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Arai, Hitachinaka

Hiromasa Arai, Hitachinaka JP

Patent application numberDescriptionPublished
20090299512SEMICONDUCTOR MANUFACTURING SYSTEM AND METHOD - In the manufacturing system and the manufacturing method of a semiconductor device using a plasma treatment apparatus, a plasma treatment condition is controlled so that a desired shape is obtained after the plasma processing by using a processing shape prediction model for calculating the shape after the plasma processing from the inspection data of a wafer to be treated prior to the treatment and a response surface model for calculating the processing shape depending on a plasma treatment condition. In this configuration, the processing shape prediction model has an adjustable prediction model coefficient, and this prediction model coefficient is automatically calibrated.12-03-2009

Masahiko Arai, Hitachinaka JP

Patent application numberDescriptionPublished
20090311103ROTOR FOR STEAM TURBINE AND METHOD OF MANUFACTURING THE SAME - A steam turbine rotor shaft and a method of manufacturing the same are provided wherein the sliding characteristics of a journal are improved, and the journal is free from welding cracks and does not need a post heat treatment. The low alloy steel coating layer having a better sliding characteristics than 9 to 13% Cr heat resisting steel and a area rate of defects including pores and oxides in a range of 3 to 15% is formed by a high velocity flame spray coating method on a sliding surface of the journal.12-17-2009
20100028155Turbine Rotor - An object of the present invention is to provide a turbine rotor with high reliability of strength. The turbine rotor includes two rotors which are connected at the butted portions of the rotors via a weld without forming penetration beads. Specifically, the turbine rotor includes a rotor for low pressure, a rotor for high pressure, and a center hole formed at a center portion of the turbine rotor. The rotors for low pressure and for high pressure are integrated together into a steam turbine rotor by welding respective ends of the rotors to each other. The respective ends of the rotors are in contact with each other via at least two contact faces in a radial direction and an axial direction of the turbine rotor. At least parts of the respective ends are welded together.02-04-2010
20100122754High-strength martensite heat resisting cast steel, method of producing the steel, and applications of the steel - A high-strength martensite heat resisting steel which has long-time creep rupture strength required for steam temperature condition of 600-630° C. and toughness at room temperature, and which is suitable for use as a material of a steam turbine rotor shaft and as large-sized forged steel with an improvement of hot forgeability. A method of producing the steel and applications of the steel are also provided. The high-strength martensite heat resisting steel contains 0.05-0.20% by mass of C, 0.1% or less of Si, 0.05-0.6% of Mn, 0.1-0.6% of Ni, 9.0-12.0% of Cr, 0.20-0.65% of Mo, 2.0-3.0% of W, 0.1-0.3% of V, 2.0% or less of Co, 0.02-0.20% of Nb, 0.015% or less of B, 0.01-0.10% of N, and 0.015% or less of Al, (W/Mo) being 4.0-10.0.05-20-2010
20100236333METHOD FOR ASSESSING REMAINING LIFESPAN OF BOLT USED AT HIGH TEMPERATURES - The present invention is intended to provide a method for assessing remaining lifespan of a bolt with higher precision than conventional methods, which can be applied to a bolt comprising a high alloy with fewer tissue changes caused by creep damage.09-23-2010
20100329849TURBINE ROTOR - A turbine rotor which is easy to manufacture and has a high tolerable temperature is provided. A highly efficient steam turbine power plant is also provided. The turbine rotor is configured from a rotor shaft, an inner rotor disc constructed integrally with the rotor shaft, and an outer rotor disc which is welded to the inner rotor disc via a weld metal part and has a structure for fixing a turbine blade. The outer rotor disc preferably has a cooling hole which extends in an axial direction to penetrate the outer rotor disc over the thickness of the outer rotor disc.12-30-2010
20110126540HIGH-STRENGTH HEAT RESISTING CAST STEEL, METHOD OF PRODUCING THE STEEL, AND APPLICATIONS OF THE STEEL - A high-strength heat resisting cast steel which has high creep rupture strength at temperatures of 620° C. or above, high toughness, and good weldability. A method of producing the steel, a steam turbine casing, a main steam valve casing, and a steam control valve casing, each casing being made of that steel, as well as a steam turbine power plant using those components are also provided. The high-strength heat resisting cast steel contains 0.06-0.16% by mass of C, 0.1-1% of Si, 0.1-1% of Mn, 8-12% of Cr, 0.1-1.0% of Ni, 0.7% or less of Mo, 1.9-3.0% of W, 0.05-0.3% of V, 0.01-0.15% of one or more of Nb, Ta and Zr in total, 0.1-2% of Co, 0.01-0.08% of N, and 0.0005-0.01% of B, the balance being Fe and unavoidable impurities.06-02-2011

Patent applications by Masahiko Arai, Hitachinaka JP

Noriaki Arai, Hitachinaka JP

Patent application numberDescriptionPublished
20090065694Scanning electron microscope - An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a charged-particle-beam irradiation area surface, the nonuniform sample surface potential being generated by electrification made when observing an insulating-substance sample using a charged particle beam.03-12-2009
20100181478CHARGED PARTICLE BEAM ADJUSTING METHOD AND CHARGED PARTICLE BEAM APPARATUS - In an apparatus for obtaining an image by irradiating a charged particle beam on a specimen, a condition of the beam conditioned differently from vertical incidence as in the case of the beam being tilted is required to be adjusted. To this end, the apparatus has a controller for automatically controlling a stigmator, an objective lens and a deflector such that astigmatism is corrected, focus is adjusted and view filed shift is corrected. The controller has a selector for inhibiting at least one of the astigmatism correction, focus adjustment and FOV shift correction from being executed.07-22-2010
20110068265ELECTRODE UNIT AND CHARGED PARTICLE BEAM DEVICE - A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (03-24-2011
20110147609ION BEAM DEVICE - An ion beam device according to the present invention includes a gas field ion source (06-23-2011

Patent applications by Noriaki Arai, Hitachinaka JP

Ryota Arai, Hitachinaka JP

Patent application numberDescriptionPublished
20100163615CABLING WORK AIDING SYSTEM AND WORK AIDING METHOD - In the cabling work aiding system, the RFID reader reads the RFID attached to at least one of the terminal, its terminal block, and cable member. A cabling work terminal device is connected to the RFID reader. The device is comprised of: a data base that records a template connection diagram containing the terminal-side RFID region constituted by RFID data as to the terminal and a cable-side RFID region constituted by RFID data as to the cable member; a relating part that relates the RFID read by the RFID reader to the terminal-side RIFD region and the cable-side RIFD region defined in the template connection diagram; a terminal-cable member correspondence table preparing part that prepares a correspondence table for leading correspondence between the RFID data as to the terminal and RFID data as to cable member from correspondence between the terminal-side RIFD region and the cable-side RFID related by the RFID read by the RFID reader.07-01-2010
20100321736RFID REGISTRATION SYSTEM AND METHOD THEREOF - A RFID registration system is provided with a reader for reading an ID of an object to be identified by an RFID, an RFID existence position indicating the position of the RFID, and the RFID; an associating apparatus for associating the read RFID with the ID of the object to be identified by the RFID, a position information generation apparatus for obtaining the read position at the same time the position has been read, and a collation apparatus for obtaining an ID of the object to be identified by the RFID based on the read position and the RFID existence position. The RFID registration system can be avoid making the mistaken association between the RFID and the object to which the identification ID is attached.12-23-2010