Arami
Junichi Arami, Shanghai CN
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20100271745 | ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAFER ETCH RATE - An electrostatic chuck device in which the electrostatic chuck and support are made from high resistivity, high thermal conductivity and low RF energy loss dielectric materials is described. An advantage of this electrostatic chuck device is that the wafer surface electromagnetic field distribution is more uniform than conventional electrostatic chuck devices. As a result, the wafer etch rate, especially the wafer edge etch rate non-uniformity, is significantly improved compared with conventional electrostatic chuck devices. | 10-28-2010 |
20130344244 | METHOD FOR CLEANING GAS CONVEYING DEVICE, AND METHOD AND REACTION DEVICE FOR FILM GROWTH - A method for cleaning a gas conveying device in a film growth reaction chamber is provided. The gas conveying device comprises a gas conveying surface for releasing reaction gas to the film growth reaction chamber. The film growth reaction chamber comprises a support device. The method comprises that a) a cleaning device is provided and separably installed on the support device, said cleaning device comprising a surface which is facing to the gas conveying surface and on which multiple scraping structures are distributed; b) a rotation drive device is provided, which is connected to the support device and can selectively drive the support device to rotate; c) the position of the cleaning device is adjusted so that the scraping structures contact with, at least in part, the gas conveying surface of the gas conveying device; and d) the rotation drive device is rotated to drive the cleaning device to rotate, and the scraping structures contact the gas conveying surface and remove attachments from the gas conveying surface. | 12-26-2013 |
Junichi Arami, Tokyo JP
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20140141596 | WAFER PROCESSING METHOD - A wafer processing method divides a wafer into individual devices along crossing streets formed on the front side of the wafer. The wafer has a substrate and a functional layer formed on the front side of the substrate. The individual devices are formed from the functional layer and are partitioned by the streets. A laser beam is applied along the streets from the front side of the functional layer to thereby remove the functional layer along the streets. A resist film is formed on the front side of the functional layer except on each street. The substrate of the wafer is plasma-etched along each street where the functional layer is absent to the depth corresponding to the finished thickness of each device, thereby forming a division groove along each street and also etching off a modified layer formed on the opposite sides of each street. | 05-22-2014 |
20150020973 | PLASMA ETCHING APPARATUS - A plasma etching apparatus includes: a housing defining a plasma processing chamber; a workpiece retaining unit disposed within the plasma processing chamber of the housing and retaining a workpiece on an upper surface of the workpiece retaining unit; a processing gas injecting unit injecting a processing gas for plasma generation onto the workpiece retained by the workpiece retaining unit, the processing gas injecting unit including a processing gas jetting portion; a processing gas supply unit supplying the processing gas to the processing gas injecting unit; and a pressure reducing unit reducing a pressure within the plasma processing chamber. The processing gas jetting portion of the processing gas injecting unit includes a central injecting portion and a peripheral injecting portion surrounding the central injecting portion. | 01-22-2015 |
Shinichiro Arami, Atsugi-Shi JP
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20120258464 | METHOD FOR DETECTION AND QUANTIFICATION OF WHEAT ENDOGENOUS GENE - Provided is a method of detecting or quantifying a wheat species-specific DNA in a test sample by polymerase chain reaction. The method comprises a step of amplifying a nucleic acid molecule having a partial sequence of a nucleotide sequence identified as SEQ ID NO: 1 using a nucleic acid molecule in the test sample or a nucleic acid molecule extracted from the test sample as the template and using a primer pair capable of amplifying the partial sequence and a step of detecting or quantifying the amplified nucleic acid molecule. | 10-11-2012 |
20120264128 | METHOD FOR QUALITATIVE AND QUANTITATIVE DETECTION OF COMMON WHEAT - Disclosed are: a method for detecting common wheat among from wheat varieties contained in a sample of interest such as a food raw material or a processed food specifically, with high sensitivity, and in a qualitative and/or quantitative manner; a method for discriminating between common wheat and a wheat variety other than common wheat (e.g., durum wheat) contained in a food raw material or a processed food and detecting the common wheat in a qualitative and/or quantitative manner; and a primer set, a nucleic acid probe, and a detection kit, each of which can be used in the methods employing a PCR method. Specifically disclosed are: a method for detecting the occurrence of common wheat in a sample of interest, which comprises carrying out a PCR method using a nucleic acid extracted from the sample as a template and using a primer comprising the nucleotide sequence represented by SEQ ID NO:5 and a primer comprising the nucleotide sequence represented by SEQ ID NO:6 and detecting the occurrence of a PCR amplification product; and a method for detecting the occurrence of common wheat in a sample of interest, which comprises carrying out a quantitative PCR method using a nucleic acid extracted from the sample as a template and using a primer comprising the nucleotide sequence represented by SEQ ID NO:5, a primer comprising the nucleotide sequence represented by SEQ ID NO:6 and a nucleic acid probe comprising the nucleotide sequence represented by SEQ ID NO:11 and detecting the occurrence of common wheat qualitatively and/or quantitatively. | 10-18-2012 |
20140287405 | METHOD FOR DETECTING AND QUANTIFYING WHEAT ENDOGENOUS GENE - Provided is a method of detecting or quantifying a wheat species-specific DNA in a test sample by polymerase chain reaction. The method comprises a step of amplifying a nucleic acid molecule having a partial sequence of a nucleotide sequence identified as SEQ ID NO: 1 using a nucleic acid molecule in the test sample or a nucleic acid molecule extracted from the test sample as the template and using a primer pair capable of amplifying the partial sequence and a step of detecting or quantifying the amplified nucleic acid molecule. | 09-25-2014 |
20140288289 | METHOD FOR DETECTING AND QUANTIFYING WHEAT ENDOGENOUS GENE - Provided is a method of detecting or quantifying a wheat species-specific DNA in a test sample by polymerase chain reaction. The method comprises a step of amplifying a nucleic acid molecule having at partial sequence of a nucleotide sequence identified as SEQ ID NO: 1 using a nucleic acid molecule in the test sample or a nucleic acid molecule extracted from the test sample as the template and using a primer pair capable of amplifying the partial sequence and a step of detecting or quantifying the amplified nucleic acid molecule. | 09-25-2014 |
Shunsuke Arami, Tsukuba-Shi JP
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20150057604 | Puncture Device and Method for Manufacturing Same - A puncture device is a device for transferring an active ingredient into a body through a skin by piercing the skin with a microneedle. The puncture device comprises a tubular housing, a piston slidably arranged within the housing and having a main surface intersecting a sliding direction, and a nonlinear coil spring arranged within the housing and providing the piston with a biasing force. A plurality of microneedles are arranged on the main surface side. | 02-26-2015 |
Shunsuke Arami, Tsukuba-Shi, Ibaraki JP
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20150314117 | APPLICATOR - An applicator includes a piston plate, a non-linear coil spring, a casing, a lock means and a release means. The casing includes a tubular main body part that houses therein the piston plate and the non-linear coil spring, and a cover part that is arranged on one end side of the main body part. The cover part and the piston plate sandwich the non-linear coil spring there between. The lock means locks the piston plate with the casing such that the piston plate is held at a retraction position thereof on the cover part side in a state where the cover part and the piston plate compress the non-linear coil spring. The release means releases a locked state where the piston plate is locked with the casing by the lock means and where the cover part and the piston plate compress the non-linear coil spring. | 11-05-2015 |