Brosche

Holger Brosche, Dresden DE

Patent application number	Description	Published
20080295662	WAFER CATCHING DEVICE - The invention relates to a device for catching a plurality of slices to be detached from a holding element, having a frame, a holder, attached to the frame, for accommodating the holding element holding the slices, at least two guiding elements on the sides and at least one bottom catching element, the guiding elements on the sides each being arranged on the frame in pairs on the right and the left.	12-04-2008
20090239156	Apparatus and Method for the Removal of Pellicles from Masks - An apparatus and a method for the removal of pellicles from masks which can be used for photolithographic purposes. The pellicles are removed from masks in a universal manner without them being further contaminated or damaged. In an apparatus, at least one grip is present for the manipulation of masks provided with pellicles which has at least two fixing elements which engage at the edge of a mask with exerted pressure force. There are moreover present in this connection at least one detector for the contactless determination of the position of mounts formed at the radially outer edge of pellicles, and a heating device for the heating of an adhesive with which pellicles are fastened to a mask with material continuity, and a removal apparatus of the pellicles from a mask having a mask fixing unit and a pellicle removal unit.	09-24-2009

Patent application number	Description	Published
20100147124	MACHINE TOOL PROTECTION APPARATUS - A machine tool protection apparatus, for a machine tool, that is provided for monitoring of a protection region associated with a tool, including a first sensor unit that is provided for reception of a first protection signal. The machine tool protection apparatus further includes at least one second sensor unit that is provided for reception of a second protection signal.	06-17-2010
20100299016	ACTIVATION SYSTEM FOR A ROBOTIC VEHICLE - The invention relates to an activation system (	11-25-2010

Patent application number	Description	Published
20080303709	Radar System For Monitoring Targets in Different Distance Ranges - In a radar system for monitoring targets in different distance ranges, radar pulses are emitted whose length is greater than the length corresponding to the propagation time between two objects to be distinguished from one another, located at different distances. On the receive side the high-frequency signal supplied to the radar transmit pulse former and the radar receive signal are supplied to a mixer. The output signal of the mixer is supplied to a signal analyzer via at least one sampler, whose delay setting with respect to the rising edge of the radar transmit pulse predefines the limit of reach of the distance range to be monitored.	12-11-2008