Patent application number | Description | Published |
20120164834 | Variable-Density Plasma Processing of Semiconductor Substrates - Methods and hardware for generating variable-density plasmas are described. For example, in one embodiment, a process station comprises a showerhead including a showerhead electrode and a substrate holder including a mesa configured to support a substrate, wherein the substrate holder is disposed beneath the showerhead. The substrate holder includes an inner electrode disposed in an inner region of the substrate holder and an outer electrode being disposed in an outer region of the substrate holder. The process station further comprises a plasma generator configured to generate a plasma in a plasma region disposed between the showerhead and the substrate holder, and a controller configured to control the plasma generator, the inner electrode, the outer electrode, and the showerhead electrode to effect a greater plasma density in an outer portion of the plasma region than in an inner portion of the plasma region. | 06-28-2012 |
20130092086 | MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER - A system for reducing parasitic plasma in a semiconductor process comprises a first surface and a plurality of dielectric layers that are arranged between an electrode and the first surface. The first surface and the electrode have substantially different electrical potentials. The plurality of dielectric layers defines a first gap between the electrode and one of the plurality of dielectric layers, a second gap between adjacent ones of the plurality of dielectric layers, and a third gap between a last one of the plurality of dielectric layers and the first surface. A number of the plurality of dielectric layers and sizes of the first gap, the second gap and the third gap are selected to prevent parasitic plasma between the first surface and the electrode during the semiconductor process. | 04-18-2013 |
20130327272 | DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS USING DC SELF-BIAS VOLTAGE - A substrate processing system includes a processing chamber including a showerhead, a plasma power source and a pedestal spaced from the showerhead to support a substrate. A filter is connected between the showerhead and the pedestal. A variable bleed current circuit is connected between the filter and the pedestal to vary a bleed current. A controller is configured to adjust a value of the bleed current and configured to perform curve fitting based on the bleed current and DC self-bias voltage to estimate at least one of electrode area ratio, Bohm current, and radio frequency (RF) voltage at a powered electrode. | 12-12-2013 |
20140238608 | CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR - A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent to a first surface of the back plate and includes a gas diffusion surface. An electrode is arranged in one of the back plate and the face plate and is connected to one or more conductors. A gas plenum is defined between the back plate and the face plate and is in fluid communication with the gas channel. The back plate and the face plate are made of a non-metallic material. | 08-28-2014 |
Patent application number | Description | Published |
20100095898 | MANUAL LITTER BOX - A manual litter box is disclosed which provides various advantages over the prior art. In particular, in one embodiment, the manual litter box is configured to use a disposable cartridge which may include a litter compartment and a waste compartment. In another embodiment, the cartridge may be non-compartmentalized. The cartridge may be disposable, thus eliminating the need for the user to clean the litter tray and handle heavy litter containers. In other embodiments, the system includes a rake assembly configured with a manual shuttle chassis drive assembly that is protected from contamination. In accordance with another embodiment of the invention, the manual litter box is configured to be used with all types of litter including crystal type litter. | 04-22-2010 |
20110265728 | Manual Litter Box - A manual litter box is disclosed which provides various advantages over the prior art. In particular, in one embodiment, the manual litter box is configured to use a disposable cartridge which may include a litter compartment and a waste compartment. In another embodiment, the cartridge may be non-compartmentalized. The cartridge may be disposable, thus eliminating the need for the user to clean the litter tray and handle heavy litter containers. In other embodiments, the system includes a rake assembly configured with a manual shuttle chassis drive assembly that is protected from contamination. In accordance with another embodiment of the invention, the manual litter box is configured to be used with all types of litter including crystal type litter. | 11-03-2011 |
20120298049 | LIGHT PROJECTING PET TOY - A laser pet toy including a light source with a focused beam of light of a predetermined shape and programmable random travel across an opaque surface such as a floor or wall to create an engaging image for a pet to play with the image for entertainment or exercise. | 11-29-2012 |
20150110913 | ICE CREAM SCOOP - The present disclosure provides an ergonomically designed solid single piece ice cream scoop emerging from a die-cast or forged too made out of a metal that is finished and polished to eliminate the rough edges from the die casting or forged process with superior mechanical leverage to scoop out the hardest ice cream from a container. | 04-23-2015 |
Patent application number | Description | Published |
20090153198 | LOW-LEAKAGE SWITCH FOR SAMPLE AND HOLD - An integrated electronic device includes a sample and hold stage. The sample and hold stage has a sampling capacitor (C) for an input voltage at an input node (Vin), a first switch (S | 06-18-2009 |
20090322292 | LINEAR VOLTAGE REGULATOR WITH ACCURATE OPEN LOAD DETECTION - A linear voltage regulator is provided which has a pair of complementary power transistors connected “back to back” in series between a voltage input and a voltage output. A current sense circuit is connected in parallel across one of the power transistors, such as the one connected to the voltage input. The current sense circuit includes a current sense resistor. A reference current path has a reference resistor connected in series with a current sink between the voltage input and a reference terminal, usually ground. A comparator has a first input connected to a terminal of the current sense resistor and a second input connected to a node between the reference resistor and the current sink. The comparator compares the voltage drop across the current sense resistor with the constant voltage drop across the reference resistor and provides an output signal indicative of an open load condition when the voltage drop across the current sensor falls below that of across the reference resistor. As long as the voltage drop in the current sense circuit remains small, i.e. less than app. 0.7V, the current flowing through the bulk diode of the power transistor remains negligible and the entire output current flows through the current sense circuit. For higher output currents the voltage drop across the current sense circuit is limited by the parallel bulk diode of the power transistor. With this approach, the current sense resistor can be dimensioned to generate a relatively high voltage drop of e.g. 100 mV, and a high accuracy of open load detection is achieved without the requirement for a high precision comparator. | 12-31-2009 |
20100264981 | CHARGE PUMP WITH SELF-TIMING AND METHOD - With conventional charge pumps, significant noise is present due at least in part to large changes in the supply current. To combat this problem, a charge pump is provided that includes a number of stages. These stages are coupled to receive periodic alternating voltages having a phase shift with respect to each other so that the changes in the supply current are reduced, which reduces noise. | 10-21-2010 |
Patent application number | Description | Published |
20080229704 | ARCHITECTURAL MEMBRANE STRUCTURES AND METHODS FOR PRODUCING THEM - An architectural membrane structure preferably includes an aerogel material disposed, for example, between two outer layers. The aerogel can be in monolithic or granular form or can be present in an aerogel composite. A method for manufacturing an architectural membrane structure includes securing an insert, e.g., an aerogel blanket, composite or granular aerogel, between a first and second layer. The architectural membrane structure can be used as a tensioned panel in envelopes such as roofing, overhangs, canopies or in other architectural or structural fabric applications. | 09-25-2008 |
20120009834 | ARCHITECTURAL MEMBRANE AND METHOD OF MAKING SAME - An architectural membrane assembly including an interior membrane layer having a first inner surface, an exterior membrane layer having a second inner surface, an aerogel material disposed between the interior membrane layer and the exterior membrane layer, wherein the first and second inner surfaces are adjacent to the aerogel material and a vapor barrier deposited on one of the first and second inner surfaces. | 01-12-2012 |
20120168095 | Insulated Window Shade - The present invention broadly relates to insulated window shades, and more particularly to window shades of various designs which incorporate an aerogel blanket. | 07-05-2012 |