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Ashizawa, JP

Hiroaki Ashizawa, Kitakyushu-Shi JP

Patent application numberDescriptionPublished
20090196989SHARP BLADE AND ITS MANUFACTURING METHOD - A sharp-edged blade of the invention includes a circular thin-plate-shaped abrasive grain layer 08-06-2009

Hiroaki Ashizawa, Fukuoka JP

Patent application numberDescriptionPublished
20090233126Composite Structure - According to the present invention, a structure made of yttrium oxide is formed on a surface of a substrate comprises yttrium oxide polycrystals as a main component, a boundary layer made of hyaline does not substantially exist on a boundary face between crystals which form the structure, and both a cubic system and a monoclinic system exist in the crystal system of the yttrium oxide polycrystals. With this, it is possible to adjust the hardness of the structure made of yttrium oxide formed on a surface of a substrate to be larger than that of an yttrium oxide sintered body.09-17-2009
20090239454CMP CONDITIONER AND PROCESS FOR PRODUCING THE SAME - A CMP conditioner having excellent corrosion resistance around abrasive grains includes a grindstone base having, formed on one side, an abrasive grain layer including abrasive grains fixed in a metallic bonding phase treated to form a first protective layer comprising an oxide on the surface of the metallic bonding phase of the abrasive grain layer by the sol-gel method. Subsequently, an aerosol obtained by dispersing fine particles of a brittle material in a gas is jetted and caused to strike on the surface of the first protective layer to form a second protective layer comprising a thick oxide film.09-24-2009

Hiroaki Ashizawa, Nirasaki-Shi JP

Patent application numberDescriptionPublished
20090142513FILM FORMATION METHOD, CLEANING METHOD AND FILM FORMATION APPARATUS - A treatment gas is supplied to form a Ti-based film on a predetermined number of wafers W while setting a temperature of a susceptor 06-04-2009

Hiroaki Ashizawa, Ebina-Shi JP

Patent application numberDescriptionPublished
20090166340Method and apparatus for perforating printed circuit board - A method and an apparatus for perforating a printed circuit board are provided so that the processing efficiency and the board densification can be improved. In test processing, a conductor layer 07-02-2009

Patent applications by Hiroaki Ashizawa, Ebina-Shi JP

Hiroaki Ashizawa, Fukuoka-Ken JP

Patent application numberDescriptionPublished
20080274347Method for Producing Film Using Aerosol, Particles Mixture Therefor, and Film and Composite Material - There is disclosed a method for producing a film with use of aerosol which is capable of forming a film of satisfactory quality at a high film formation rate. In the method, first, a carrier gas is mixed into a particle mixture which comprises raw fine particles comprising a brittle material as a main component and having a 50% average particle diameter of 0.010 μm to 1.0 μm on a volume basis, and auxiliary particles comprising a brittle material of the same type as or a different type from the brittle material of the raw fine particles as a main component and having a 50% average particle diameter of 3.0 μm to 100 μm on a volume basis, to form an aerosol. The aerosol is ejected onto the surface of a substrate to make the particle mixture come into collision with the substrate, so that the collision crushes or deforms the raw fine particles to form a film on the substrate.11-06-2008
20080274348Method for Producing Coating Film Using Aerosol, Fine Particles for Use Therein, and Coating Film and Composite Material - There is disclosed a method for producing a film with use of aerosol which is capable of forming a film of satisfactory quality at an extremely high film formation rate. In the method, first, a carrier gas is mixed into fine particles comprising a brittle material as a main component and having a 50% average particle diameter of 100 nm to 300 nm on a number basis to form an aerosol. The aerosol is ejected onto the surface of a substrate to make the fine particles come into collision with the substrate, so that the collision crushes or deforms the fine particles to form a film on the substrate.11-06-2008

