Antsiferov

Pavel Antsiferov, Moscow RU

Patent application number	Description	Published
20110253539	ELECTROSTATIC COALESCER WITH RESONANCE TRACKING CIRCUIT - An electrostatic coalescer includes an outer wall defining a flow path for receiving a process fluid. A plurality of electrode plates is disposed within the flow path. A controller includes an inductor and a signal generator. The inductor is coupled in parallel with the plurality of electrode plates. The inductor and the plurality of electrode plates define a resonant circuit. The signal generator is coupled to the plurality of electrode plates and operable to apply an alternating current signal to the plurality of electrode plates at a frequency corresponding to a resonant frequency of the resonant circuit in the presence of the process fluid. The signal generator varies the frequency of the alternating current signal based on a positive feedback signal received from the resonant circuit to maintain resonance.	10-20-2011

Patent application number	Description	Published
20110037960	LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTEM AND METHOD FOR CLEANING A PATTERNING DEVICE - A lithographic apparatus includes an illumination system configured to condition a beam of radiation, and a support structure configured to support a patterning device. The patterning device is configured to impart a pattern to the beam of radiation. The apparatus includes a patterning device cleaning system configured to provide an electrostatic force to contaminant particles that are on the patterning device and that are electrically charged by the beam of radiation, in order to remove the contaminant particles from the patterning device.	02-17-2011

Patent application number	Description	Published
20090040492	Lithographic apparatus and device manufacturing method - A source configured to generate radiation for a lithographic apparatus is disclosed. The source includes an anode, and a cathode. The cathode and the anode are configured to create a discharge in a fuel in a discharge space between the anode and the cathode so as to generate a plasma, the cathode and the anode positioned relative to each other so that, in use, current lines extending between the anode and the cathode are substantially curved so as to create a force that substantially radially compresses the plasma only in a region proximate an upper surface of the cathode or of the anode.	02-12-2009