| Patent application number | Description | Published |
|---|
| 20080237575 | Silicon germanium and germanium multigate and nanowire structures for logic and multilevel memory applications - A method to provide a transistor or memory cell structure. The method comprises: providing a substrate including a lower Si substrate and an insulating layer on the substrate; providing a first projection extending above the insulating layer, the first projection including an Si material and a Si1-xGex material; and exposing the first projection to preferential oxidation to yield a second projection including a center region comprising Ge/Si1-yGey and a covering region comprising SiO2 and enclosing the center region. | 10-02-2008 |
| 20080237672 | High density memory - In one embodiment of the invention, a method of forming a semiconductor device includes forming a dynamic random access memory using spacer-defined lithography. | 10-02-2008 |
| 20080237675 | Capacitor, method of increasing a capacitance area of same, and system containing same - A capacitor includes a substrate ( | 10-02-2008 |
| 20080237678 | On-chip memory cell and method of manufacturing same - An on-chip memory cell comprises a tri-gate access transistor ( | 10-02-2008 |
| 20080237719 | Multi-gate structure and method of doping same - A multi-gate structure includes a substrate ( | 10-02-2008 |
| 20080237751 | CMOS Structure and method of manufacturing same - A CMOS structure includes a substrate ( | 10-02-2008 |
| 20080237796 | Increasing the surface area of a memory cell capacitor - Methods and apparatuses to increase a surface area of a memory cell capacitor are described. An opening in a second insulating layer deposited over a first insulating layer on a substrate is formed. The substrate has a fin. A first insulating layer is deposited over the substrate adjacent to the fin. The opening in the second insulating layer is formed over the fin. A first conducting layer is deposited over the second insulating layer and the fin. A third insulating layer is deposited on the first conducting layer. A second conducting layer is deposited on the third insulating layer. The second conducting layer fills the opening. The second conducting layer is to provide an interconnect to an upper metal layer. Portions of the second conducting layer, third insulating layer, and the first conducting layer are removed from a top surface of the second insulating layer. | 10-02-2008 |
| 20080258207 | Block Contact Architectures for Nanoscale Channel Transistors - A contact architecture for nanoscale channel devices having contact structures coupling to and extending between source or drain regions of a device having a plurality of parallel semiconductor bodies. The contact structures being able to contact parallel semiconductor bodies having sub-lithographic pitch. | 10-23-2008 |
| 20090001438 | Isolation of MIM FIN DRAM capacitor - In one embodiment, a capacitor comprises a substrate, a first electrically insulating layer over the substrate, a fin comprising a semiconducting material over the first electrically insulating layer, a cap formed from a silicide material on the first semiconducting fin, a first electrically conducting layer over the first electrically insulating layer and adjacent to the fin, a second electrically insulating layer adjacent to the first electrically conducting layer and a second electrically conducting layer adjacent to the second electrically insulating layer. | 01-01-2009 |
| 20090001441 | Three dimensional quantum dot array - In one embodiment of the invention, oxidation of silicon in a silicon germanium/silicon lattice may convert a two dimensional array of silicon germanium pillars into a structured three dimensional quantum dot array. The array may be included in, for example, flash memory floating gate, optical detector, or quantum computing device. | 01-01-2009 |
| 20090001474 | Semiconductor device with reduced fringe capacitance - In one embodiment of the invention, a non-planar transistor includes a gate electrode and multiple fins. A trench contact is coupled to the fins. The contact bottom is formed above the substrate and does not directly contact the substrate. The contact bottom is higher than the gate top. | 01-01-2009 |
| 20090004868 | Amorphous silicon oxidation patterning - In one embodiment, a method comprises forming a sacrificial amorphous silicon layer on a semiconductor substrate, forming a hardmask on the amorphous silicon layer, etching one or more lines in the sacrificial amorphous silicon layer, growing oxide structures on the amorphous silicon layer, and forming a trench in the semiconductor substrate between the oxide structures. | 01-01-2009 |
| 20090039476 | Apparatus and method for selectively recessing spacers on multi-gate devices - Embodiments of an apparatus and methods for fabricating a spacer on one part of a multi-gate transistor without forming a spacer on another part of the multi-gate transistor are generally described herein. Other embodiments may be described and claimed. | 02-12-2009 |
