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Brom

Paul Peter Anna Antonius Brom, Eindhoven NL

Patent application numberDescriptionPublished
20080309893Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device - A contamination prevention system is constructed and arranged to prevent material from propagating with radiation into a lithographic apparatus. The contamination prevention system includes a rotatable carrier provided with a plurality of generally radially outwardly extending blades. The blades are constructed and arranged to absorb or deflect the material. The system also includes a stationary shaft, and a bearing constructed and arranged to rotate the rotatable carrier and the blades around the shaft. The rotatable carrier is provided with a space for at least partially receiving a portion of the shaft.12-18-2008
20100141909RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS - A radiation system for generating a beam of radiation that defines an optical axis is provided. The radiation system includes a plasma produced discharge source for generating EUV radiation. The discharge source includes a pair of electrodes constructed and arranged to be provided with a voltage difference, and a system for producing a plasma between the pair of electrodes so as to provide a discharge in the plasma between the electrodes. The radiation system also includes a debris catching shield for catching debris from the electrodes. The debris catching shield is constructed and arranged to shield the electrodes from a line of sight provided in a predetermined spherical angle relative the optical axis, and to provide an aperture to a central area between the electrodes in the line of sight.06-10-2010

Patent applications by Paul Peter Anna Antonius Brom, Eindhoven NL

Paul Peter Anne Brom, Eindhoven NL

Patent application numberDescriptionPublished
20090303626HOUSING STRUCTURE - A housing structure has a frame structure 12-10-2009

Paul Peter Anne Brom, Rg Eindhoven NL

Patent application numberDescriptionPublished
20110216428HOUSING STRUCTURE - A housing structure has a frame structure 09-08-2011

Tymen Jacob Dinn Brom, Naval Base Western Australia AU

Patent application numberDescriptionPublished
20110259541METHOD OF MANUFACTURING COMPONENTS - A method of forming a wear resistant component is disclosed. The method includes the metallurgical bonding of an abrasion resistant alloy to a substrate within a furnace. A gas flow restricting means is used to restrict the flow of gaseous oxygen into the region of the metallurgical bond, allowing a furnace to be used without vacuum extraction.10-27-2011