated color mask - The invention relates to a process for forming a structure comprising providing a support, coating one side of said support with a colored mask, coating a layer photopatternable by visible light, and exposing the layer through the colored mask with visible light to photopattern the layer. | 05-21-2009 |
20090190095 | 2D/3D SWITCHABLE COLOR DISPLAY APPARATUS - A 2D/3D switchable display system having a selector for selecting a two-dimensional (2D) or a three-dimensional (3D) image processing path; a first processor for processing image data through the two-dimensional image processing path; a second processor, independent of the first processor, for processing image data through the three dimensional image processing path; a first set of at least three emitters having corresponding first wavelengths; a second set of at least three emitters having corresponding second wavelengths; and a controller that during a 2D operation activates both first and second sets of emitters to present a single image, while during a 3D operation activates the first set of emitters to present a first image having one half of stereo image information and activates the second set of emitters to present a second image having a second half of stereo image information. | 07-30-2009 |
20100277522 | PRINTHEAD CONFIGURATION TO CONTROL JET DIRECTIONALITY - A method of printing and an apparatus for controlling the directionality of liquid emitted from nozzles of a printhead are provided. Example embodiments of the apparatus include directionality control of liquid jets or liquid drops using a liquid jet directionality control mechanism. Example embodiments of the liquid jet directionality control mechanism include asymmetric energy application device configurations, nozzle geometry configurations, liquid delivery channel geometry configurations, or combinations of these configurations. | 11-04-2010 |
20100277529 | JET DIRECTIONALITY CONTROL USING PRINTHEAD NOZZLE - A method of printing and an apparatus for controlling the directionality of liquid emitted from nozzles of a printhead are provided. Example embodiments of the apparatus include directionality control of liquid jets or liquid drops using a liquid jet directionality control mechanism. Example embodiments of the liquid jet directionality control mechanism include asymmetric energy application device configurations, nozzle geometry configurations, liquid delivery channel geometry configurations, or combinations of these configurations. | 11-04-2010 |
20100277552 | JET DIRECTIONALITY CONTROL USING PRINTHEAD DELIVERY CHANNEL - A method of printing and an apparatus for controlling the directionality of liquid emitted from nozzles of a printhead are provided. Example embodiments of the apparatus include directionality control of liquid jets or liquid drops using a liquid jet directionality control mechanism. Example embodiments of the liquid jet directionality control mechanism include asymmetric energy application device configurations, nozzle geometry configurations, liquid delivery channel geometry configurations, or combinations of these configurations. | 11-04-2010 |
20100328407 | FLOW THROUGH DROP DISPENSER INCLUDING POROUS MEMBER - A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel. | 12-30-2010 |
20110240099 | PHOTOVOLTAIC NANOWIRE DEVICE - Method of making a semiconductor nanowire photovoltaic device includes providing a plurality of spaced photovoltaic semiconductor nanowires on a growth substrate; applying dielectric material so that it is disposed between the semiconductor nanowires producing a layer of embedded semiconductor nanowires having a top surface opposed to a bottom surface, the bottom surface being defined by the interface with the growth substrate; depositing a first electrode over the top surface of the layer of embedded semiconductor nanowires in electrical contact with the nanowires; joining the first electrode to a device substrate; removing the growth substrate and exposing the bottom surface; depositing a second electrode on the bottom surface so that it is in electrical contact with the semiconductor nanowires; and wherein either the first or second electrode is transparent to permit light to be transmitted through the transparent electrode and be absorbed by the photovoltaic semiconductor nanowires. | 10-06-2011 |
20110240953 | INTEGRATED SEMICONDUCTOR NANOWIRE DEVICE - A method of making a semiconductor nanowire device includes providing a plurality of spaced semiconductor nanowires on a growth substrate; applying a dielectric material so that it is disposed between the semiconductor nanowires producing a layer of embedded semiconductor nanowires having a top surface opposed to a bottom surface, wherein the bottom surface is defined by the interface with the growth substrate; depositing a first electrode over the top surface of the layer of embedded semiconductor nanowires so that it is in electrical contact with the semiconductor nanowires; joining the first electrode to a device substrate; removing the growth substrate and exposing the bottom surface of the layer of embedded semiconductor nanowires; and depositing a second electrode on the bottom surface of the layer of embedded semiconductor nanowires so that it is in electrical contact with the semiconductor nanowires. | 10-06-2011 |