Hiroyuki Ashizawa, Kanagawa JP

Patent application numberDescriptionPublished
20120100955TRACTION TRANSMISSION CAPACITY CONTROL DEVICE USED IN DRIVE FORCE DISTRIBUTION DEVICE - A traction transmission capacity control device used in a drive force distribution device includes a second-roller turning means configured to turn the second roller around an eccentric axis deviated from a rotation axis of the second roller, and thereby to control a mutual radially-pressing force between the first roller and the second roller so that a traction transmission capacity is controlled. The traction transmission capacity control device further includes a one-direction turning-stop-position detecting means configured to detect a position at which the turning of the second roller stops after the second-roller turning means starts to turn the second roller in one direction; an another-direction turning-stop-position detecting means configured to detect a position at which the turning of the second roller stops after the second-roller turning means starts to turn the second roller in another direction; and a second-roller turning-motion reference-point setting means configured to set a center position between the position detected by the one-direction turning-stop-position detecting means and the position detected by the another-direction turning-stop-position detecting means, as a turning-motion reference point of the second roller. The traction transmission capacity control device is configured to perform a traction transmission capacity control based on a second-roller turning amount given from the turning-motion reference point of the second roller.04-26-2012

Hiroyuki Ashizawa, Yokohama-Shi JP

Patent application numberDescriptionPublished
20100299011CONTROLLER AND CONTROLLING METHOD OF ELECTRIC VEHICLE - A controller of electric vehicle includes: sensor sensing vehicle information; torque target value setter; torque command value calculator; first paragraph calculator implementing first filtering treatment of the torque command value, the first filtering treatment including transmission characteristic having hand pass filter characteristic; second paragraph calculator implementing second filtering treatment of motor revolution speed which is one of pieces of the vehicle information, the second filtering treatment including: the transmission characteristic having band pass filter characteristic, and model of a transmission characteristic between: torque input to the vehicle, and the motor revolution speed; torque target value calculator calculating the second torque target value. Based on the first torque target value and the second torque target value, the torque command value calculator calculates the torque command value. In the second filtering treatment, the second paragraph calculator uses attenuation coefficient which is larger than identification value of the model of the transmission characteristic.11-25-2010

Patent applications by Hiroyuki Ashizawa, Yokohama-Shi JP

Katsuya Ashizawa, Saitama JP

Patent application numberDescriptionPublished
20100293753VEHICLE DOOR OUTER HANDLE DEVICE - In a vehicle door outer handle device, an inwardly recessed housing recess is provided in a base member fixed to a vehicle door; an outer handle having an operation portion is pivotably supported on the base member while being able to pivot to an operated position in accordance with pulling of the operation portion and being spring-biased toward a non-operated position side, at least part of the operation portion being disposed in the housing recess; and a cylinder lock is mounted on the base member so that a key hole is covered at least in a state in which the outer handle is in the non-operated position. In the outer handle device, a cover member is detachably mounted on the base member so as to cover the key hole, the cover member being formed as a separate body from the outer handle so as to form part of the housing recess while forming a design surface of the base member. Accordingly, it is possible to provide a vehicle door outer handle device that makes it difficult for the position of a cylinder lock to be identified.11-25-2010

Katsuya Ashizawa, Wako JP

Patent application numberDescriptionPublished
20110101709DOOR HANDLE STROKE CHANGE STRUCTURE - A door handle stroke change structure includes a latch mechanism, an electric latch drive mechanism, a mechanical latch drive mechanism, and an operation member which operates the electric latch drive mechanism and the mechanical latch drive mechanism. The operation member is moveable among a closed position, a first position at which the electric latch drive mechanism is operated, and a second position at which the mechanical latch drive mechanism is operated. A motion to move the operation member from the closed position to the first position is a same motion as a motion to move the operation member from the closed position to the second position. A movement amount of the operation member from the closed position to the first position is greater than a movement amount of the operation member from the closed position to the second position by the motion.05-05-2011

Kazuhide Ashizawa, Ibaraki JP

Patent application numberDescriptionPublished
20090136564MICELLES - The present invention provides micelles, solutions comprising micelles, methods for preparing micelles, and methods for delivering micelles to patients. The micelles have fixed, preselected hydrodynamic diameters and are formed from basic or acidic amphiphilic compounds.05-28-2009

