Patent application number | Description | Published |
20100247018 | ROLLER BEARING ASSEMBLIES AND ROLLER BEARING ASSEMBLY METHODS - A roller bearing assembly includes an annular outer ring with first and second outer ring shoulders that define a first raceway in the outer ring. An annular inner ring may be disposed substantially concentrically within the outer ring, the inner ring including a base portion and first and second inner ring shoulders that extend from and are integral with the base portion to define a second raceway in the inner ring. A plurality of rolling elements may be arranged between the inner ring and outer ring and within the first and second raceways to rotatably couple the outer ring to the inner ring. | 09-30-2010 |
20120199777 | COMBINATION BEARINGS HAVING IMPROVED LOAD CAPACITIES AND LIFESPAN AND VALVE ASSEMBLIES INCLUDING THE SAME - Embodiments of a combination bearing are provided, as are embodiments of a valve assembly including a combination bearing. In one embodiment, the valve assembly includes a flowbody having a flow passage therethrough, a drive shaft rotatably mounted within the flowbody, a valve element mounted to the drive shaft and positioned within the flow passage, and a combination bearing coupled between the flowbody and the drive shaft. The combination bearing comprises an integral radial load/thrust ring coupled to the drive shaft, and a thrust washer substantially adjacent the integral radial load/thrust ring, as taken along the longitudinal axis of the combination bearing. An outer radial ring circumscribes the integral thrust/radial load ring. A first plurality of rolling elements is captured between the thrust washer and the integral radial load/thrust ring, and a second plurality of rolling elements is captured between the outer radial ring and the integral radial load/thrust ring. | 08-09-2012 |
20130264399 | THRUST REVERSER ACTUATOR WITH PRIMARY LOCK - Actuator assembly includes a housing assembly, a ball screw, a ball nut, and a lock. The ball screw is rotationally mounted on and extends from the housing assembly, is coupled to receive an actuator drive torque, and is configured, upon receipt thereof, to rotate. The ball nut is rotationally supported on the ball screw and is configured, in response to rotation of the ball screw, to translate thereon between a stowed position and a deployed position. The lock is disposed at least partially within the housing assembly and is configured to move between a lock position and an unlock position. The lock prevents the ball nut from translating out of the stowed position when the lock is in the lock position and the ball nut is in the stowed position. | 10-10-2013 |
Patent application number | Description | Published |
20100319616 | FIBER SIZING APPLICATOR AND METHOD - Disclosed are fiber coating sizing applicator apparatus having a member to remove unused sizing and foreign objects from the fiber coating element of the applicator on a continuous or intermittent basis. Also disclosed are sizing applicators having as part of the drive, a servo motor for reduced variation in sizing application. Unused sizing is filtered to remove foreign objects and returned the applicator right away, or stored in a temperature controlled area until ready to feed back to a sizing applicator. Also disclosed are methods of using the sizing applicator apparatus to produce sized fibers. The apparatus and methods of the invention produce a substantial reduction in the fiber break rate, sizing usage and applicator maintenance. | 12-23-2010 |
20120037256 | PIPE INSULATION PRODUCT WITH CHARGE DISSIPATER - A pipe insulation product including a core of insulating material and a roughly rectangular laminate. The core may include an outer surface; an inner surface; and a wall extending between the outer and inner surfaces. The laminate may include a foil or metallized polymeric film sheet layer, a scrim, a porous media sheet layer, and a polymeric film sheet layer bonded together via an adhesive. The polymeric film sheet layer may also include a closure flap that adhesively couples opposite ends of the laminate together to form a cylindrical tube with the core enclosed therein. A charge dissipator may be applied to the polymeric film sheet layer in an amount sufficient to reduce generation of a static charge on the laminate's exterior surface without affecting the closure flap's ability to adhesively couple the opposite ends of the laminate. | 02-16-2012 |
20120037258 | PIPE INSULATION PRODUCTS AND METHODS - A pipe insulation product including a core of insulating material and a roughly rectangular laminate. The core may include an outer surface; an inner surface; and a wall extending between the outer and inner surfaces. The laminate may include a foil or metallized polymeric film sheet, a scrim, a paper media sheet, and a polymeric film sheet bonded together via an adhesive. The laminate may include a closure flap that adhesively seals opposite ends of the laminate together to form a cylindrical tube with the core enclosed therein. The paper media sheet may be between the range of 20 and 40 pounds per 3000 square feet to provide greater closure flap seal integrity without significantly reducing one or more beneficial properties of the laminate. | 02-16-2012 |
