Patent application number | Description | Published |
20080314144 | Method for measuring angular velocity and a vibrating micromechanical sensor of angular velocity - The invention relates to measuring devices used in measuring angular velocity, and, more precisely, to vibrating micromechanical sensors of angular velocity. In the solution for a sensor of angular velocity according to the invention, a mass is suspended by means of spring structures having non-orthogonal primary and secondary axes such, that a test activation in phase with the primary motion is induced in a detection resonator, and the angular velocity to be measured is, by means of a phase detector, detected from the phase difference between the primary motion and the secondary motion. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for a sensor of angular velocity. | 12-25-2008 |
20090165553 | Vibrating micromechanical sensor of angular velocity - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 07-02-2009 |
20090260437 | Vibrating micro-mechanical sensor of angular velocity - The invention relates to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention is adapted to measure angular velocity in relation to two or three axes, and at the least two seismic masses ( | 10-22-2009 |
20100218605 | VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures ( | 09-02-2010 |
20100222998 | MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY - The invention presents a micro-mechanical resonator, comprising two masses coupled in the direction of a common axis by a spring structure such, that the spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. The invention also relates to a micro-mechanical resonator matrix, a sensor and a navigation device. | 09-02-2010 |
20120085167 | VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 04-12-2012 |
20120085168 | VIBRATING MICROMECHANICAL SENSOR OF ANGULAR VELOCITY - The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure ( | 04-12-2012 |
20120222483 | SPRING STRUCTURE, RESONATOR, RESONATOR ARRAY AND SENSOR - The invention presents a spring structure ( | 09-06-2012 |
20120235905 | POINTING METHOD, A DEVICE AND SYSTEM FOR THE SAME - The invention shows a method to control a pointing device with an angular, rate sensor, that comprises generating an ensemble of orthogonal unit vector associated signals by at least one angular rate sensor to represent angular rates in a dimensional space for each mutually orthogonal unit vector direction of said dimensional space, amplifying the at least one of said signal non-linearly for determination of cursor on a screen for (x,y) coordinates of the screen, applying a decision criterion to determine the state of the pointing device as based on said unit vector associated signals. The invention also shows a pointer utilising the method and a system comprising such a pointer. | 09-20-2012 |
20130192371 | ACCELERATOR SENSOR STRUCTURE AND USE THEREOF - A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated. | 08-01-2013 |
20140000366 | VIBRATORY GYROSCOPE | 01-02-2014 |
20150068308 | GYROSCOPE STRUCTURE AND GYROSCOPE - A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance. | 03-12-2015 |
20150082885 | GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION - A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass. | 03-26-2015 |