Patent applications by Kazuhide Ashizawa, Ibaraki JP

Kazuhide Ashizawa, Tsukuba JP

Patent application numberDescriptionPublished
200802344851-Benzyl-4-[ (5,6-Dimethoxy-1-Indanon) -2-Yl] Methylpiperidine Hydrobromide or Crystals Thereof - 1-Benzyl-4-[(5,6-dimethoxy-1-indanon)-2-yl]methylpiperidine hydrobromide or a solvate thereof.09-25-2008
200901710941-BENZYL-4-[(5, 6-DIMETHOXY- 1- INDANON)- 2- YL]-METHYL PIPERIDINE P-TOLUENESULFONATE OR CRYSTAL THEREOF - 1-Benzyl-4-[(5,6-dimethoxy-1-indanon)-2-yl]methylpiperidine p-toluenesulfonate or a solvate thereof.07-02-2009

Keiichirou Ashizawa, Mobara JP

Patent application numberDescriptionPublished
20090033609Display Device - The present invention provides a technique which can prevent the disconnection of lines in the vicinity of terminal portions formed on an end portion of a TFT substrate of a liquid crystal display panel. Terminal portions for supplying electric signals to scanning lines are formed on a TFT substrate. Auxiliary lines and connection lines are formed between the terminal portions and the scanning lines in order from the terminal portions. A line width of the auxiliary line is set to 20 μm or more and the auxiliary lines extend to a region where the TFT substrate is covered with the color filter substrate. Although the connection lines connect the auxiliary lines and the scanning lines, for making the resistances from the terminal portions uniform, a line width of the connection line at a center portion of a flexible printed circuit board is set to a small value and a line width of the connection line at a peripheral portion of the flexible printed circuit board is set to a large value. At the center portion of the flexible printed circuit board, the line width of the connection line is set smaller than a line width of the auxiliary line. Due to such a constitution, it is possible to prevent the occurrence of the disconnection in the vicinity of the terminal portions attributed to a glass debris or the like.02-05-2009

Kengo Ashizawa, Nirasaki-Shi JP

Patent application numberDescriptionPublished
20080203367ELEVATING DEVICE - In an elevating device for raising and lowering a heavy member by rotating a rotation axis extending in a direction crossing a vertical direction, the rotation axis has one end portion to which the heavy member is connected. The rotation axis includes a bendable portion adapted to transmit a rotational force. A leading end portion of the free end portion is vertically suspended from the bendable portion of the rotation axis regardless of a stop position of the rotation axis. A rotation applied by the heavy member to the rotation axis is suppressed by the suspended leading end portion. With such an elevating device, unexpected rotation of the rotation axis is positively suppressed in a cost-effective manner.08-28-2008

Masami Ashizawa, Yokosuka JP

Patent application numberDescriptionPublished
20080216405CARBONIZATION AND GASIFICATION OF BIOMASS AND POWER GENERATION SYSTEM - Biomass, including waste biomass, is gasified by a process in which the biomass is first carbonized, and the char and pyrolysis gas from the carbonizer are respectively fed to a high temperature gasifying part and a gas reformer part of a two-stage gasifier A gasifying agent is continuously fed to the gasifying part, and intermittently fed to the gas reformer, to maintain the temperature required to avoid tar formation in the gas reformer stage. Multiple carbonization chambers are operated in rotation. When the carbonization/gasification apparatus is used to provide fuel to an electric power generator set, exhaust heat from the generator power plant is fed back to the carbonizer, and can be supplemented by exchange of heat from the gas delivered to generator power plant from the outlet of the gasifier.09-11-2008

Masayuki Ashizawa, Fuji-Shi JP

Patent application numberDescriptionPublished
20100064814FAILURE DETECT DEVICE AND FAILURE DETECT METHOD - A failure detect device detects the presence of a failure in a peripheral member of a rotary shaft by analyzing a vibration generated in a device provided with the rotary shaft when the rotary shaft is rotated. A vibration detection unit detects the vibration of the device, and a rotation speed detection unit detects a rotation speed of the rotary shaft. An analysis unit calculates a frequency spectrum of the vibration of the device and determines an actually measured vibration level at each vibration order by dividing a frequency component of the calculated frequency spectrum by the rotation speed of the rotary shaft. A detection unit detects the presence of a failure in the peripheral member on the basis of the actually measured vibration level at each vibration order.03-18-2010