20110285705 | 2D/3D SWITCHABLE COLOR DISPLAY APPARATUS WITH NARROW BAND EMITTERS - A 2D/3D switchable display system having a selector for selecting a two-dimensional (2D) or a three-dimensional (3D) image processing path; a first processor for processing image data through the two-dimensional image processing path; a second processor, independent of the first processor, for processing image data through the three dimensional image processing path; a first set of at least three emitters having corresponding first wavelengths; a second set of at least three emitters having corresponding second wavelengths; and a controller that during a 2D operation activates both first and second sets of emitters to present a single image, while during a 3D operation activates the first set of emitters to present a first image having one half of stereo image information and activates the second set of emitters to present a second image having a second half of stereo image information. | 11-24-2011 |
20110285962 | 2D/3D SWITCHABLE COLOR DISPLAY APPARATUS WITH NARROW BAND EMITTERS - A 2D/3D switchable display system having a selector for selecting a two-dimensional (2D) or a three-dimensional (3D) image processing path; a first processor for processing image data through the two-dimensional image processing path; a second processor, independent of the first processor, for processing image data through the three dimensional image processing path; a first set of at least three emitters having corresponding first wavelengths; a second set of at least three emitters having corresponding second wavelengths; and a controller that during a 2D operation activates both first and second sets of emitters to present a single image, while during a 3D operation activates the first set of emitters to present a first image having one half of stereo image information and activates the second set of emitters to present a second image having a second half of stereo image information. | 11-24-2011 |
20120098887 | LIQUID DISPENSER INCLUDING SLOPED OUTLET OPENING WALL - A liquid dispenser includes a liquid supply channel, a liquid return channel; and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel. | 04-26-2012 |
20120098890 | DISPENSING LIQUID USING DISPENSER INCLUDING SECONDARY MANIFOLD - A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate is provided. Each liquid dispensing element includes a liquid dispensing channel positioned on the substrate. The liquid dispensing channel includes an outlet opening positioned on a wall opposite the substrate. A diverter member is associated with the liquid dispensing channel. A liquid return channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply passage extends through the substrate and is in fluid communication with the liquid supply channel. A liquid return passage extends through the substrate and is in fluid communication with the liquid return channel. A liquid manifold is provided that includes a liquid supply duct and a liquid return duct. The liquid supply duct is in fluid communication with each liquid supply passage of each liquid dispensing element. The liquid return duct is in fluid communication with each liquid return passage of each liquid dispensing element. A liquid flows from the liquid supply duct of the liquid manifold through each liquid dispensing element to the liquid return duct of the liquid manifold. A liquid drop is ejected from the outlet opening of the liquid dispensing channel of one of the liquid dispensing elements by selectively actuating the diverter member of the liquid dispensing element to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel of the liquid dispensing element. | 04-26-2012 |
20120098891 | DISPENSING LIQUID USING CURVED VENT DISPENSER - A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. Another portion of the wall defines a drain located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel. | 04-26-2012 |
20120098892 | DISPENSING LIQUID USING SLOPED OUTLET OPENING DISPENSER - A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel. | 04-26-2012 |
20120098907 | LIQUID DISPENSER INCLUDING CURVED VENT - A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel. | 04-26-2012 |
