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Bahng
Kenneth J. Bahng, Cupertino, CA US
| Patent application number | Description | Published |
|---|---|---|
| 20080198895 | SUBSTRATE TEMPERATURE MEASUREMENT BY INFRARED TRANSMISSION - A method and apparatus for measuring a substrate temperature during a thermal process are provided. In one embodiment, an apparatus for measuring a substrate temperature during a thermal process includes an evacutable chamber, a substrate heater positioned to heat a substrate disposed in the chamber, and a sensor positioned to receive energy transmitted through the substrate while the substrate is heated by the substrate heater, wherein the sensor is configured to detect a metric indicative of transmittance. In another embodiment, a method for measuring a substrate temperature includes heating a substrate disposed in a chamber, detecting a change in transmittance of the substrate while heating, and determining a temperature of the substrate based on the change in transmittance. | 08-21-2008 |
| 20100133255 | APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM ETCHED SUBSTRATES - An apparatus for removing volatile residues from a substrate is provided. In one embodiment, an apparatus for removing halogen-containing residues from a substrate includes a chamber suitable for operating maintaining a vacuum therein and a heat module positioned to heat a substrate disposed in the chamber. The apparatus for removing halogen-containing residues from a substrate also includes at least one of A) a temperature controlled pedestal having a projection extending radially therefrom suitable for supporting the temperature control pedestal on a ledge of the chamber body, the projection thermally isolating the base from the chamber body; B) a pair of substrate holders that include two support flanges extending radially inward from an inner edge of an arc-shaped body, each support flange having a substrate support step that includes a sloped landing; or C) a domed window. | 06-03-2010 |
Sam-Yong Bahng, Sungnam-Si KR
| Patent application number | Description | Published |
|---|---|---|
| 20090180346 | PORTABLE DATA STORAGE APPARATUS - A memory card includes a non-volatile memory; and a power management unit for receiving an external supply voltage to supply an operating voltage to the non-volatile memory. The power management unit boosts/bypasses the external supply voltage based on whether the external supply voltage is lower than a detection voltage and then outputs the boosted/bypassed voltage as the operating voltage of the non-volatile memory. | 07-16-2009 |
Seungjae Bahng, Deajeon KR
| Patent application number | Description | Published |
|---|---|---|
| 20100246548 | BASE STATION, METHOD FOR MANAGING CELL, METHOD FOR DETECTION SIGNAL, TERMINAL AND METHOD FOR TRANSMITTING SIGNAL THEREOF - A base station according to an exemplary embodiment of the present invention includes: a receiver receiving environment information of a first terminal from the first terminal positioned at a cell boundary and receiving usable resource information from a neighbor base station; a resource allocator allocating a resource to the first terminal on the basis of the usable resource information; and a transmitter transmitting information on the resource allocated to the first terminal to the neighbor base station. | 09-30-2010 |