Minoru Ashizawa, Tokyo JP

Patent application numberDescriptionPublished
20080309836Liquid Crystal Display Mounted With IC Tag and Method for Manufacturing the Same - A liquid crystal display with an IC tag in which information of an IC chip can be read from the surface of the liquid crystal display, while the IC chip can be mounted on the small-size liquid crystal display without lowering the attraction of design thereof. A common electrode is formed in a wide region of an upper electrode layer constituting the liquid crystal display. Antennas are formed in a region of an edge portion of the upper electrode layer where the common electrode is not formed, and within the region of a surface-side glass. An IC chip is placed out of the region of the surface-side glass. X-axis and Y-axis matrix electrodes are formed in a region of a lower electrode layer opposite to the common electrode.12-18-2008
20090009330RFID TAG MOUNTING CIRCUIT BOARD - An RFID tag mounting circuit board has a configuration in which an RFIC chip, a minimum antenna, a circuit which matches the impedance of the RFIC chip and that of the antenna are mounted on a printed circuit board. With this configuration, the area occupied by the antenna of an RFID tag is suppressed, and decrease in the component mounting density of the printed circuit board is suppressed. The RFID tag mounting circuit board is configured to be capable of managing the histories of all components on a per-printed-circuit-board basis by attaching a reading device for an RFIC chip to a chip mounter which mounts an IC chip.01-08-2009
20090261948MACHINE ELEMENT CONTROL APPARATUS USING RFID TAG AND MACHINE ELEMENT CONTROL USING THE SAME - In a machine element control method, when conducting maintenance and inspection of a machine element assembly such as a plant to be operated for a long period of time exceeding life of RFID tags, to enable use of the RFID tags to identify respective machine elements, new RFID tags are additionally attached and a correspondence with respect to the RFID tags are stored and verified.10-22-2009

Patent applications by Minoru Ashizawa, Tokyo JP

Misa Ashizawa, Tokyo JP

Patent application numberDescriptionPublished
20090039767METAL COMPLEX COMPOUND, MATERIAL FOR ORGANIC ELECTROLUMINESCENCE DEVICE AND ORGANIC ELECTROLUMINESCENCE DEVICE USING THE SAME - Provided are an organic electroluminescence device which: can emit blue light having a short wavelength and a high color purity; and can be combined with any other light emitting compound to emit white light and a metal complex compound for realizing the device, and a material for an organic electroluminescence device. The metal complex is of a specific structure having a tridentate chelate ligand and an electron withdrawing group. The material for an organic electroluminescence device is formed of the metal complex compound. The organic electroluminescence device has an organic thin film layer formed of one or more layers including at least a light emitting layer, the organic thin film layer being interposed between a pair of electrodes. In the organic electroluminescence device, at least one layer of the organic thin film layer contains the metal complex compound, and emits light by applying a voltage between both the electrodes.02-12-2009
20090102363METAL COMPLEX COMPOUND, MATERIAL FOR ORGANIC ELECTROLUMINESCENCE DEVICE AND ORGANIC ELECTROLUMINESCENCE DEVICE USING THE SAME - Provided are an organic electroluminescence device which: can emit blue light having a short wavelength and a high color purity; and can be combined with any other light emitting compound to emit white light and a metal complex compound for realizing the device. The metal complex compound is of a specific structure having a tridentate chelate ligand and an electron withdrawing group. The organic electroluminescence device has an organic thin film layer formed of one or more layers including at least a light emitting layer, the organic thin film layer being interposed between a pair of electrodes. In the organic electroluminescence device, at least one layer of the organic thin film layer contains the metal complex compound, and emits light by applying a voltage between both the electrodes.04-23-2009