20120037259 | INSULATION PRODUCT WITH INWARD CURLING CLOSURE FLAP - A pipe insulation product including a core of insulating material and a laminate surrounding the core and bonded to the core. The core may include an outer surface; an inner surface; and a wall extending between the outer and inner surfaces. The laminate may include a foil or metallized polymeric film sheet, a scrim, a porous media sheet, and a polymeric film sheet bonded together via an adhesive. The laminate may include a closure flap that is configured to adhesively seal opposite ends of the laminate together to form a cylindrical tube with the core enclosed therein. The closure flap may be configured to include a curl that provides a greater closure flap adhesive seal. | 02-16-2012 |
Patent application number | Description | Published |
20080227965 | Recombinant monoclonal antibodies and corresponding antigens for colon and pancreatic cancers - The present invention provides for purified or highly pure recombinant monoclonal antibodies that bind to human colorectal and pancreatic carcinoma-associated antigens (CPAA), along with nucleic acid sequences encoding the antibody chains, and the amino acid sequences corresponding to said nucleic acids and uses for said sequences. | 09-18-2008 |
20090162931 | RECOMBINANT MONOCLONAL ANTIBODIES AND CORRESPONDING ANTIGENS FOR COLON AND PANCREATIC CANCERS - The present invention provides for recombinant monoclonal antibodies that bind to human colorectal and pancreatic carcinoma-associated antigens, along with nucleic acid sequences encoding the antibody chains, and the amino acid sequences corresponding to the nucleic acids, and uses for these antibodies, nucleic acids and amino acids. | 06-25-2009 |
20100310559 | RECOMBINANT MONOCLONAL ANTIBODIES AND CORRESPONDING ANTIGENS FOR COLON AND PANCREATIC CANCERS - The present invention provides for purified or highly pure recombinant monoclonal antibodies that bind to human colorectal and pancreatic carcinoma-associated antigens (CPAA), along with nucleic acid sequences encoding the antibody chains, and the amino acid sequences corresponding to said nucleic acids and uses for said sequences. | 12-09-2010 |
20110076761 | RECOMBINANT MONOCLONAL ANTIBODIES AND CORRESPONDING ANTIGENS FOR COLON AND PANCREATIC CANCERS - The present invention provides for recombinant monoclonal antibodies that bind to human colorectal and pancreatic carcinoma-associated antigens, along with nucleic acid sequences encoding the antibody chains, and the amino acid sequences corresponding to the nucleic acids, and uses for these antibodies, nucleic acids and amino acids. | 03-31-2011 |
20110158902 | RECOMBINANT MONOCLONAL ANTIBODIES AND CORRESPONDING ANTIGENS FOR COLON AND PANCREATIC CANCERS - The present invention provides for purified or highly pure recombinant monoclonal antibodies that bind to human colorectal and pancreatic carcinoma-associated antigens (CPAA), along with nucleic acid sequences encoding the antibody chains, and the amino acid sequences corresponding to said nucleic acids and uses for said sequences. | 06-30-2011 |
Patent application number | Description | Published |
20090084158 | GAS MEASURING DEVICE AND METHOD OF OPERATING THE SAME - A gas measuring device for measuring a presence of a target gas in a fluid medium includes a sensor having a sensing element and a heating element being configured to heat the sensing element to a predetermined operating temperature. The sensing element is responsive to the target gas such that at least one electrical property of the sensing element varies based on a presence of the target gas, and the electrical property of the sensing element is measured by the gas measuring device. The gas measuring device also includes a control circuit having a heating element controller connected to, and measuring an electrical property of, the heating element. The control circuit also includes a heater power supply supplying power to the heating element, wherein the heating element controller is connected to, and controls the operation of, the heater power supply based on the measurement of the electrical property of the heating element. | 04-02-2009 |
20090084160 | GAS MEASURING DEVICE AND METHOD OF MANUFACTURING THE SAME - A gas measuring device for measuring a presence of a target gas in a fluid medium includes a sensor case defining a sensor cavity extending from an open end of the sensor case, wherein the fluid medium flows into the sensor cavity through the open end. A sensor is positioned within the sensor cavity for sensing the presence of the target gas, wherein the sensor has a sensing element on one side of the sensor, and the sensing element is positioned within the sensor cavity such that the sensing element faces away from the open end. | 04-02-2009 |