| 20090057846 | METHOD TO FABRICATE ADJACENT SILICON FINS OF DIFFERING HEIGHTS - A method to fabricate adjacent silicon fins of differing heights comprises providing a silicon substrate having an isolation layer deposited thereon, patterning the isolation layer to form first and second isolation structures, patterning the silicon substrate to form a first silicon fin beneath the first isolation structure and a second silicon fin beneath the second isolation structure, depositing an insulating layer on the substrate, planarizing the insulating layer to expose top surfaces of the first and second isolation structures, depositing and patterning a masking layer to mask the first isolation structure but not the second isolation structure, applying a wet etch to remove the second isolation structure and expose the second silicon fin, epitaxially depositing a silicon layer on the second silicon fin, and recessing the insulating layer to expose at least a portion of the first silicon fin and at least a portion of the second silicon fin. | 03-05-2009 |
| 20090061572 | NONPLANAR SEMICONDUCTOR DEVICE WITH PARTIALLY OR FULLY WRAPPED AROUND GATE ELECTRODE AND METHODS OF FABRICATION - A nonplanar semiconductor device and its method of fabrication is described. The nonplanar semiconductor device includes a semiconductor body having a top surface opposite a bottom surface formed above an insulating substrate wherein the semiconductor body has a pair laterally opposite sidewalls. A gate dielectric is formed on the top surface of the semiconductor body on the laterally opposite sidewalls of the semiconductor body and on at least a portion of the bottom surface of semiconductor body. A gate electrode is formed on the gate dielectric, on the top surface of the semiconductor body and adjacent to the gate dielectric on the laterally opposite sidewalls of semiconductor body and beneath the gate dielectric on the bottom surface of the semiconductor body. A pair source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode. | 03-05-2009 |
| 20090061611 | FABRICATING DUAL LAYER GATE ELECTRODES HAVING POLYSILICON AND A WORKFUNCTION METAL - A method for fabricating a dual layer gate electrode having a polysilicon layer and a workfunction metal layer comprises depositing a layer of a workfunction metal on a semiconductor substrate, depositing a layer of polysilicon on the workfunction metal layer, depositing a hard mask layer on the polysilicon layer, etching the hard mask layer to form a hard mask structure defining a gate electrode, etching the polysilicon layer to remove a portion of the polysilicon layer not protected by the hard mask structure, thereby forming a polysilicon structure beneath the hard mask structure, applying a mixture of ozone and water to exposed sidewalls of the polysilicon structure, thereby forming a silicon dioxide layer on the sidewalls, and etching the workfunction metal layer to remove a portion of the workfunction metal layer not protected by the hard mask structure, thereby forming a workfunction metal structure beneath the polysilicon structure. | 03-05-2009 |
| 20090075445 | Complementary metal oxide semiconductor integrated circuit using uniaxial compressive stress and biaxial compressive stress - A transistor may be formed of different layers of silicon germanium, a lowest layer having a graded germanium concentration and upper layers having constant germanium concentrations such that the lowest layer is of the form Si | 03-19-2009 |
| 20090085027 | THREE DIMENSIONAL STRAINED QUANTUM WELLS AND THREE DIMENSIONAL STRAINED SURFACE CHANNELS BY GE CONFINEMENT METHOD - The present disclosure describes a method and apparatus for implementing a 3D (three dimensional) strained high mobility quantum well structure, and a 3D strained surface channel structure through a Ge confinement method. One exemplary apparatus may include a first graded SiGe fin on a Si substrate. The first graded SiGe fin may have a maximum Ge concentration greater than about 60%. A Ge quantum well may be on the first graded SiGe fin and a SiGe quantum well upper barrier layer may be on the Ge quantum well. The exemplary apparatus may further include a second graded SiGe fin on the Si substrate. The second graded SiGe fin may have a maximum Ge concentration less than about 40%. A Si active channel layer may be on the second graded SiGe fin. Other high mobility materials such as III-V semiconductors may be used as the active channel materials. Of course, many alternatives, variations and modifications are possible without departing from this embodiment. | 04-02-2009 |
| 20090085169 | METHOD OF ACHIEVING ATOMICALLY SMOOTH SIDEWALLS IN DEEP TRENCHES, AND HIGH ASPECT RATIO SILICON STRUCTURE CONTAINING ATOMICALLY SMOOTH SIDEWALLS - A high aspect ratio silicon structure comprises a silicon substrate ( | 04-02-2009 |