Shigeo Ashizawa, Tokyo JP

Patent application numberDescriptionPublished
20090289765Wireless identification tag - The present invention is aimed at providing a wireless identification tag which can save information with high reliability that is free from the possibility of being lost or falsified, is not broken or melt in the concrete, can expand directionality of an antenna, be distributed in a cement product to be in an appropriate condition for radio communication, and has good adhesion and affinity with cement or the like. A wireless identification tag 11-26-2009
20110109443WIRELESS IC TAG, MANAGEMENT SYSTEM USING SAME - A wireless IC tag to and from which data can be written and read between a writing/reading apparatus by way of wireless communication, wherein a ferroelectric memory using a ferroelectric having a power source unit for receiving a radio wave from outside and for generating an electric current by resonating with the radio wave and an antenna unit for carrying out wireless communication in a predetermined frequency bandwidth, and a UHF band communication antenna chip for receiving a radio wave of a UHF bandwidth are connected to be mounted on a substrate so that communication in a frequency band longer than the UHF band is carried out by the antenna unit of the ferroelectric memory and data is saved in the ferroelectric memory, and at the same time communication in the UHF band is carried out by the UHF band communication antenna chip and the data is saved in the ferroelectric memory.05-12-2011
20110115613WIRELESS IC TAG, CONCRETE STRUCTURAL OBJECT QUALITY MANAGEMENT SYSTEM USING SAME - A wireless IC tag 05-19-2011
20120092138DATA WRITING APPARATUS WRITING DATA TO WIRELESS IC TAGS - The present invention is aimed at providing an apparatus to firmly write data to wireless IC tags and to charge wireless IC tags having been written with data to the object to be charged. The data writing apparatus 1 includes a radio communication means 04-19-2012
20120098648DATA PROCESSING AND CHARGING APPARATUS FOR WIRELESS IC TAGS - The present invention provides a data processing and charging apparatus for wireless IC tags, which can align wireless IC tags in a given direction to supply/feed them to a data writing/reading unit, can eliminate information writing errors and reading errors, can be placed to a desired place being distant from the mixing/kneading tank for receiving the object to be charged with wireless IC tags, and can securely charge wireless IC tags to the object to be charged without causing blockade at the charging inlet.04-26-2012

Patent applications by Shigeo Ashizawa, Tokyo JP

Tadashi Ashizawa, Shizuoka JP

Patent application numberDescriptionPublished
20110172429STAT3 INHIBITOR CONTAINING QUINOLINECARBOXAMIDE DERIVATIVE AS ACTIVE INGREDIENT - The present invention provides a STATS inhibitor containing as an active ingredient, a quinolinecarboxamide derivative represented by the formula (I) (in the formula, W represents a bond or an alkylene chain; X represents O, S, or NR07-14-2011

Takatoshi Ashizawa, Kanagawa-Ken JP

Patent application numberDescriptionPublished
20090303622VIBRATING ELEMENT, VIBRATION ACTUATOR, LENS BARREL, CAMERA SYSTEM AND METHOD FOR DRIVING VIBRATION ACTUATOR - To provide a vibrating element which can be driven by a low voltage, a vibration actuator, a lens barrel, a camera system and a method for driving a vibration actuator. A vibrating element (12-10-2009

