Patent application number | Description | Published |
20110050251 | Capacitive sensor and actuator - A capacitive sensor and a capacitive actuator having at least one seismic mass deflectably mounted on a substrate. A comb electrode having comb fingers is mounted on the seismic mass, and a comb electrode having comb fingers is mounted on the substrate in such a way that the comb fingers are situated parallel to a deflection direction of the seismic mass and interlock in a comb-like manner. The characteristic curve of the sensor or actuator is adjusted by optimizing the geometry of at least one comb electrode, in particular of at least one comb finger. | 03-03-2011 |
20110060543 | Method for self-adjustment of a triaxial acceleration sensor during operation, and sensor system having a three -dimentional acceleration sensor - A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution. | 03-10-2011 |
20110109327 | Sensor for capacitive detection of a mechanical deflection - A sensor for capacitive detection of a mechanical deflection includes a substrate having a first substrate electrode and a second substrate electrode; and a mass movable relative to the substrate. The mass is divided into: a first electrically separate region having a first ground electrode; and a second electrically separate region of the mass having a second ground electrode. At least one portion of the first ground electrode is situated in a first region between the first substrate electrode and the second substrate electrode, and forms a first differential capacitor. At least one portion of the second ground electrode is situated in a second region between the first substrate electrode and the second substrate electrode, and forms a second differential capacitor. | 05-12-2011 |
20110115501 | Measuring Device with a Micro-Electromechanical Capacitive Sensor - A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass. | 05-19-2011 |
20110140692 | Method for determining the sensitivity of an acceleration sensor or magnetic field sensor - A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages. | 06-16-2011 |
20120036915 | SENSOR SYSTEM AND METHOD FOR CALIBRATING A SENSOR SYSTEM - A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass. | 02-16-2012 |
20120189143 | Micromechanical Microphone Device and Method for Producing a Micromechanical Microphone Device - A micromechanical microphone device includes a membrane that is mounted in an elastically deflectable manner above a substrate and that has at least one gate electrode. The device further includes a source region and a drain region provided in or on the substrate with a channel region therebetween. The channel region is at least partly covered by the gate electrode and is spaced apart from the gate electrode by a gap. The membrane is deflectable under the influence of sound in such a way that the gap is variable. | 07-26-2012 |
Patent application number | Description | Published |
20120200326 | Method and Apparatus for Reducing Signal Edge Jitter in an Output Signal from a Numerically Controlled Oscillator - A method for reducing signal edge jitter in an output signal from a numerically controlled oscillator includes processing an input signal with a first accumulator to provide a first accumulator output signal and continuing to use a carry in the processing of the input signal with the first accumulator in the event of an overflow. The method further includes processing the input signal with a second accumulator to provide a second accumulator output signal and rejecting a carry in the processing of the input signal with the second accumulator in the event of an overflow. The method further includes outputting the second accumulator output signal at an output of the numerically controlled oscillator and synchronizing the second accumulator using the first accumulator output signal. | 08-09-2012 |
20130098154 | Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method - A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track. | 04-25-2013 |
20130110441 | Device and Method for Correcting a Sensor Signal | 05-02-2013 |
20130221411 | MICROMECHANICAL SENSOR APPARATUS WITH A MOVABLE GATE, AND CORRESPONDING PRODUCTION PROCESS - A micromechanical sensor apparatus has a movable gate and a field effect transistor. The field effect transistor has a drain region, a source region, an intermediate channel region with a first doping type, and a movable gate which is separated from the channel region by an intermediate space. The drain region, the source region, and the channel region are arranged in a substrate. A guard region is provided in the substrate at least on the longitudinal sides of the channel region and has a second doping type which is the same as the first doping type and has a higher doping concentration. | 08-29-2013 |
20140077272 | MICROMECHANICAL SENSOR DEVICE WITH MOVABLE GATE AND CORRESPONDING PRODUCTION METHOD - A micromechanical sensor device with a movable gate includes a field effect transistor having a drain region, a source region, a channel region arranged between the field effect transistor and the source region and including a first doping type, and a movable gate. The movable gate is separated from the channel region by an interspace. The drain region, the source region, and the channel region are arranged in a substrate. An oxide region is provided in the substrate at least at longitudinal sides of the channel region. | 03-20-2014 |
20140165725 | Analysis Circuit for Field Effect Transistors Having a Displaceable Gate Structure - An analysis circuit for a field effect transistor having a displaceable gate structure, includes a measurement circuit coupled between a supply voltage connection of the analysis circuit and a drain connection of the field effect transistor and configured to output a measurement signal that is dependent on the current strength of a current flowing through the field effect transistor to a measurement connection. | 06-19-2014 |
20140320326 | Method and Delta-Sigma Converter for a Sensor Signal, More Particularly a Signal of a Rotation Rate Sensor - A delta-sigma converter for a sensor signal is configured to emit a digital output signal using the sensor signal. The delta-sigma converter includes a control unit configured to generate a control signal on the basis of a frequency of signal level changes of the digital output signal. The delta-sigma converter further includes a digital compensation unit configured to emit a compensation signal using the digital output signal and the control signal. The delta-sigma converter is further configured to determine the digital output signal also using the compensation signal. | 10-30-2014 |
20140373595 | METHOD AND INERTIAL SENSOR UNIT FOR SELF-CALIBRATION OF A YAW RATE SENSOR - A method is provided for self-calibration of a yaw rate sensor of an inertial sensor unit, in particular of a micromechanical yaw rate sensor of a micromechanical inertial sensor unit, the inertial sensor unit including an acceleration sensor and the yaw rate sensor, the yaw rate sensor including a calibration arrangement and an evaluation arrangement, a yaw rate signal of the yaw rate sensor being supplied to the evaluation arrangement in a first method step, an output signal being generated as a function of the yaw rate signal, the output signal being supplied to the calibration arrangement, an acceleration signal of the acceleration sensor being supplied to the calibration arrangement of the yaw rate sensor in a second method step, a correction signal being generated by the calibration arrangement as a function of the acceleration signal and of the output signal in a third method step, the output signal being calibrated as a function of the correction signal. | 12-25-2014 |
20150073747 | Device and Method for Ascertaining a Suitable Position of a Sensor Device - A device for ascertaining a suitable position of a sensor device for detecting a measured variable includes: a detection device for detecting environmental data in a surrounding area of the sensor device; a computing unit for ascertaining the suitable position of the sensor device based on the detected environmental data and the measured variable; and an output device for displaying the ascertained suitable position of the sensor device. | 03-12-2015 |