| 20090090976 | PROCESS FOR INTEGRATING PLANAR AND NON-PLANAR CMOS TRANSISTORS ON A BULK SUBSTRATE AND ARTICLE MADE THEREBY - A process capable of integrating both planar and non-planar transistors onto a bulk semiconductor substrate, wherein the channel of all transistors is definable over a continuous range of widths. | 04-09-2009 |
| 20090108313 | REDUCING SHORT CHANNEL EFFECTS IN TRANSISTORS - Microelectronic structures and associated methods for reducing short channel effects in transistors are generally described. In one example, an apparatus includes a semiconductor channel, one or more transistor gates coupled with the semiconductor channel, a spacer film coupled to the one or more transistor gates, and a semiconductor material epitaxially grown (epi-growth) on the semiconductor channel wherein the epi-growth is coupled to the to the spacer film to reduce short channel effects of the one or more transistor gates by effectively increasing the transistor gate length. | 04-30-2009 |
| 20090140341 | INDEPENDENT N-TIPS FOR MULTI-GATE TRANSISTORS - Independent n-tips for multi-gate transistors are generally described. In one example, an apparatus includes a semiconductor fin, one or more multi-gate pull down (PD) devices coupled with the semiconductor fin, the one or more PD devices having an n-tip dopant concentration in the semiconductor fin material adjacent to the one or more PD devices, and one or more multi-gate pass gate (PG) devices coupled with the semiconductor fin, the one or more PG devices having an n-tip dopant concentration in the semiconductor fin material adjacent to the one or more PG devices, wherein the n-tip dopant concentration for the PG device is lower than the n-tip dopant concentration for the PD device. | 06-04-2009 |
| 20090149012 | METHOD OF FORMING A NONPLANAR TRANSISTOR WITH SIDEWALL SPACERS - A semiconductor device comprising a semiconductor body having a top surface and a first and second laterally opposite sidewalls as formed on an insulating substrate is claimed. A gate dielectric is formed on the top surface of the semiconductor body and on the first and second laterally opposite sidewalls of the semiconductor body. A gate electrode is then formed on the gate dielectric on the top surface of the semiconductor body and adjacent to the gate dielectric on the first and second laterally opposite sidewalls of the semiconductor body. The gate electrode comprises a metal film formed directly adjacent to the gate dielectric layer. A pair of source and drain regions are then formed in the semiconductor body on opposite sides of the gate electrode. | 06-11-2009 |
| 20090166680 | Unity beta ratio tri-gate transistor static radom access memory (SRAM) - In general, in one aspect, a method includes forming N-diffusion and P-diffusion fins in a semiconductor substrate. A P-diffusion gate layer is formed over the semiconductor substrate and removed from the N-diffusion fins. A pass-gate N-diffusion gate layer is formed over the semiconductor substrate and removed from the P-diffusion fins and pull-down N-diffusion fins. A pull-down N-diffusion layer is formed over the semiconductor substrate. | 07-02-2009 |
| 20090166701 | One transistor/one capacitor dynamic random access memory (1T/1C DRAM) cell - In general, in one aspect, a method includes forming a semiconductor fin. A first insulating layer is formed adjacent to the semiconductor fin. A second insulating layer is formed over the first insulating layer and the semiconductor fin. A first trench is formed in the second insulating layer and the first insulating layer therebelow. The first trench is filed with a polymer. A third insulating layer is formed over the polymer. A second trench is formed in the third insulating layer, wherein the second trench is above the first trench and extends laterally therefrom. The polymer is removed from the first trench. A capacitor is formed within the first and the second trenches. | 07-02-2009 |
| 20090166741 | REDUCING EXTERNAL RESISTANCE OF A MULTI-GATE DEVICE USING SPACER PROCESSING TECHNIQUES - Reducing external resistance of a multi-gate device using spacer processing techniques is generally described. In one example, a method includes depositing a sacrificial gate electrode to one or more multi-gate fins, the one or more multi-gate fins comprising a gate region, a source region, and a drain region, the gate region being disposed between the source and drain regions, patterning the sacrificial gate electrode such that the sacrificial gate electrode material is coupled to the gate region and substantially no sacrificial gate electrode is coupled to the source and drain regions of the one or more multi-gate fins, forming a dielectric film coupled to the source and drain regions of the one or more multi-gate fins, removing the sacrificial gate electrode from the gate region of the one or more multi-gate fins, depositing spacer gate dielectric to the gate region of the one or more multi-gate fins wherein substantially no spacer gate dielectric is deposited to the source and drain regions of the one or more multi-gate fins, the source and drain regions being protected by the dielectric film, and etching the spacer gate dielectric to completely remove the spacer gate dielectric from the gate region area to be coupled with a final gate electrode except a remaining pre-determined thickness of spacer gate dielectric to be coupled with the final gate electrode that remains coupled with the dielectric film. | 07-02-2009 |