Takatoshi Ashizawa, Yokohama-Shi JP

Patent application numberDescriptionPublished
20090001852Piezoelectric actuator, piezoelectric actuator device, lens barrel, optical device and manufacturing method thereof - A piezoelectric actuator comprises a first piezoelectric element pre-polarized towards a first direction and displaceable towards an about orthogonal direction with respect to said first direction, a second piezoelectric element pre-polarized towards a direction about parallel to the first direction and displaceable towards a direction about parallel to said first direction, a relative moving member clamped by displacement of said first piezoelectric element and relatively moves by displacement of said second piezoelectric element.01-01-2009
20090134745Vibration Actuator, Lens Barrel, Camera System and Vibrating Element - A vibration actuator by which stable drive can be obtained, a lens barrel, a camera system and a vibrating element are provided. In first vibration mode and second vibration mode, vibrating elements of the vibration actuator can vibrate. Resonance frequency of the second vibration mode, which is different from the first vibration mode used for driving a relatively moving member, is prevented from being same as the frequency of the higher harmonic of a driving signal.05-28-2009
20090212662Vibration actuator, lens barrel and camera - A vibration actuator with good driving performance, and a lens barrel and camera equipped therewith, is provided. There is provided a vibration actuator comprising: an electromechanical conversion element that is excited by a driving signal; a vibrating body including a joining face, to which the electromechanical conversion element is joined, and a driving face, at which a vibration wave is produced by the excitation; and a relative motion member that is pressingly touched against the driving face, is driven by the vibration wave, and relatively moves with respect to the vibrating body, wherein at a first and a second portion of the electromechanical conversion element in a direction parallel to the joining face and orthogonal to a direction of the relative movement of the vibrating body and the relative motion member, thickness in a direction orthogonal to the joining face differs between the first portion and the second portion.08-27-2009
20100142064VIBRATION ACTUATOR, LENS BARREL AND CAMERA - A vibration actuator comprising: an electromechanical conversion element excited by a driving signal; an elastic body to which the conversion element is jointed and on a driving face of which vibration waves are generated by the excitation; and a relative moving element pressure-contacted with the driving face of the elastic body, and which is driven by the vibration waves, and wherein: a joining face of the conversion element which is joined to the elastic body has an electrode portion, and a joining strength improving portion which improves the joining strength between the elastic body and the conversion element; and the electrode portion is formed on at least one of two edge portions of the joining face, through the edge portions, an imaginary straight line pass, the line pass the improving portion and is orthogonal to a relative moving direction of the elastic body and the moving element.06-10-2010
20110096423PIEZOELECTRIC ACTUATOR, LENS BARREL AND OPTICAL DEVICE - A piezoelectric actuator having reduced sizes, a lens barrel and an optical device. A piezoelectric actuator is provided with: a first actuator including first piezoelectric elements to be displaced in a first direction; a second actuator, which includes second piezoelectric elements to be displaced in a second direction intersecting with the first direction, and is arranged in a direction intersecting with the first direction with respect to the first actuator; and a relative displacement member, which is arranged between the first actuator and the second actuator and can be relatively displaced in the first direction with respect to the first actuator.04-28-2011
20110280559VIBRATIONAL WAVE MOTOR, LENS BARREL AND CAMERA - A vibrational wave motor which can realize a suitable drive performance and can be driven quietly.11-17-2011
20120087023PIEZOELECTRIC ACTUATOR, LENS BARREL, AND CAMERA - Disclosed is a piezoelectric actuator which has an improved driving force or drive efficiency. Specifically disclosed is a piezoelectric actuator which is provided with: a plurality of piezoelectric members which have a first piezoelectric element capable of being displaced in a first direction and a second piezoelectric element capable of being displaced in a second direction intersecting the first direction, and which are divided into a plurality of groups; a relative movement member which has a contact surface that is in contact with the piezoelectric members, and which moves relatively to the piezoelectric members in the first direction; and a drive unit which, when piezoelectric members of one group among the plurality of groups are in contact with the contact surface, drives the first piezoelectric element of the piezoelectric members.04-12-2012

Patent applications by Takatoshi Ashizawa, Yokohama-Shi JP

Tetsuo Ashizawa, Kawasaki JP

Patent application numberDescriptionPublished
20090244988COMPILED MEMORY, ASIC CHIP, AND LAYOUT METHOD FOR COMPILED MEMORY - Each of memory blocks includes word line groups each having at least one of word lines, memory cells and bit lines. A decoder unit selects couple control units corresponding to the memory blocks to be accessed, and decodes an address signal to select any of the word line groups. A logic of the decoder unit is formed by assigning a bit of the address signal to identify the memory blocks and the couple control units lower than a bit of the address signal to identify the word line groups. Accordingly, the numbers of word lines disposed at the memory blocks can be equalized with each other, and lengths of the bit lines can be shortened. As a result, a wiring delay of each of the bit lines can be minimized, and an access time of a compiled memory can be shortened.10-01-2009
20100002778DATA TRANSFER SYSTEM - data transfer signal lines are provided between transmitting and receiving sides of data on n signal lines in order to reduce power consumption required for a data transfer even if the number of bits of data to be transferred increases. The transmitting side has an encoder for outputting a signal of a low potential to one signal line and a signal of a high potential to the other signal lines among the 01-07-2010