20090086191 | OPTICAL GAS DETECTOR - A gas detector is provided. The gas detector includes a measurement source of optical radiation, a reference source of optical radiation, a measurement detector configured to provide an output signal indicative of a gas of interest, a reference detector configured to provide an output signal at least partially independent of the gas of interest, a measurement optical path extending from the measurement source to the reference and measurement detectors, and a sample region for receiving a gaseous sample. The sample region is located along the measurement optical path. A window is positioned in the measurement optical path downstream from the measurement source and upstream from the reference and measurement detectors. The window is partially transparent to optical radiation and partially reflective to optical radiation. The window is positioned to either reflect a portion of the optical radiation emitted by the reference source into the measurement optical path or to allow a portion of the optical radiation emitted by the reference source to pass through the window into the measurement optical path. | 04-02-2009 |
Patent application number | Description | Published |
20090036195 | SLOT MACHINE SYSTEMS, METHODS, AND APPARATUS - Systems, methods and/or apparatus for slot machine eye-strain reduction are disclosed. Systems, methods and/or apparatus for slot machine back lighting are further provided. Systems, methods and/or apparatus for a slot machine back lighting effect are also disclosed. Systems, methods and/or apparatus for reel line lights are disclosed. Systems, methods and/or apparatus for reel tilt and motion detection are disclosed. Systems, methods and/or apparatus for reel wins display for an electromechanical slot machine and/or gaming machine viewing window configurable lines are disclosed. Systems, methods and/or apparatus for a configurable shelf system for an electromechanical slot machine are disclosed. Systems, methods, and apparatus are also disclosed for reel tilt minimization. Systems, methods and/or apparatus for slot machine controlled lighting. Further embodiments of the present disclosure can provide slot machine reel stop systems, methods, and apparatus useful for electromechanical slot machines. | 02-05-2009 |
20090312085 | SLOT MACHINE SYSTEMS, METHODS, AND APPARATUS - Systems, methods and/or apparatus for slot machine eye-strain reduction are disclosed. Systems, methods and/or apparatus for slot machine back lighting are further provided. Systems, methods and/or apparatus for a slot machine back lighting effect are also disclosed. Systems, methods and/or apparatus for reel line lights are disclosed. Systems, methods and/or apparatus for reel tilt and motion detection are disclosed. Systems, methods and/or apparatus for reel wins display for an electromechanical slot machine and/or gaming machine viewing window configurable lines are disclosed. Systems, methods and/or apparatus for a configurable shelf system for an electromechanical slot machine are disclosed. Systems, methods, and apparatus are also disclosed for reel tilt minimization. Systems, methods and/or apparatus for slot machine controlled lighting. Further embodiments of the present disclosure can provide slot machine reel stop systems, methods, and apparatus useful for electromechanical slot machines. | 12-17-2009 |
20100041460 | SLOT MACHINE SYSTEMS, METHODS, AND APPARATUS - Systems, methods and/or apparatus for slot machine eye-strain reduction are disclosed. Systems, methods and/or apparatus for slot machine back lighting are further provided. Systems, methods and/or apparatus for a slot machine back lighting effect are also disclosed. Systems, methods and/or apparatus for reel line lights are disclosed. Systems, methods and/or apparatus for reel tilt and motion detection are disclosed. Systems, methods and/or apparatus for reel wins display for an electromechanical slot machine and/or gaming machine viewing window configurable lines are disclosed. Systems, methods and/or apparatus for a configurable shelf system for an electromechanical slot machine are disclosed. Systems, methods, and apparatus are also disclosed for reel tilt minimization. Systems, methods and/or apparatus for slot machine controlled lighting. Further embodiments of the present disclosure can provide slot machine reel stop systems, methods, and apparatus useful for electromechanical slot machines. | 02-18-2010 |