| 20090166742 | REDUCING EXTERNAL RESISTANCE OF A MULTI-GATE DEVICE BY INCORPORATION OF A PARTIAL METALLIC FIN - Reducing external resistance of a multi-gate device by incorporation of a partial metallic fin is generally described. In one example, an apparatus includes a semiconductor substrate and one or more fins of a multi-gate transistor device coupled with the semiconductor substrate, the one or more fins having a gate region, a source region, and a drain region, the gate region being disposed between the source and drain regions where the gate region of the one or more fins includes a semiconductor material and where the source and drain regions of the one or more fins include a metal portion and a semiconductor portion, the metal portion and the semiconductor portion being coupled together. | 07-02-2009 |
| 20090166743 | INDEPENDENT GATE ELECTRODES TO INCREASE READ STABILITY IN MULTI-GATE TRANSISTORS - Independent gate electrodes for multi-gate transistors are generally described. In one example, an apparatus includes a semiconductor fin, one or more multi-gate pull down (PD) gate stacks coupled with the semiconductor fin, the one or more PD gate stacks including a PD gate electrode, and one or more multi-gate pass gate (PG) gate stacks coupled with the semiconductor fin, the one or more PG gate stacks including a PG gate electrode, the PG gate electrode having a greater threshold voltage than the PD gate electrode. | 07-02-2009 |
| 20090168498 | Spacer patterned augmentation of tri-gate transistor gate length - In general, in one aspect, a method includes forming a semiconductor substrate having N-diffusion and P-diffusion regions. A gate stack is formed over the semiconductor substrate. A gate electrode hard mask is formed over the gate stack. The gate electrode hard mask is augmented around pass gate transistors with a spacer material. The gate stack is etched using the augmented gate electrode hard mask to form the gate electrodes. The gate electrodes around the pass gate have a greater length than other gate electrodes. | 07-02-2009 |
| 20090170267 | Tri-gate patterning using dual layer gate stack - In general, in one aspect, a method includes forming an n-diffusion fin and a p-diffusion fin in a semiconductor substrate. A high dielectric constant layer is formed over the substrate. A first work function metal layer is created over the n-diffusion fin and a second work function metal layer, thicker than the first, is created over the n-diffusion fin. A silicon germanium layer is formed over the first and second work function metal layers. A ploysilicon layer is formed over the silicon germanium layer and is polished. The ploysilicon layer over the first work function metal layer is thicker than the ploysilicon layer over the second work function metal layer. A hard mask is patterned and used to etch the ploysilicon layer and the silicon germanium layer to create gate stacks. The etch rate of the silicon germanium layer is faster over the first work function metal layer. | 07-02-2009 |
| 20090179282 | METAL GATE DEVICE WITH REDUCED OXIDATION OF A HIGH-K GATE DIELECTRIC - Embodiments of the invention provide a device with a metal gate, a high-k gate dielectric layer and reduced oxidation of a substrate beneath the high-k gate dielectric layer. An oxygen barrier, or capping, layer on the high-k gate dielectric layer and metal gate may prevent such oxidation during processes such as spacer formation and annealing of ion implanted regions. | 07-16-2009 |
| 20090206405 | FIN FIELD EFFECT TRANSISTOR STRUCTURES HAVING TWO DIELECTRIC THICKNESSES - Fin field-effect-transistor (finFET) structures having two dielectric thicknesses are generally described. In one example, an apparatus includes a semiconductor substrate, a semiconductor fin coupled with the semiconductor substrate, the semiconductor fin having at least a first surface, a second surface, and a third surface, the third surface being substantially parallel to the first surface and substantially perpendicular to the second surface, a spacer dielectric coupled to the second surface of the semiconductor fin, a back gate dielectric having a back gate dielectric thickness coupled to the first surface of the semiconductor fin, and a front gate dielectric having a front gate dielectric thickness coupled to the third surface of the semiconductor fin wherein the back gate dielectric thickness is greater than the front gate dielectric thickness | 08-20-2009 |