20120098908 | LIQUID DISPENSER INCLUDING SECONDARY LIQUID MANIFOLD - A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate. Each liquid dispensing element includes a liquid dispensing channel positioned on the substrate. The liquid dispensing channel includes an outlet opening positioned on a wall opposite the substrate. A diverter member is associated with the liquid dispensing channel. A liquid return channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply passage extends through the substrate and is in fluid communication with the liquid supply channel. A liquid return passage extends through the substrate and is in fluid communication with the liquid return channel. A liquid manifold includes a liquid supply duct and a liquid return duct. The liquid supply duct is in fluid communication with each liquid supply passage of each liquid dispensing element. The liquid return duct is in fluid communication with each liquid return passage of each liquid dispensing element. A liquid supply provides liquid that flows from the liquid supply duct of the liquid manifold through each liquid dispensing element to the liquid return duct of the liquid manifold. Each diverter member is selectively activated to divert a portion of the liquid flowing through the associated liquid dispensing channel through the outlet opening of the associated liquid dispensing channel to dispense a drop of the liquid. | 04-26-2012 |
20120120163 | MULTIPLE RESOLUTION CONTINUOUS INK JET SYSTEM - A continuous ink jet printing system capable of printing at multiple predetermined print resolutions. The system comprises a drop generator having an array of nozzles for emitting a plurality of continuous streams of liquid for applying ink to media driven in a media advance direction having a source for pressurized liquid for supplying pressurized liquid to the plurality of nozzles. The plurality of nozzles have effective nozzle diameters D | 05-17-2012 |
20120231239 | INTEGRATED COLOR MASK - The invention relates to a process for forming a structure comprising providing a support, coating one side of said support with a colored mask, coating a layer photopatternable by visible light, and exposing the layer through the colored mask with visible light to photopattern the layer. | 09-13-2012 |
20120249690 | FLOW THROUGH DROP DISPENSER INCLUDING POROUS MEMBER - A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel. | 10-04-2012 |
20120268527 | FLOW-THROUGH EJECTION SYSTEM INCLUDING COMPLIANT MEMBRANE TRANSDUCER - A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. | 10-25-2012 |
20120268528 | FLOW-THROUGH LIQUID EJECTION USING COMPLIANT MEMBRANE TRANSDUCER - A method of ejecting liquid includes providing a liquid dispenser including a substrate and a diverter member. A first portion of the substrate defines a liquid dispensing channel including an outlet opening and a second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel when drop ejection is desired. | 10-25-2012 |
20130257991 | FUNCTIONAL LIQUID DEPOSITION USING CONTINUOUS LIQUID DISPENSER - A method of dispensing liquid includes providing a carrier liquid under pressure using a first liquid supply that flows from the first liquid supply through a first liquid supply channel through a liquid dispensing channel through a liquid return channel and back to the first liquid supply continuously during a drop dispensing operation. A functional liquid is provided to the liquid dispensing channel through a second liquid supply channel using a second liquid supply. A drop formation device is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. The functional liquid is immiscible in the carrier liquid. The drop ejection device is selectively actuated to divert the discrete drop of the functional liquid and a portion of the carrier liquid flowing through the liquid dispensing channel toward an outlet opening of the liquid dispensing channel. | 10-03-2013 |
20130257994 | FUNCTIONAL LIQUID DEPOSITION USING CONTINUOUS LIQUID - A liquid dispenser includes a first liquid supply that provides a carrier liquid under pressure that flows from the first liquid supply through a first liquid supply channel through a liquid dispensing channel through a liquid return channel and back to the first liquid supply continuously during a drop dispensing operation. A second liquid supply provides a functional liquid to the liquid dispensing channel through a second liquid supply channel. A drop formation device, associated with an interface of the second liquid supply channel and the liquid dispensing channel, is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. The functional liquid is immiscible in the carrier liquid. A drop ejection device is selectively actuated to divert the discrete drop of the functional liquid and a portion of the carrier liquid flowing through the liquid dispensing channel toward the outlet opening of the liquid dispensing channel. | 10-03-2013 |
20130257996 | DIGITAL DROP PATTERNING DEVICE AND METHOD - A liquid dispenser array structure includes a liquid dispensing channel. A first liquid supply provides a carrier liquid that flows continuously through an outlet of the liquid dispensing channel during a drop dispensing operation. A plurality of liquid dispensers, located on a common substrate, includes a liquid supply channel and a second liquid supply that provides a functional liquid, immiscible in the carrier liquid, to the liquid dispensing channel through the liquid supply channel. A drop formation device, associated with an interface of the liquid supply channel and the liquid dispensing channel, is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. | 10-03-2013 |