Patent applications by Tetsuo Ashizawa, Kawasaki JP

Tetsuo Ashizawa, Kanagawa JP

Patent application numberDescriptionPublished
20110051576Optical disk device - An LPP detection unit detects an LPP from a wobble signal. A correction unit obtains a difference set by performing processing of calculating a difference in signal level between an LPP-present sync pattern portion and a non-LPP sync pattern portion having the same polarity, and executes correction on an RF signal at a timing when the LPP is detected, by using the difference set. The LPP-present sync pattern portion is a sync pattern portion obtained when the LPP is detected at the timing of the sync pattern portion positioned at the head of a sync frame of the RF signal. The non-LPP sync pattern portion is a sync pattern portion obtained when no LPP is detected at the timing of the sync pattern portion of the sync frame. In the case of reproducing information recorded on a DVD-R/RW optical disk, the occurrence of errors due to the effect of the LPP can be reduced.03-03-2011

Toranosuke Ashizawa, Ibaraki-Shi JP

Patent application numberDescriptionPublished
20080200032POLISHING METHOD OF SEMICONDUCTOR SUBSTRATE - The present invention relates to a method of polishing a semiconductor substrate, comprising pressing a semiconductor substrate having a film to be polished that is held by a carrier onto a polishing cloth fixed on a revolving polishing table and supplying a polishing slurry to the space between the polishing cloth and the semiconductor substrate, wherein the end point of polishing is determined according to the change in the friction coefficient while the friction coefficient between the semiconductor substrate and the polishing cloth is measured. According to the present invention it is possible to measure friction coefficient accurately in polishing a semiconductor substrate and use the change thereof to determine the end point of polishing.08-21-2008

Toranosuke Ashizawa, Ibaraki-Ken JP

Patent application numberDescriptionPublished
20080271383ABRASIVE, METHOD OF POLISHING TARGET MEMBER AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE - To polish polishing target surfaces of SiO11-06-2008
20110312251Abrasive, Method of Polishing Target Member and Process for Producing Semiconductor Device - To polish polishing target surfaces of SiO12-22-2011

Patent applications by Toranosuke Ashizawa, Ibaraki-Ken JP

Toranosuke Ashizawa, Hitachinaka-Shi JP

Patent application numberDescriptionPublished
20090253355CMP ABRASIVE, METHOD FOR POLISHING SUBSTRATE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME, AND ADDITIVE FOR CMP ABRASIVE - The present invention discloses a CMP abrasive comprising cerium oxide particles, a dispersant, an organic polymer having an atom or a structure capable of forming a hydrogen bond with a hydroxyl group present on a surface of a film to be polished and water, a method for polishing a substrate comprising polishing a film to be polished by moving a substrate on which the film to be polished is formed and a polishing platen while pressing the substrate against the polishing platen and a polishing cloth and supplying the CMP abrasive between the film to be polished and the polishing cloth, a method for manufacturing a semiconductor device comprising the steps of the above-mentioned polishing method, and an additive for a CMP abrasive comprising an organic polymer having an atom or a structure capable of forming a hydrogen bond with a hydroxyl group present on a surface of a film to be polished, and water.10-08-2009
20100001229CMP SLURRY FOR SILICON FILM - The present invention provides a CMP slurry for silicon film, and by using such the slurry, polishing rates and polishing rate ratios of a silicon film, a silicon nitride film and a silicon oxide film required for performing CMP are obtained. In the CMP, a single slurry is used for forming a contact plug in self-alignment manner to decrease costs for producing semiconductor elements and improve yield. The slurry comprises abrasive grains, a cationic surfactant and water and has a pH value of 6.0 to 8.0.01-07-2010

Patent applications by Toranosuke Ashizawa, Hitachinaka-Shi JP