| Patent application number | Description | Published |
|---|
| 20090317931 | METHOD OF FABRICATING AN ELECTROMECHANICAL DEVICE INCLUDING AT LEAST ONE ACTIVE ELEMENT - The invention relates to a method of fabricating an electromechanical device including an active element, wherein the method comprises the following steps: | 12-24-2009 |
| 20090321887 | METHOD OF FABRICATING AN ELECTROMECHANICAL STRUCTURE INCLUDING AT LEAST ONE MECHANICAL REINFORCING PILLAR - The invention relates to a method of fabricating an electromechanical structure presenting a first substrate ( | 12-31-2009 |
| 20090325335 | HETEROGENEOUS SUBSTRATE INCLUDING A SACRIFICIAL LAYER, AND A METHOD OF FABRICATING IT - The invention relates to a method of making a component from a heterogeneous substrate comprising first and second portions in at least one monocrystalline material, and a sacrificial layer constituted by at least one stack of at least one layer of monocrystalline Si situated between two layers of monocrystalline SiGe, the stack being disposed between said first and second portions of monocrystalline material, wherein the method consists in etching said stack by making:
| 12-31-2009 |
| 20100029031 | METHOD OF FABRICATING A MEMS/NEMS ELECTROMECHANICAL COMPONENT - The invention relates to a method of fabricating and electromechanical device on at least one substrate, the device including at least one active element and wherein the method comprises:
| 02-04-2010 |
| 20100154543 | Microsystem, More Particularly a Microgyrometer, With at Least Two Mechanically Coupled Oscillating Masses - The microsystem achieved in a flat substrate and comprises two oscillating masses connected to the substrate by suspension springs. The oscillating masses are coupled by a rigid coupling bar so as to produce an anti-phase movement of said oscillating masses when excitation of the latter is performed in a predefined excitation direction. The coupling bar is connected to intermediate zones of the corresponding suspension springs arranged on opposite sides of the oscillating masses. The intermediate zones are arranged between a first end of the suspension springs fixed to the corresponding oscillating mass, and a second end of the suspension springs fixed to the substrate by a corresponding anchoring point. | 06-24-2010 |
| 20100190301 | CAVITY CLOSURE PROCESS FOR AT LEAST ONE MICROELECTRONIC DEVICE - A process for closure of at least one cavity intended to encapsulate or be part of a microelectronic device, comprising the following steps:
| 07-29-2010 |
| 20110129757 | FUEL CELL WITH MEMBRANE/ELECTRODE STACK PERPENDICULAR TO THE SUPPORT SUBSTRATE AND METHOD FOR PRODUCING - A fuel cell includes at least one stack the main elements whereof are perpendicular to a support substrate. This stack is provided with an electrolytic membrane situated between a first and second electrode. The first and second electrodes each include a catalytic layer in contact with the electrolytic membrane. Each electrode includes an electrically conductive porous diffusion layer, and each stack is inserted between electrically conductive first and second support partitions perpendicular to the support substrate and constituting current collectors of the stack. The support partitions are electrically insulated from one another. | 06-02-2011 |
| 20110220470 | Electromechanical Actuator with Interdigitated Electrodes - A micromachined electromechanical (MEMS) actuator including, for example, an electrostatically actuated electrical switch, is provided, including a first set of conducting plates forming part of the movable element of the switch, interdigitated with a set of conducting plates forming part of the substrate. The plates are, in principle, vertical relative to the surface of the substrate; they are in partial heightwise overlap and a control voltage applied between the two sets of plates exerts a vertical force acting so as to move the movable element closer to the substrate. The conducting plates of the movable element are connected to one another by conducting end crosspieces connecting the ends of these plates so as to surround, laterally, the stationary conducting plates. The distance separating one stationary plate end from the mobile crosspiece is the same at both ends so that the forces exerted in the elongation direction of the plates cancel out. This distance is preferably the same for all the plates. | 09-15-2011 |
