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Balma
Frank Balma, Monte Sereno, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080314320 | Chamber Mount for High Temperature Application of AIN Heaters - A susceptor for high temperature semiconductor processing is provided. The susceptor includes a substrate support joined to a hollow shaft having a pair of ports to allow an inert gas to be purged through an internal volume of the shaft. Some embodiments of the susceptor include a chamber mount to support the shaft within a processing chamber and a chamber mount insert disposed within the chamber mount. In these embodiments the chamber mount insert includes the ports. The chamber mount insert can also include a thermocouple tube with a fitting to seal around the thermocouple and to impart an upward pressure to the thermocouple to keep the thermocouple properly seated within the substrate support. The chamber mount insert can also include electrical connectors with glass-to-metal seals. | 12-25-2008 |
| 20100177454 | Electrostatic chuck with dielectric inserts - An electrostatic chuck with dielectric inserts provides conveyance of cooling gas while eliminating arc path to a workpiece surface. The electrostatic chuck includes the workpiece surface configured to support a substrate such as a semiconductor wafer, a plenum configured to carry a cooling gas, and a plurality of dielectric inserts configured to provide communication of the cooling gas between the plenum and the workpiece surface. The dielectric inserts may comprise a passage to provide the communication of the cooling gas. The dielectric inserts may be further configured to prevent line-of-sight between the workpiece surface of the electrostatic chuck and a conducting surface within the electrostatic chuck. | 07-15-2010 |
Phillip J. Balma, Salinas, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20090094160 | Portable digital content device and methods for use therewith - A portable digital content device and methods for use therewith are disclosed. In one embodiment, a portable digital content device and method are disclosed for tracking usage activity to support digital asset management in a mobile environment. In another embodiment, an offline/disconnected advertisement inventory management and advertisement decision system and method are disclosed. While these systems and methods can be used with any suitable portable digital content device, an exemplary portable digital content device is disclosed, which can be used for purposes in addition to or instead of implementing the usage activity tracking and advertisement decision system functions. Any of the embodiments described herein can be used alone or in combination. | 04-09-2009 |
Phillip Jeffrey Balma, Salinas, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20100332586 | SYSTEM AND METHOD OF PREDICTIVE DATA ACQUISITION - Systems and methods of predictive data acquisition are disclosed. A personal proxy server is configured to acquire first data in response to a first request to access the first data and to acquire second data prior to receiving a second request to access the second data. The first request and the second request are received from a common source. The personal proxy server is also configured to store the acquired first data and the acquired second data so that the acquired first data and the acquired second data are accessible to the personal proxy server. | 12-30-2010 |