Patent application number | Description | Published |
20080200099 | METHOD FOR MONITORING EDGE EXCLUSION DURING CHEMICAL MECHANICAL PLANARIZATION - A method is provided for measuring edge exclusion on a workpiece that includes a wafer having a film disposed thereon. The method is performed by a CMP system employing a platen and a thickness sensor coupled to the platen and positioned to repeatedly travel a path over the edge of the film during polishing. The method comprises measuring the thickness of the workpiece during selected iterations of the probe path, and establishing from the wafer thickness measurements the length of time the probe is over the film (t | 08-21-2008 |
20110214805 | Epitaxial Lift Off Systems and Methods - Epitaxial lift off systems and methods are presented. In one embodiment a tape is disposed on the opposite side of the epitaxial material than the substrate is used to hold the epitaxial material during the etching and removal steps of the ELO process. In various embodiments, the apparatus for removing the ELO film from the substrates without damaging the ELO film may include an etchant reservoir, substrate handling and tape handling mechanisms, including mechanisms to manipulate (e.g., cause tension, peel, widen the etch gap, etc.) the lift off component during the lift off process. | 09-08-2011 |
20120247685 | SYSTEM AND METHOD FOR IMPROVED EPITAXIAL LIFT OFF - An apparatus, system and method for performing ELO are disclosed. Device assemblies are contemporaneously etched in a stacked arrangement. Each device assembly may be placed in a respective tray, where the trays are overlapped and spaced apart from one another. In this manner, more device assemblies can be etched per unit area compared to conventional systems. Further, by stacking device assemblies during etching, the yield can be improved and/or the cost of the etch tank and associated hardware can be reduced. | 10-04-2012 |
20140158307 | SYSTEM AND METHOD FOR IMPROVED EPITAXIAL LIFT OFF - An apparatus, system and method for performing ELO are disclosed. Device assemblies are contemporaneously etched in a stacked arrangement. Each device assembly may be placed in a respective tray, where the trays are overlapped and spaced apart from one another. In this manner, more device assemblies can be etched per unit area compared to conventional systems. Further, by stacking device assemblies during etching, the yield can be improved and/or the cost of the etch tank and associated hardware can be reduced. | 06-12-2014 |
20140251547 | EPITAXIAL LIFT OFF SYSTEMS AND METHODS - Epitaxial lift off systems and methods are presented. In one embodiment a tape is disposed on the opposite side of the epitaxial material than the substrate is used to hold the epitaxial material during the etching and removal steps of the ELO process. In various embodiments, the apparatus for removing the ELO film from the substrates without damaging the ELO film may include an etchant reservoir, substrate handling and tape handling mechanisms, including mechanisms to manipulate (e.g., cause tension, peel, widen the etch gap, etc.) the lift off component during the lift off process. | 09-11-2014 |
Patent application number | Description | Published |
20080230092 | METHOD AND APPARATUS FOR SINGLE-SUBSTRATE CLEANING - A single-substrate cleaning apparatus and method of use are described. In an embodiment of the present invention, a liquid cleaning solution is dispensed in small volumes to form a substantially uniform static liquid layer over a substrate surface by atomizing the viscous liquid with an inert gas in a two-phase nozzle. In another embodiment of the present invention, after a layer of the cleaning solution is formed over the substrate to be cleaned, acoustic energy is applied to the substrate to improve the cleaning efficiency. In a further embodiment, cleaning solution precipitates are avoided by dispensing de-ionized water with a spray nozzle to gradually dilute the cleaning solution prior to dispensing de-ionized water with a stream nozzle. | 09-25-2008 |
20100120335 | Partial Contact Wafer Retaining Ring Apparatus - The partial contact wafer retaining ring apparatus is disclosed. For example, one disclosed embodiment provides a wafer retaining ring comprising a ring for retaining the wafer, the ring having an inner diameter surface configured to restrict lateral wafer motion, and at least one interface surface configured to interface with a polishing surface. The interface surface comprises a recessed section adjacent to the ring inner diameter, configured to preclude contact between the recessed section and the polishing surface. | 05-13-2010 |
20150027491 | DOUBLE SIDED BUFF MODULE FOR POST CMP CLEANING - A buff module and method for using the same are provided. In one embodiment, a buff module includes housing having an interior volume, a plurality of drive rollers and a pair of buff heads. The drive rollers are arranged to rotate a substrate within the interior volume on a substantially horizontal axis. The buff heads are disposed in the housing, each buff head rotatable on an axis substantially aligned with the horizontal axis and movable to a position substantially parallel with the horizontal axis. | 01-29-2015 |