20140080574 | SLOT MACHINE SYSTEMS, METHODS, AND APPARATUS - Systems, methods and/or apparatus for slot machine eye-strain reduction are disclosed. Systems, methods and/or apparatus for slot machine back lighting are further provided. Systems, methods and/or apparatus for a slot machine back lighting effect are also disclosed. Systems, methods and/or apparatus for reel line lights are disclosed. Systems, methods and/or apparatus for reel tilt and motion detection are disclosed. Systems, methods and/or apparatus for reel wins display for an electromechanical slot machine and/or gaming machine viewing window configurable lines are disclosed. Systems, methods and/or apparatus for a configurable shelf system for an electromechanical slot machine are disclosed. Systems, methods, and apparatus are also disclosed for reel tilt minimization. Systems, methods and/or apparatus for slot machine controlled lighting. Further embodiments of the present disclosure can provide slot machine reel stop systems, methods, and apparatus useful for electromechanical slot machines. | 03-20-2014 |
Patent application number | Description | Published |
20090140983 | ERGONOMIC COMPUTER MOUSE - A computer mouse for use with a computing device is provided. The computer mouse may include a mouse body with an ulnar side digit support structure having a front concave region and a rear convex region formed proximate and behind the front concave region. The front concave region may include an overhang portion on a top side and an outwardly flared region on a bottom side. The front concave region may be sized to receive a distal end of a digit of a user, and the rear convex region may be sized to support a proximate end of a digit of a user. The mouse body may additionally include a radial side digit support structure that has a concave region with an outwardly flared region on a bottom side of the concavity. | 06-04-2009 |
20100097695 | INCUBATION CONTAINER SYSTEM - A method and system for providing a container for investigating at least one specimen are described. The method and system include providing a dish. The dish includes a floor, a plurality of sidewalls, and at least one pedestal. The floor has a perimeter. The plurality of sidewalls coupled with the floor proximate to the perimeter. The at least one pedestal resides on a portion of the floor and is pedestal configured to support at least one microscope slide distal from the floor. The at least one microscope slide bears the specimen(s) for investigation. | 04-22-2010 |
20110106004 | SYSTEMS AND METHODS FOR OPERATING INTERVENTIONAL CATHETERS USING A COMMON OPERATING CONSOLE AND ADAPTIVE INTERFACE COMPONENTS - Interventional catheter assemblies, operating systems and adaptive interface components allow operation of a variety of interventional catheter assemblies, including infusion catheters, aspiration catheters and interventional catheters that provide both infusion and aspiration, using a common control console housing infusion and aspiration systems. Control instructions for operating the interventional catheter assembly and authentication protocols for verifying system matches and operating conditions maybe encoded in hardware, firmware or software, such as a memory or storage device, provided in the interventional catheter assembly or in a discrete adaptive interface component. Adaptive components such as tubing cassettes routing aspiration and/or infusion tubing in a predetermined configuration to mate with aspiration and infusion systems on a control console are also provided. | 05-05-2011 |
20110221675 | ERGONOMIC COMPUTER MOUSE - A computer mouse for use with a computing device is provided. The computer mouse may include a mouse body with an ulnar side digit support structure having a front concave region and a rear convex region formed proximate and behind the front concave region. The front concave region may include an overhang portion on a top side and an outwardly flared region on a bottom side. The front concave region may be sized to receive a distal end of a digit of a user, and the rear convex region may be sized to support a proximate end of a digit of a user. The mouse body may additionally include a radial side digit support structure that has a concave region with an outwardly flared region on a bottom side of the concavity. | 09-15-2011 |
20110300010 | PERISTALTIC PUMP ASSEMBLIES, TUBING CASSETTES, AND SYSTEMS INCORPORATING SUCH PUMP ASSEMBLIES - Peristaltic pump assemblies in which the closing and opening of a pivoting or sliding door is coordinated with movement of the occlusion bed toward and away from the rotor assembly to engage and disengage tubing within the occlusion pathway are disclosed. Linkage mechanisms provided by the interaction of cam surfaces with rollers, as well as bar linkage mechanisms, are disclosed. The linkage mechanism, in addition to providing precise displacement of the occlusion bed, may also provide an over-center feature that enhances safety and pump operation when the door is in a closed position. Latching mechanisms and sensors may be incorporated. Control consoles incorporating such peristaltic pump assemblies are described. Adaptive components such as tubing cassettes routing aspiration and/or infusion tubing in a predetermined configuration to mate with occlusion pathways in aspiration and/or infusion pump assemblies provided in various types of medical devices and control consoles are also provided. | 12-08-2011 |
