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Bussink
Peter Gerhardus Wilhelmu Bussink, 'S-Gravenhage NL
| Patent application number | Description | Published |
|---|---|---|
| 20110090495 | LITHOGRAPHIC APPARATUS AND CONTAMINATION DETECTION METHOD - A lithographic apparatus includes a vessel that encloses a component with a test surface to be probed for contamination control; and an optical probe configured to transmit and receive an optical probing beam. The vessel includes a first optical port configured to transfer the optical probing beam towards the test surface, and a second optical port configured to receive a reflected optical probing beam. The optical probe includes a light source configured to provide the optical probing beam, a polarization conditioner configured to provide a predefined polarization state to the probing beam, and a spectral analyzer. The polarization conditioner is preset to provide a minimal transmission for a minimal transmission wavelength, and the spectral analyzer is arranged to detect a wavelength shift of the minimal transmission wavelength in response to a polarization change due to the presence of contamination. | 04-21-2011 |
Peter Gerhardus Wilhelmus Bussink, 'S-Gravenhage NL
| Patent application number | Description | Published |
|---|---|---|
| 20100265484 | LITHOGRAPHIC APPARATUS, METHOD FOR LEVELLING AN OBJECT, AND LITHOGRAPHIC PROJECTION METHOD - A lithographic apparatus configured to project a patterned radiation beam onto a substrate. The apparatus includes a support configured to hold a patterned object, and a measurement system configured to detect orientations and/or densities of user area structures that are present on a user area of the patterned object. | 10-21-2010 |
Ronald Alexander Bussink, Zug CH
| Patent application number | Description | Published |
|---|---|---|
| 20110207539 | OBSERVATION WHEEL TYPE RIDE - An observation wheel type ride includes a support structure, a wheel which is rotatable mounted in the support structure and/or includes transportation means movably supported on the wheel, and a drive mechanism. The drive mechanism includes a rotary drive and a drive cable, wherein a section of the drive cable is detachably fixed to a circumference of the wheel and/or to the transportation means for transmitting the rotary movement of the rotary drive to the wheel and/or to the transportation means. A deflection means deflects in a lateral direction with respect to the wheel that section of the drive cable, which is led over the rotary drive. | 08-25-2011 |