20150090299 | PROCESSES AND APPARATUS FOR CLEANING, RINSING, AND DRYING SUBSTRATES - In some embodiments, a module is provided that is configured to clean, rinse and dry a substrate. The module includes (1) a tank having an upper tank region positioned above a lower tank region, the upper tank region having (a) an opening through which a substrate is removed from the tank; (b) a first fluid supply configured to supply a first fluid to a surface of a substrate being removed from the tank; and (c) a first suction mechanism, positioned below the first fluid supply, wherein the first suction mechanism is configured to suction fluid supplied from the first fluid supply so as to deter the suctioned fluid from reaching the lower tank region; and (2) a drying vapor supply positioned above the first fluid supply and configured to supply a drying vapor to a surface of a substrate being removed from the tank. Numerous other aspects are provided. | 04-02-2015 |
20150306637 | SYSTEMS, METHODS AND APPARATUS FOR POST-CHEMICAL MECHANICAL PLANARIZATION SUBSTRATE CLEANING - Embodiments of the invention include systems, methods and apparatus for pre-cleaning a substrate after chemical mechanical planarization processing. Embodiments provide a housing; a chuck assembly configured to securely hold a substrate within the housing; and a buffing pad assembly configured to rotate against the substrate while supported within the housing. The buffing pad assembly includes a buff pad, a compressible sub-pad coupled to the buff pad, and a pad holder coupled to the compressible sub-pad and a buffing motor configured to rotate the buffing pad assembly. Numerous additional aspects are disclosed. | 10-29-2015 |
Patent application number | Description | Published |
20100191342 | TOTAL KNEE IMPLANT - A knee prosthesis is provided for use in knee arthroplasty. In one exemplary embodiment, the present invention provides a tibial prosthesis having a tibial baseplate with a fixed medial bearing component and a mobile lateral bearing component. In one exemplary embodiment, the lateral bearing component is secured to the lateral portion of the tibial baseplate utilizing at least one prosthetic ligament. Additionally, in one exemplary embodiment, a stop is provided to limit anterior or posterior movement of the lateral bearing component relative to the tibial baseplate. For example, the stop may be defined by cooperating shoulders formed on the lateral bearing and the tibial baseplate. | 07-29-2010 |
20110020779 | SKILL EVALUATION USING SPHERICAL MOTION MECHANISM - Software tools, methods and apparatus for objectively assessing surgical and medical procedural skills are described. Data corresponding to performance of a manipulative task by a subject is modeled using Markov modeling techniques and compared with stored models corresponding to each of a plurality of proficiency levels. A particular proficiency level is selected based on proximity of the subject data relative to each of the stored models. | 01-27-2011 |
20110196815 | METHODS FOR MANUFACTURING, INVENTORYING, AND SUPPLYING MEDICAL COMPONENTS - The present invention relates to methods for the manufacturing, inventorying, and supplying of medical components. In one exemplary embodiment, the method includes fabricating individual subcomponents of a modular medical device system as finished goods. The finished subcomponents may then be sterilized, stocked, and inventoried and, upon request from a consumer, the individual subcomponents may be supplied to the consumer. For example, the consumer may be a hospital, a surgeon, or a sales representative. Once the individual subcomponents are received by the consumer, the individual subcomponents may then be assembled by the consumer to form a final, implantable medical device. | 08-11-2011 |
20110277776 | SURGICAL SYSTEM STERILE DRAPE - A sterile drape, a surgical system with the drape, and a draping method are provided. In one embodiment, a sterile drape includes a plurality of drape pockets, each of the drape pockets including an exterior surface to be adjacent a sterile field for performing a surgical procedure and an interior surface to be adjacent a non-sterile instrument manipulator coupled to a manipulator arm of a robotic surgical system. The drape further includes a plurality of flexible membranes at a distal face of each of the drape pockets for interfacing between outputs of an instrument manipulator and inputs of a respective surgical instrument, and a rotatable seal adapted to couple a proximal opening of each of the drape pockets to a rotatable element at a distal end of the manipulator arm. | 11-17-2011 |
20110282351 | SURGICAL SYSTEM ENTRY GUIDE - An entry guide tube and cannula assembly, a surgical system including the assembly, and a method of surgical instrument insertion are provided. In one embodiment, the assembly includes a cannula having a proximal portion that operably couples to an accessory clamp of a manipulator arm, and a distal tubular member coupled to the proximal portion, the tubular member having an opening for passage of at least one instrument shaft. The assembly also includes an entry guide tube rotatably coupled to the proximal portion of the cannula, the entry guide tube including a plurality of channels for passage of a plurality of instrument shafts, wherein the entry guide tube is rotatably driven relative to the proximal portion of the cannula by rotation of at least one instrument shaft about a longitudinal axis of the entry guide tube. | 11-17-2011 |