20130257997 | DIGITAL DROP PATTERNING DEVICE AND METHOD - A liquid dispensing system includes a liquid dispenser array structure. A first liquid supply provides a carrier liquid that flows continuously through an outlet of a liquid dispensing channel during a drop dispensing operation. A plurality of liquid dispensers, located on a common substrate, includes a second liquid supply that provides a functional liquid, immiscible in the carrier liquid, to the liquid dispensing channel through a liquid supply channel. A drop formation device, associated with an interface of the liquid supply channel and the liquid dispensing channel, is selectively actuated to form discrete drops of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. A receiver conveyance mechanism and the liquid dispenser array structure are positioned relative to each other such that the discrete drops of the functional liquid are applied to a receiver. | 10-03-2013 |
20130258002 | DIGITAL DROP PATTERNING DEVICE AND METHOD - A method of dispensing liquid drops includes providing a liquid dispenser array structure. Liquid dispensers, located on a common substrate, include a liquid supply channel and a drop formation device associated with an interface of a liquid dispensing channel and the liquid supply channel. A carrier liquid is provided by a first liquid supply that flows continuously through an outlet of the liquid dispensing channel during a drop dispensing operation. A functional liquid, immiscible in the carrier liquid, is provided by a second liquid supply to the liquid dispensing channel through the liquid supply channel. The drop formation device is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. The flowing carrier liquid causes the discrete drops of the functional liquid to move through the outlet of the liquid dispensing channel during the drop dispensing operation. | 10-03-2013 |
20140061648 | THIN FILM TRANSISTOR INCLUDING DIELECTRIC STACK - A transistor includes a substrate; a gate including a first electrically conductive layer stack on the substrate; and a first inorganic thin film dielectric layer on the substrate with the first inorganic thin film dielectric layer having a first pattern. A second inorganic thin film dielectric layer, having a second pattern, is in contact with the first inorganic thin film dielectric layer. The first inorganic thin film dielectric layer and the second thin film dielectric layer have the same material composition. A semiconductor layer has a third pattern. A source/drain includes a second electrically conductive layer stack. | 03-06-2014 |
20140061649 | HIGH PERFORMANCE THIN FILM TRANSISTOR - A transistor includes a substrate; a gate including a first electrically conductive layer stack on the substrate; and a first inorganic thin film dielectric layer on the substrate with the first inorganic thin film dielectric layer having a first pattern. A second inorganic thin film dielectric layer, having a second pattern, is in contact with the first inorganic thin film dielectric layer. The first inorganic thin film dielectric layer and the second thin film dielectric layer have the same material composition. A third inorganic thin film dielectric layer has a third pattern. A semiconductor layer is in contact with and has the same pattern as the third inorganic thin film dielectric material layer. A source/drain includes a second electrically conductive layer stack. | 03-06-2014 |
20140061795 | THIN FILM TRANSISTOR INCLUDING IMPROVED SEMICONDUCTOR INTERFACE - A transistor includes a substrate; a gate including a first electrically conductive layer stack on the substrate; and a first inorganic thin film dielectric layer on the substrate with the first inorganic thin film dielectric layer having a first pattern. A second inorganic thin film dielectric layer has a second pattern. A semiconductor layer is in contact with and has the same pattern as the second inorganic thin film dielectric material layer. A source/drain includes a second electrically conductive layer stack. | 03-06-2014 |
20140061869 | ELECTRONIC ELEMENT INCLUDING DIELECTRIC STACK - An electronic element includes a substrate; a patterned first electrically conductive layer on the substrate; a patterned second electrically conductive layer on the substrate; and a dielectric stack on the substrate. A portion of the first electrically conductive layer and a portion of the second electrically conductive layer overlap each other such that an overlap region is present. At least a portion of the dielectric stack is positioned in the overlap region between the patterned first electrically conductive layer and the patterned second electrically conductive layer. The dielectric stack includes a first inorganic thin film dielectric material layer and a second inorganic thin film dielectric material layer. The first inorganic thin film dielectric material layer and the second inorganic thin film dielectric material layer have the same material composition. | 03-06-2014 |
