Patent application number | Description | Published |
20080271384 | CONDITIONING TOOLS AND TECHNIQUES FOR CHEMICAL MECHANICAL PLANARIZATION - Tools for conditioning chemical mechanical planarization (CMP) pads comprise a substrate with abrasive particles coupled to at least one surface. The tools can have various particle and bond configurations. For instance, abrasive particles may be bonded (e.g., brazed or other metal bond technique) to one side, or to front and back sides. Alternatively, abrasive particles are bonded to a front side, and filler particles coupled to a back side. The abrasive particles can form a pattern (e.g., hexagonal) and have particle sizes that are sufficiently small to penetrate pores of a CMP pad during conditioning, leading to fewer defects on wafers polished with the conditioned CMP pad. Grain bonding can be accomplished using brazing films, although other metal bonds may be used as well. Also, balanced bond material (e.g., braze on both sides) allows for low out-of-flatness value. | 11-06-2008 |
20090053980 | Optimized CMP Conditioner Design for Next Generation Oxide/Metal CMP - A study of several key conditioner design parameters has been conducted. The purpose was to improve conditioner performance by considering factors such as wafer defects, pad life, and conditioner life. For this study, several key conditioner design parameters such as diamond type, diamond size, diamond shape, diamond concentration and distribution, were selected to determine their effect on CMP performance and process stability. Experimental validations were conducted. Conditioner specifications were matched to each specific CMP environment (intended application) in order to improve process stability and CMP performance particularly for emerging technology nodes. Several conditioner designs were developed and run successfully in the field. Significant planarity improvement for a 300 mm CMP process was achieved in accordance with one embodiment, and an increase of pad life and wafer polish rate was simultaneously achieved with another embodiment. | 02-26-2009 |
20120060426 | Conditioning Tools and Techniques for Chemical Mechanical Planarization - Tools for conditioning chemical mechanical planarization (CMP) pads comprise a substrate with abrasive particles coupled to at least one surface. The tools can have various particle and bond configurations. For instance, abrasive particles may be bonded (e.g., brazed or other metal bond technique) to one side, or to front and back sides. Alternatively, abrasive particles are bonded to a front side, and filler particles coupled to a back side. The abrasive particles can form a pattern (e.g., hexagonal) and have particle sizes that are sufficiently small to penetrate pores of a CMP pad during conditioning, leading to fewer defects on wafers polished with the conditioned CMP pad. Grain bonding can be accomplished using brazing films, although other metal bonds may be used as well. Also, balanced bond material (e.g., braze on both sides) allows for low out-of-flatness value. | 03-15-2012 |
Patent application number | Description | Published |
20090139660 | Tyre Building Drum - A tyre building drum, wherein two coaxial half-drums move in opposite directions along a common axis, and each half-drum has an expandible bead clamping device defined by a ring of sectors, each having a radial rod; the sectors are movable to and from an expanded position, clamping a respective bead bundle, by an actuating device having a powered body movable back and forth along the axis and supporting a number of individual guide members, each of which is connected positively to the radial rod of a respective sector to move the relative sector to and from the expanded position in response to axial displacements of the powered body. | 06-04-2009 |
20100175813 | TYRE CARCASS FORMING METHOD AND DRUM - To form a tyre carcass, a body ply is wound about a drum, which has two half-drums movable axially in opposite directions to and from a centre plane of the drum, and having respective turn-up bladders, on each of which is laid a respective annular lateral portion of the body ply; each annular lateral portion being turned up about a respective bead bundle and onto a sidewall of a toroidal-shaped annular central portion of the body ply by inflating the relative turn-up bladder and controlling distension of a given annular portion of the turn-up bladder so that, when inflation is completed, the annular portion assumes a given final position, in which an intermediate portion of the turn-up bladder rolls outwards along the relative sidewall of the annular central portion of the body ply. | 07-15-2010 |
20120111480 | Tire Carcass Building Method And Drum - To build a tyre carcass, a tubular carcass body is formed about a building drum, which has a longitudinal axis, and an outer surface coaxial with the longitudinal axis and defined at least partly by a ring of longitudinal articulated rods lying in respective planes of a sheaf of planes through the longitudinal axis; the building drum locking two bead bundles to the tubular carcass body and torus-shaping the tubular carcass body by moving and/or deforming the articulated rods in their planes. | 05-10-2012 |
20150059962 | METHOD OF BUILDING A TIRE - A method of building a tire onto a tire building drum is described. The method includes the steps of: applying one or more tire building components onto the drum to form a tire carcass having carcass ends; wherein the drum has an inboard section, a center section and an outboard section. The inboard section has a rotating spindle and a sliding shaft, wherein the sliding shaft is slidable within the spindle. The inboard section has a radially expandable bead lock mounted on the spindle, said center section mounted to a hub, wherein the hub is mounted on the sliding shaft. The center section has a plurality of tiles mounted thereon that are radially expandable, wherein the outboard section of the drum is mounted on a distal end of the sliding shaft, wherein the outboard section further has a radially expandable bead lock; wherein the center section and the outboard section are axially movable by sliding of the sliding shaft. The method further includes the steps of: placing a first and second bead around the tire carcass on the drum so that the carcass ends of the tire carcass extend laterally outward of the beads; radially expanding the first and second bead locks into engagement with the first and second bead; and expanding the carcass located between the bead locks radially outward by radially expanding a center section of the tire building drum while moving only the bead lock on the outboard section axially inward towards the inboard section. | 03-05-2015 |
20150059984 | TIRE BUILDING DRUM - A tire building drum is described that includes an inboard section, a center section and an outboard section. The inboard section has a rotating spindle and a sliding shaft, and the sliding shaft is slidable within the spindle. The inboard section further includes a radially expandable bead lock device mounted on the spindle. The center section has an internal hub mounted on the sliding shaft and further comprises a plurality of tiles that are radially expandable. The outboard section of the drum is mounted on a distal end of the sliding shaft, and further includes a radially expandable bead lock device. The center section and the outboard section are each axially movable by sliding of the sliding shaft. | 03-05-2015 |