Patent application number | Description | Published |
20090035767 | PRIMER FOR BACTERIUM GENOME AMPLIFICATION REACTION - A primer or a primer set can efficiently amplify the gene sequence of 16S rRNA of a target bacterium out of selected sixty two bacterium species. At least one of the primers having a base sequence selected from sequences No. 1 through No. 6 is employed as bacterium genome amplification reaction primer: | 02-05-2009 |
20090313808 | ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS - A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate. | 12-24-2009 |
20090313809 | ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS - A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element. | 12-24-2009 |
20090320274 | ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS - A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate. | 12-31-2009 |
20120146454 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER APPARATUS AND METHOD FOR ADJUSTING ITS SENSITIVITY - A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. | 06-14-2012 |
20120266682 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity. | 10-25-2012 |
20130071964 | METHOD OF MANUFACTURING AN ELECTROMECHANICAL TRANSDUCER - Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer is formed on a first substrate, a barrier wall is formed by removing a part of the first insulating layer, and a second insulating layer is formed on a region of the first substrate after the part of the first insulating layer has been removed. Next, a gap is formed by bonding a second substrate on the barrier wall, and a vibration film that is opposed to the second insulating layer via the gap is formed from the second substrate. In the forming of the barrier wall, a height on a gap side in a direction vertical to the first substrate becomes lower than a height of a center portion. | 03-21-2013 |
20130302934 | METHOD OF MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER - Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess. | 11-14-2013 |
20130313663 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - Provided is a capacitive electromechanical transducer manufactured by fusion bonding, which is capable of enhancing the performance by reducing fluctuations in initial deformation among diaphragms caused at positions having difference boundary conditions such as the bonding area. The capacitive electromechanical transducer includes a device, the device including at least one cellular structure including: a silicon substrate; a diaphragm; and a diaphragm supporting portion configured to support the diaphragm so that a gap is formed between one surface of the silicon substrate and the diaphragm. The device has, in its periphery, a groove formed in a layer shared with the diaphragm supporting portion. | 11-28-2013 |
20140313861 | TRANSDUCER, METHOD FOR MANUFACTURING TRANSDUCER, AND OBJECT INFORMATION ACQUIRING APPARATUS - A transducer includes at least one element including a plurality of cells. Each of the cells includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported. First and second cells of the plurality of cells in the element have the gaps that communicate with each other, and the first cell and a third cell in the element have the gaps that do not communicate with each other. | 10-23-2014 |