20110282357 | SURGICAL SYSTEM ARCHITECTURE - Robotic surgical systems are provided. In one embodiment, the system includes a setup link for locating a remote center of motion for the robotic surgical system; a manipulator arm assembly including an active proximal link and an active distal link, the proximal link operably coupled to the setup link; and a plurality of instrument manipulators operably coupled to a distal end of the distal link, the plurality of instrument manipulators rotatable about an instrument manipulator assembly roll axis. A cannula mount is movably coupled to a proximal end of the distal link, and a cannula is coupled to the cannula mount, the cannula having a longitudinal axis substantially coincident with the instrument manipulator assembly roll axis. The system further includes an entry guide tube at least partially within the cannula, the entry guide tube rotatable about the longitudinal axis of the cannula. | 11-17-2011 |
20110282358 | SURGICAL SYSTEM INSTRUMENT MOUNTING - Robotic surgical systems and methods of coupling a surgical instrument to a manipulator arm are provided. In one embodiment, a system includes a base; a setup link operably coupled to the base, the setup link locating a remote center of motion for the robotic surgical system; a proximal link operably coupled to the setup link; and a distal link operably coupled to the proximal link. A plurality of instrument manipulators are rotatably coupled to a distal end of the distal link, each of the instrument manipulators including a plurality of actuator outputs distally protruding from a distal end of a frame. | 11-17-2011 |
20110288669 | MASS PRODUCTION OF INDIVIDUALIZED MEDICAL DEVICES - A plurality of individual medical devices is created that define a medical device family. Within the family of medical devices, each of the plurality of medical devices has at least one dimension that, within an acceptable tolerance, is substantially equal to the same dimension of another of the plurality of medical devices. Thus, for each medical device in the family, another, corresponding medical device has at least one substantially similar dimension. For example, a first medical device may have a first value for a dimension and a second medical device may have a second value for the same dimension that is equal to one of the sum of the second dimension and the acceptable tolerance or the difference between the second dimension and the acceptable tolerance. Thus, each of the plurality of medical devices varies from another of the plurality of medical devices by the acceptable tolerance. | 11-24-2011 |
20120116525 | FEMORAL TROCHLEA PROSTHESES - Various embodiments of femoral trochlea prostheses useable in a knee joint. The knee joint includes a patella and a distal femur with a femoral trochlea, or patello-femoral groove. In one embodiment, a femoral trochlea prosthesis includes a nonarticulating surface including contoured surfaces and/or planar surfaces. The present disclosure also provides a method for preparing a bone surface for receiving the prostheses described herein. | 05-10-2012 |
20130079794 | SURGICAL SYSTEM ENTRY GUIDE - An entry guide tube and cannula assembly, a surgical system including the assembly, and a method of surgical instrument insertion are provided. In one embodiment, the assembly includes a cannula having a proximal portion that operably couples to an accessory clamp of a manipulator arm, and a distal tubular member coupled to the proximal portion, the tubular member having an opening for passage of at least one instrument shaft. The assembly also includes an entry guide tube rotatably coupled to the proximal portion of the cannula, the entry guide tube including a plurality of channels for passage of a plurality of instrument shafts, wherein the entry guide tube is rotatably driven relative to the proximal portion of the cannula by rotation of at least one instrument shaft about a longitudinal axis of the entry guide tube. | 03-28-2013 |
20140276465 | Sealing Multiple Surgical Instruments - A cannula cap is disclosed. A cannula cap according to some embodiments of the invention includes an instrument guide attachment; a cannula attachment; and a seal captured between the instrument guide attachment and the cannula attachment. In some embodiments, a cannula cap can include a lid; a locking ring; a base; and a cannula seal captured between the lid and the base. | 09-18-2014 |