| 20090218603 | SEMICONDUCTOR DEVICE STRUCTURES AND METHODS OF FORMING SEMICONDUCTOR STRUCTURES - A method of patterning a semiconductor film is described. According to an embodiment of the present invention, a hard mask material is formed on a silicon film having a global crystal orientation wherein the semiconductor film has a first crystal plane and second crystal plane, wherein the first crystal plane is denser than the second crystal plane and wherein the hard mask is formed on the second crystal plane. Next, the hard mask and semiconductor film are patterned into a hard mask covered semiconductor structure. The hard mask covered semiconductor structured is then exposed to a wet etch process which has sufficient chemical strength to etch the second crystal plane but insufficient chemical strength to etch the first crystal plane. | 09-03-2009 |
| 20090289245 | FACETED CATALYTIC DOTS FOR DIRECTED NANOTUBE GROWTH - Faceted catalytic dots are used for directing the growth of carbon nanotubes. In one example, a faceted dot is formed on a substrate for a microelectronic device. A growth promoting dopant is applied to a facet of the dot using an angled implant, and a carbon nanotube is grown on the doped facet of the dot. | 11-26-2009 |
| 20090294839 | RECESSED CHANNEL ARRAY TRANSISTOR (RCAT) STRUCTURES AND METHOD OF FORMATION - Recessed channel array transistor (RCAT) structures and method of formation are generally described. In one example, an electronic device includes a semiconductor substrate, a first fin coupled with the semiconductor substrate, the first fin comprising a first source region and a first drain region, and a first gate structure of a recessed channel array transistor (RCAT) formed in a first gate region disposed between the first source region and the first drain region, wherein the first gate structure is formed by removing a sacrificial gate structure to expose the first fin in the first gate region, recessing a channel structure into the first fin, and forming the first gate structure on the recessed channel structure. | 12-03-2009 |
| 20090315076 | TRANSISTOR GATE ELECTRODE HAVING CONDUCTOR MATERIAL LAYER - Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material. | 12-24-2009 |
| 20090325350 | FIELD EFFECT TRANSISTOR WITH METAL SOURCE/DRAIN REGIONS - A semiconductor device comprising a gate electrode formed on a gate dielectric layer formed on a semiconductor film. A pair of source/drain regions are formed adjacent the channel region on opposite sides of the gate electrode. The source and drain regions each comprise a semiconductor portion adjacent to and in contact with the semiconductor channel and a metal portion adjacent to and in contact with the semiconductor portion. | 12-31-2009 |
| 20100044754 | STRAINED TRANSISTOR INTEGRATION FOR CMOS - Various embodiments of the invention relate to a CMOS device having (1) an NMOS channel of silicon material selectively deposited on a first area of a graded silicon germanium substrate such that the selectively deposited silicon material experiences a tensile strain caused by the lattice spacing of the silicon material being smaller than the lattice spacing of the graded silicon germanium substrate material at the first area, and (2) a PMOS channel of silicon germanium material selectively deposited on a second area of the substrate such that the selectively deposited silicon germanium material experiences a compressive strain caused by the lattice spacing of the selectively deposited silicon germanium material being larger than the lattice spacing of the graded silicon germanium substrate material at the second area. | 02-25-2010 |
| 20100155788 | Formation of a multiple crystal orientation substrate - Embodiments of the invention provide a substrate with a first layer having a first crystal orientation on a second layer having a second crystal orientation different than the first crystal orientation. The first layer may have a uniform thickness. | 06-24-2010 |
| 20100155801 | Integrated circuit, 1T-1C embedded memory cell containing same, and method of manufacturing 1T-1C memory cell for embedded memory application - An integrated circuit includes a semiconducting substrate ( | 06-24-2010 |
| 20100163945 | Embedded memory cell and method of manufacturing same - An embedded memory cell includes a semiconducting substrate ( | 07-01-2010 |