20130131585 | INTERVENTIONAL CATHETER ASSEMBLIES, CONTROL CONSOLES AND ADAPTIVE TUBING CASSETTES - Interventional catheter assemblies, operating systems and adaptive interface components allow operation of a variety of interventional catheter assemblies, including infusion catheters, aspiration catheters and interventional catheters that provide both infusion and aspiration, using a common control console housing infusion and aspiration systems. Adaptive tubing cassettes having a handle and one or more preformed tubing loops route aspiration and/or infusion tubing in a predetermined configuration to mate with aspiration and infusion systems on a control console. | 05-23-2013 |
20150314049 | ADAPTIVE TUBING CASSETTES FOR USE IN CONNECTION WITH INTERVENTIONAL CATHETER ASSEMBLIES - Peristaltic pump assemblies in which the closing and opening of a pivoting or sliding door is coordinated with movement of the occlusion bed toward and away from the rotor assembly to engage and disengage tubing within the occlusion pathway are disclosed. Linkage mechanisms provided by the interaction of cam surfaces with rollers, as well as bar linkage mechanisms, are disclosed. The linkage mechanism, in addition to providing precise displacement of the occlusion bed, may also provide an over-center feature that enhances safety and pump operation when the door is in a closed position. Latching mechanisms and sensors may be incorporated. Control consoles incorporating such peristaltic pump assemblies are described. Adaptive components such as tubing cassettes routing aspiration and/or infusion tubing in a predetermined configuration to mate with occlusion pathways in aspiration and/or infusion pump assemblies provided in various types of medical devices and control consoles are also provided. | 11-05-2015 |
Patent application number | Description | Published |
20130260869 | GAMING SYSTEM AND METHOD PROVIDING A BONUS OPPORTUNITY WHEN A DESIGNATED RELATIONSHIP EXISTS BETWEEN A PLURALITY OF RANDOMLY DETERMINED ELEMENTS - Various embodiments of the present disclosure are directed to a gaming system and method providing a bonus opportunity when a designated relationship exists between a plurality of randomly determined elements. The gaming system randomly generates a plurality of elements in association with a play of a secondary game. The gaming system determines whether a designated relationship exists between the randomly determined elements. If the designated relationship exists between the randomly determined elements, the gaming system determines a bonus opportunity associated with the randomly determined elements and provides the bonus opportunity to a player. | 10-03-2013 |
20140066162 | GAMING SYSTEM AND METHOD FOR PROVIDING A STREAMING SYMBOLS GAME - In various embodiments, the gaming system disclosed herein provides streaming symbols game which utilizes a single continuous series or chain of symbols and a plurality of symbol display positions which form a path. Specifically, in various embodiments, the gaming system displays the chain of symbols continuously moving through the path of symbol display positions wherein which symbols are evaluated for any awards corresponds to when the chain of symbols stops moving along the path. | 03-06-2014 |
20140087824 | GAMING SYSTEM AND METHOD FOR PROVIDING A GAME WHICH POPULATES SYMBOLS ALONG A PATH - In various embodiments, the present disclosure relates generally to a game including a path of different symbol display positions. The gaming system generates one or more symbols (and/or one or more awards) at one or more of the symbol display positions of a matrix or grid. The gaming system then randomly forms a path including a plurality of the symbol display positions and determines an award for the player based on which symbol display positions are included in the formed path. | 03-27-2014 |
20140087826 | GAMING SYSTEM AND METHOD FOR PROVIDING A GAME WHICH POPULATES SYMBOLS ALONG A PATH - In various embodiments, the present disclosure relates generally to a game including a path of different symbol display positions. The gaming system generates one or more symbols (and/or one or more awards) at one or more of the symbol display positions of a matrix or grid. The gaming system then randomly forms a path including a plurality of the symbol display positions and determines an award for the player based on which symbol display positions are included in the formed path. | 03-27-2014 |
20140087828 | GAMING SYSTEM AND METHOD FOR PROVIDING A GAME WHICH POPULATES SYMBOLS ALONG A PATH - In various embodiments, the present disclosure relates generally to a game including a path of different symbol display positions. The gaming system generates one or more symbols (and/or one or more awards) at one or more of the symbol display positions of a matrix or grid. The gaming system then randomly forms a path including a plurality of the symbol display positions and determines an award for the player based on which symbol display positions are included in the formed path. | 03-27-2014 |