20140065803 | PATTERNED THIN FILM DIELECTRIC STACK FORMATION - A method of producing an inorganic multi-layered thin film structure includes providing a substrate. A patterned deposition inhibiting material layer is provided on the substrate. A first inorganic thin film material layer is selectively deposited on a region of the substrate where the deposition inhibiting material layer is not present using an atomic layer deposition process. A second inorganic thin film material layer is selectively deposited on the region of the substrate where the thin film deposition inhibiting material layer is not present using an atomic layer deposition process. | 03-06-2014 |
20140065830 | PATTERNED THIN FILM DIELECTRIC STACK FORMATION - A method of producing a patterned inorganic thin film dielectric stack includes providing a substrate. A first patterned deposition inhibiting material layer is provided on the substrate. A first inorganic thin film dielectric material layer is selectively deposited on a region of the substrate where the first deposition inhibiting material layer is not present using an atomic layer deposition process. The first deposition inhibiting and first inorganic thin film dielectric material layers are simultaneously treated after deposition of the first inorganic thin film dielectric material layer. A second patterned deposition inhibiting material layer is provided on the substrate. A second inorganic thin film dielectric material layer is selectively deposited on a region of the substrate where the second deposition inhibiting material layer is not present using an atomic layer deposition process. The first and second inorganic thin film dielectric material layers form a patterned inorganic thin film dielectric stack. | 03-06-2014 |
20140065831 | PATTERNED THIN FILM DIELECTRIC LAYER FORMATION - A method of producing an inorganic thin film dielectric material layer includes providing a substrate. A first inorganic thin film dielectric material layer is deposited on the substrate using an atomic layer deposition process. The first inorganic thin film dielectric material layer is treated after its deposition. A patterned deposition inhibiting material layer is provided on the substrate. A second inorganic thin film dielectric material layer is selectively deposited on a region of the substrate where the deposition inhibiting material layer is not present using an atomic layer deposition process. | 03-06-2014 |
20140065838 | THIN FILM DIELECTRIC LAYER FORMATION - A method of producing an inorganic thin film dielectric material layer includes providing a substrate. A first inorganic thin film dielectric material layer is deposited on the substrate using an atomic layer deposition process. The first inorganic thin film dielectric material layer is treated after its deposition. A second inorganic thin film dielectric material layer is deposited on the treated surface of the first inorganic thin film dielectric material layer using an atomic layer deposition process. | 03-06-2014 |
20140306301 | SILICON SUBSTRATE MEMS DEVICE - A MEMS device includes a silicon substrate. The silicon substrate includes a plurality of dielectric material grooves spaced apart from each other. The silicon substrate also includes a through hole with a portion of the through hole being located between the plurality of dielectric material grooves when viewed from a direction perpendicular to a surface of the silicon substrate. | 10-16-2014 |
20140308765 | SILICON SUBSTRATE FABRICATION - A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves. | 10-16-2014 |
20140377955 | SUBSTRATE PREPARATION FOR SELECTIVE AREA DEPOSITION - A method of producing a patterned inorganic thin film element includes providing a substrate having a patterned thin layer of polymeric inhibitor on the surface. The substrate and the patterned thin layer of polymeric inhibitor are exposed to a highly reactive oxygen process. An inorganic thin film layer is deposited on the substrate in areas without inhibitor using an atomic layer deposition process. | 12-25-2014 |
20140377963 | PATTERNING FOR SELECTIVE AREA DEPOSITION - A method of producing a patterned inorganic thin film element includes providing a substrate. A thin layer of polymeric inhibitor is uniformly depositing on the substrate. A patterned mask having open areas is provided on the thin layer of polymeric inhibitor. The thin layer of polymeric inhibitor is patterned by removing inhibitor from areas exposed by the open areas of the patterned mask using a highly reactive oxygen process. An inorganic thin film layer is deposited on the substrate in the areas exposed by the removal of the thin layer of polymeric inhibitor using an atomic layer deposition process. | 12-25-2014 |