| 20100181607 | INCREASING THE SURFACE AREA OF A MEMORY CELL CAPACITOR - Methods and apparatuses to increase a surface area of a memory cell capacitor are described. An opening in a second insulating layer deposited over a first insulating layer on a substrate is formed. The substrate has a fin. A first insulating layer is deposited over the substrate adjacent to the fin. The opening in the second insulating layer is formed over the fin. A first conducting layer is deposited over the second insulating layer and the fin. A third insulating layer is deposited on the first conducting layer. A second conducting layer is deposited on the third insulating layer. The second conducting layer fills the opening. The second conducting layer is to provide an interconnect to an upper metal layer. Portions of the second conducting layer, third insulating layer, and the first conducting layer are removed from a top surface of the second insulating layer. | 07-22-2010 |
| 20100193840 | SUBSTRATE BAND GAP ENGINEERED MULTI-GATE PMOS DEVICES - A multi-gate transistor and a method of forming a multi-gate transistor, the multi-gate transistor including a fin having an upper portion and a lower portion. The upper portion having a first band gap and the lower portion having a second band gap with the first band gap and the second band gap designed to inhibit current flow from the upper portion to the lower portion. The multi-gate transistor further including a gate structure having sidewalls electrically coupled with said upper portion and said lower portion and a substrate positioned below the fin. | 08-05-2010 |
| 20100200917 | NONPLANAR DEVICE WITH STRESS INCORPORATION LAYER AND METHOD OF FABRICATION - A semiconductor device comprising a semiconductor body having a top surface and laterally opposite sidewalls is formed on an insulating substrate. A gate dielectric layer is formed on the top surface of the semiconductor body and on the laterally opposite sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric on the top surface of the semiconductor body and is formed adjacent to the gate dielectric on the laterally opposite sidewalls of the semiconductor body. A thin film is then formed adjacent to the semiconductor body wherein the thin film produces a stress in the semiconductor body. | 08-12-2010 |
| 20100258908 | ISOLATION OF MIM FIN DRAM CAPACITOR - In one embodiment, a capacitor comprises a substrate, a first electrically insulating layer over the substrate, a fin comprising a semiconducting material over the first electrically insulating layer, a cap formed from a suicide material on the first semiconducting fin, a first electrically conducting layer over the first electrically insulating layer and adjacent to the fin, a second electrically insulating layer adjacent to the first electrically conducting layer and a second electrically conducting layer adjacent to the second electrically insulating | 10-14-2010 |
| 20100264494 | RECESSED CHANNEL ARRAY TRANSISTOR (RCAT) STRUCTURES AND METHOD OF FORMATION - Recessed channel array transistor (RCAT) structures and method of formation are generally described. In one example, an electronic device includes a semiconductor substrate, a first fin coupled with the semiconductor substrate, the first fin comprising a first source region and a first drain region, and a first gate structure of a recessed channel array transistor (RCAT) formed in a first gate region disposed between the first source region and the first drain region, wherein the first gate structure is formed by removing a sacrificial gate structure to expose the first fin in the first gate region, recessing a channel structure into the first fin, and forming the first gate structure on the recessed channel structure. | 10-21-2010 |
| 20100276757 | RECESSED CHANNEL ARRAY TRANSISTOR (RCAT) IN REPLACEMENT METAL GATE (RMG) LOGIC FLOW - Embodiments of the invention relate to a method of fabricating logic transistors using replacement metal gate (RMG) logic flow with modified process to form recessed channel array transistors (RCAT) on a common semiconductor substrate. An embodiment comprises forming an interlayer dielectric (ILD) layer on a semiconductor substrate, forming a first recess in the ILD layer of a first substrate region, forming a recessed channel in the ILD layer and in the substrate of a second substrate region, depositing a first conformal high-k dielectric layer in the first recess and a second conformal high-k dielectric layer in the recessed channel, and filling the first recess with a first gate metal and the recessed channel with a second gate metal. | 11-04-2010 |
| 20100276758 | STRESSED SEMICONDUCTOR USING CARBON AND METHOD FOR PRODUCING THE SAME - A stressed semiconductor using carbon is provided. At least one carbon layer containing diamond is formed either below a semiconductor layer or above a semiconductor device. The carbon layer induces stress in the semiconductor layer, thereby increasing carrier mobility in the device channel region. The carbon layer may be selectively formed or patterned to localize the induced stress. | 11-04-2010 |