20140276946 | Sealing Multiple Surgical Instruments - In accordance with aspects of the present invention, an instrument guide is provided. An instrument guide according to some embodiments of the present invention includes a channel portion, the channel portion including a plurality of channels through which surgical instruments can be inserted; a lower part mechanically fixed to the channel portion, the lower part including doors to seal each of the channels; an upper part, the upper part mechanically attached to the lower part and including a funnel for guiding the instruments into the plurality of channels; and one or more seals fixed between the upper part and the lower part, the seal(s) having openings corresponding to the channels and sealing against the doors when the doors are closed and sealing against surgical instruments when surgical instruments are inserted into the channels. | 09-18-2014 |
20140276947 | Sealing Multiple Surgical Instruments - In accordance with aspects of the present invention, an instrument is provided. An instrument seal according to some embodiments includes a seal body that can be captured between an upper part and a lower part of an instrument guide; and openings in the seal body that align with channels on the instrument guide, wherein the seal body seals against doors in the lower part and an instrument shaft inserted through the openings. | 09-18-2014 |
20140296872 | SURGICAL SYSTEM ENTRY GUIDE - An entry guide tube and cannula assembly, a surgical system including the assembly, and a method of surgical instrument insertion are provided. In one embodiment, the assembly includes a cannula having a proximal portion that operably couples to an accessory clamp of a manipulator arm, and a distal tubular member coupled to the proximal portion, the tubular member having an opening for passage of at least one instrument shaft. The assembly also includes an entry guide tube rotatably coupled to the proximal portion of the cannula, the entry guide tube including a plurality of channels for passage of a plurality of instrument shafts, wherein the entry guide tube is rotatably driven relative to the proximal portion of the cannula by rotation of at least one instrument shaft about a longitudinal axis of the entry guide tube. | 10-02-2014 |
20140326254 | SURGICAL SYSTEM STERILE DRAPE - A sterile drape, a surgical system with the drape, and a draping method are provided. In one embodiment, a sterile drape includes a plurality of drape pockets, each of the drape pockets including an exterior surface to be adjacent a sterile field for performing a surgical procedure and an interior surface to be adjacent a non-sterile instrument manipulator coupled to a manipulator arm of a robotic surgical system. The drape further includes a plurality of flexible membranes at a distal face of each of the drape pockets for interfacing between outputs of an instrument manipulator and inputs of a respective surgical instrument, and a rotatable seal adapted to couple a proximal opening of each of the drape pockets to a rotatable element at a distal end of the manipulator arm. | 11-06-2014 |
20140331481 | MASS PRODUCTION OF INDIVIDUALIZED MEDICAL DEVICES - A plurality of individual medical devices is created that define a medical device family. Within the family of medical devices, each of the plurality of medical devices has at least one dimension that, within an acceptable tolerance, is substantially equal to the same dimension of another of the plurality of medical devices. Thus, for each medical device in the family, another, corresponding medical device has at least one substantially similar dimension. For example, a first medical device may have a first value for a dimension and a second medical device may have a second value for the same dimension that is equal to one of the sum of the second dimension and the acceptable tolerance or the difference between the second dimension and the acceptable tolerance. Thus, each of the plurality of medical devices varies from another of the plurality of medical devices by the acceptable tolerance. | 11-13-2014 |
20150045900 | TOTAL KNEE IMPLANT - A knee prosthesis is provided for use in knee arthroplasty. In one exemplary embodiment, the present invention provides a tibial prosthesis having a tibial baseplate with a fixed medial bearing component and a mobile lateral bearing component. In one exemplary embodiment, the lateral bearing component is secured to the lateral portion of the tibial baseplate utilizing at least one prosthetic ligament. Additionally, in one exemplary embodiment, a stop is provided to limit anterior or posterior movement of the lateral bearing component relative to the tibial baseplate. For example, the stop may be defined by cooperating shoulders formed on the lateral bearing and the tibial baseplate. | 02-12-2015 |
20150045901 | FEMORAL TROCHLEA PROSTHESES - Various embodiments of femoral trochlea prostheses useable in a knee joint. The knee joint includes a patella and a distal femur with a femoral trochlea, or patello-femoral groove. In one embodiment, a femoral trochlea prosthesis includes a distal tail. In another embodiment, a femoral trochlea prosthesis includes a wing or extension portion. In yet another embodiment, a set of femoral trochlea prostheses includes a plurality of prostheses having differing thicknesses. In still another embodiment, a femoral trochlea prosthesis includes a porous medium on various portions of the prosthesis. | 02-12-2015 |