20150080101 | GAMING SYSTEM AND METHOD FOR PLAYING A GAME INCLUDING A PLURALITY OF LINKED SYMBOL GENERATORS - A gaming system including a game which utilizes a plurality of symbol generators. Each of the symbol generators is linked to at least another one of the symbol generators, such that the plurality of symbol generators are linked with each other to form a group of coupled symbol generators. In operation, for a play of a game, the gaming system activates (i.e., spins) one of the symbol generators. Due to the symbol generators being directly or indirectly coupled with one another, this activation of one of the symbol generators causes an activation of each of the linked symbol generators. Following the activation of the symbol generators, one of the symbol generators is deactivated (i.e., stopped) at a randomly selected orientation which causes each of the symbol generators to also be deactivated. The gaming system then evaluates any indicated symbols associated with the stopped symbol generators and provides one or more awards based on the evaluated symbol generators. | 03-19-2015 |
20150248805 | GAMING SYSTEM AND METHOD FOR PROVIDING A GAME WHICH POPULATES SYMBOLS ALONG A PATH - In various embodiments, the present disclosure relates generally to a game including a path of different symbol display positions. The gaming system generates one or more symbols (and/or one or more awards) at one or more of the symbol display positions of a matrix or grid. The gaming system then randomly forms a path including a plurality of the symbol display positions and determines an award for the player based on which symbol display positions are included in the formed path. | 09-03-2015 |
Patent application number | Description | Published |
20080220380 | Enhancing photoresist performance using electric fields - Electric fields may be advantageously used in various steps of photolithographic processes. For example, prior to the pre-exposure bake, photoresists that have been spun-on the wafer may be exposed to an electric field to orient aggregates or other components within the unexposed photoresist. By aligning these aggregates or other components with the electric field, line edge roughness may be reduced, for example in connection with 193 nanometer photoresist. Likewise, during exposure, electric fields may be applied through uniquely situated electrodes or using a radio frequency coil. In addition, electric fields may be applied at virtually any point in the photolithography process by depositing a conductive electrode, which is subsequently removed during development. Finally, electric fields may be applied during the developing process to improve line edge roughness. | 09-11-2008 |
20100096566 | Reducing Line Edge Roughness by Particle Beam Exposure - Reducing line edge roughness by particle beam exposure is generally described. In one example, a method includes forming one or more line structures on a surface of a semiconductor substrate, aligning the one or more line structures to a beam path of a particle beam such that particles of the particle beam travel within 45 degrees of parallel to a lengthwise direction of the one or more line structures, and exposing the one or more line structures to the particle beam to reduce line edge roughness of the one or more line structures wherein an incident angle of the particle beam to the surface of the semiconductor substrate is between about 45 degrees and about 90 degrees, where 0 degrees is normal to the surface of the semiconductor substrate. | 04-22-2010 |
20150348839 | DIRECTED SELF ASSEMBLY OF BLOCK COPOLYMERS TO FORM VIAS ALIGNED WITH INTERCONNECTS - A method of an aspect includes forming an interconnect line etch opening in a hardmask layer. The hardmask layer is over a dielectric layer that has an interconnect line disposed therein. The interconnect line etch opening is formed aligned over the interconnect line. A block copolymer is introduced into the interconnect line etch opening. The block copolymer is assembled to form a plurality of assembled structures that are spaced along a length of the interconnect line etch opening. An assembled structure is directly aligned over the interconnect line that is disposed within the dielectric layer. | 12-03-2015 |
Patent application number | Description | Published |