| 20100297838 | INDEPENDENTLY ACCESSED DOUBLE-GATE AND TRI-GATE TRANSISTORS IN SAME PROCESS FLOW - A method for fabricating double-gate and tri-gate transistors in the same process flow is described. In one embodiment, a sacrificial layer is formed over stacks that include semiconductor bodies and insulative members. The sacrificial layer is planarized prior to forming gate-defining members. After forming the gate-defining members, remaining insulative member portions are removed from above the semiconductor body of the tri-gate device but not the I-gate device. This facilitates the formation of metallization on three sides of the tri-gate device, and the formation of independent gates for the I-gate device. | 11-25-2010 |
| 20110008937 | SILICON GERMANIUM AND GERMANIUM MULTIGATE AND NANOWIRE STRUCTURES FOR LOGIC AND MULTILEVEL MEMORY APPLICATIONS - A method to provide a transistor or memory cell structure. The method comprises: providing a substrate including a lower Si substrate and an insulating layer on the substrate; providing a first projection extending above the insulating layer, the first projection including an Si material and a Si1-xGex material; and exposing the first projection to preferential oxidation to yield a second projection including a center region comprising Ge/Si1-yGey and a covering region comprising SiO2 and enclosing the center region. | 01-13-2011 |
| 20110018031 | TRANSISTOR GATE ELECTRODE HAVING CONDUCTOR MATERIAL LAYER - Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material. | 01-27-2011 |
| 20110020987 | NONPLANAR SEMICONDUCTOR DEVICE WITH PARTIALLY OR FULLY WRAPPED AROUND GATE ELECTRODE AND METHODS OF FABRICATION - A nonplanar semiconductor device and its method of fabrication is described. The nonplanar semiconductor device includes a semiconductor body having a top surface opposite a bottom surface formed above an insulating substrate wherein the semiconductor body has a pair laterally opposite sidewalls. A gate dielectric is formed on the top surface of the semiconductor body on the laterally opposite sidewalls of the semiconductor body and on at least a portion of the bottom surface of semiconductor body. A gate electrode is formed on the gate dielectric, on the top surface of the semiconductor body and adjacent to the gate dielectric on the laterally opposite sidewalls of semiconductor body and beneath the gate dielectric on the bottom surface of the semiconductor body. A pair source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode. | 01-27-2011 |
| 20110062520 | METHOD FOR FABRICATING TRANSISTOR WITH THINNED CHANNEL - A method of fabricating a MOS transistor having a thinned channel region is described. The channel region is etched following removal of a dummy gate. The source and drain regions have relatively low resistance with the process. | 03-17-2011 |
| 20110079837 | CAPACITOR, METHOD OF INCREASING A CAPACITANCE AREA OF SAME, AND SYSTEM CONTAINING SAME - A capacitor includes a substrate ( | 04-07-2011 |
| 20110115028 | Inducing Strain in the Channels of Metal Gate Transistors - In a metal gate replacement process, strain may be selectively induced in the channels of NMOS and PMOS transistors. For example, a material having a higher coefficient of thermal expansion than the substrate may be used to form the gate electrodes of PMOS transistors. A material with a lower coefficient of thermal expansion than that of the substrate may be used to form the gate electrodes of NMOS transistors. | 05-19-2011 |
| 20110121385 | RECESSED CHANNEL ARRAY TRANSISTOR (RCAT) STRUCTURES AND METHOD OF FORMATION - Recessed channel array transistor (RCAT) structures and method of formation are generally described. In one example, an electronic device includes a semiconductor substrate, a first fin coupled with the semiconductor substrate, the first fin comprising a first source region and a first drain region, and a first gate structure of a recessed channel array transistor (RCAT) formed in a first gate region disposed between the first source region and the first drain region, wherein the first gate structure is formed by removing a sacrificial gate structure to expose the first fin in the first gate region, recessing a channel structure into the first fin, and forming the first gate structure on the recessed channel structure. | 05-26-2011 |
| 20110156145 | FABRICATION OF CHANNEL WRAPAROUND GATE STRUCTURE FOR FIELD-EFFECT TRANSISTOR - A method for fabricating a field-effect transistor with a gate completely wrapping around a channel region is described. Ion implantation is used to make the oxide beneath the channel region of the transistor more etchable, thereby allowing the oxide to be removed below the channel region. Atomic layer deposition is used to form a gate dielectric and a metal gate entirely around the channel region once the oxide is removed below the channel region. | 06-30-2011 |