20140203400 | METAL-INSULATOR-METAL CAPACITOR FORMATION TECHNIQUES - Techniques and structure are disclosed for providing a MIM capacitor having a generally corrugated profile. The corrugated topography is provisioned using sacrificial, self-organizing materials that effectively create a pattern in response to treatment (heat or other suitable stimulus), which is transferred to a dielectric material in which the MIM capacitor is formed. The self-organizing material may be, for example, a layer of directed self-assembly material that segregates into two alternating phases in response to heat or other stimulus, wherein one of the phases then can be selectively etched with respect to the other phase to provide the desired pattern. In another example case, the self-organizing material is a layer of material that coalesces into isolated islands when heated. As will be appreciated in light of this disclosure, the disclosed techniques can be used, for example, to increase capacitance per unit area, which can be scaled by etching deeper capacitor trenches/holes. | 07-24-2014 |
20140272711 | PRE-PATTERNED HARD MASK FOR ULTRAFAST LITHOGRAPHIC IMAGING - A method of fabricating a substrate including coating a first resist onto a hardmask, exposing regions of the first resist to electromagnetic radiation at a dose of 10.0 mJ/cm | 09-18-2014 |
20150155349 | METAL-INSULATOR-METAL CAPACITOR FORMATION TECHNIQUES - Techniques and structure are disclosed for providing a MIM capacitor having a generally corrugated profile. The corrugated topography is provisioned using sacrificial, self-organizing materials that effectively create a pattern in response to treatment (heat or other suitable stimulus), which is transferred to a dielectric material in which the MIM capacitor is formed. The self-organizing material may be, for example, a layer of directed self-assembly material that segregates into two alternating phases in response to heat or other stimulus, wherein one of the phases then can be selectively etched with respect to the other phase to provide the desired pattern. In another example case, the self-organizing material is a layer of material that coalesces into isolated islands when heated. As will be appreciated in light of this disclosure, the disclosed techniques can be used, for example, to increase capacitance per unit area, which can be scaled by etching deeper capacitor trenches/holes. | 06-04-2015 |
20150179513 | DIAGONAL HARDMASKS FOR IMPROVED OVERLAY IN FABRICATING BACK END OF LINE (BEOL) INTERCONNECTS - Self-aligned via and plug patterning using diagonal hardmasks for improved overlay in fabricating back end of line (BEOL) interconnects is described. In an example, a method of fabricating an interconnect structure for an integrated circuit involves forming a first hardmask layer above an interlayer dielectric layer disposed above a substrate. The first hardmask layer includes a plurality of first hardmask lines having a first grating in a first direction and comprising one or more sacrificial materials interleaved with the first grating. The method also involves forming a second hardmask layer above the first hardmask layer. The second hardmask layer includes a plurality of second hardmask lines having a second grating in a second direction, diagonal to the first direction. The method also involves, using the second hardmask layer as a mask, etching the first hardmask layer to form a patterned first hardmask layer. The etching involves removing a portion of the one or more sacrificial materials. | 06-25-2015 |
20150253667 | PRE-PATTERNED HARD MASK FOR ULTRAFAST LITHOGRAPHIC IMAGING - A method of fabricating a substrate including coating a first resist onto a hardmask, exposing regions of the first resist to electromagnetic radiation at a dose of 10.0 mJ/cm | 09-10-2015 |
20150255284 | SELF-ALIGNED VIA PATTERNING WITH MULTI-COLORED PHOTOBUCKETS FOR BACK END OF LINE (BEOL) INTERCONNECTS - Self-aligned via patterning with multi-colored photobuckets for back end of line (BEOL) interconnects is described. In an example, an interconnect structure for an integrated circuit includes a first layer of the interconnect structure disposed above a substrate, the first layer including a first grating of alternating metal lines and dielectric lines in a first direction. The dielectric lines have an uppermost surface higher than an uppermost surface of the metal lines. A second layer of the interconnect structure is disposed above the first layer of the interconnect structure, the second layer including a second grating of alternating metal lines and dielectric lines in a second direction, perpendicular to the first direction. The dielectric lines have a lowermost surface lower than a lowermost surface of the metal lines of the second grating. The dielectric lines of the second grating overlap and contact, but are distinct from, the dielectric lines of the first grating. First and second dielectric regions are disposed between the metal lines of the first grating and the metal lines of the second grating, and in a same plane as upper portions of the dielectric lines of the first grating and lower portions of the dielectric lines of the second grating. The first dielectric region is composed of a first cross-linked photolyzable material, and the second dielectric region is composed of a second, different, cross-linked photolyzable material. | 09-10-2015 |