| Patent application number | Description | Published |
|---|
| 20110102753 | Apparatus and Method of Measuring a Property of a Substrate - The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate. | 05-05-2011 |
| 20110134419 | Inspection Method and Apparatus, and Corresponding Lithographic Apparatus - A method and associated apparatus determine an overlay error on a substrate. A beam is projected onto three or more targets. Each target includes first and second overlapping patterns with predetermined overlay offsets on the substrate. The asymmetry of the radiation reflected from each target on the substrate is measured. The overlay error not resultant from the predetermined overlay offsets is determined. The function that enables calculation of overlay from asymmetry for other points on the wafer is determined by limiting the effect of linearity error when determining the overlay error from the function. | 06-09-2011 |
| 20110141444 | Inspection Apparatus for Lithography - A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target ( | 06-16-2011 |
| 20110255066 | Apparatus and Method for Inspecting a Substrate - An apparatus measures properties, such as overlay error, of a substrate divided into a plurality of fields. The apparatus includes a radiation source configured to direct radiation onto a first target of each field of the substrate. Each first target (T4G) has at least a first grating and a second grating having respective predetermined offsets, the predetermined offset (+d) of the first grating being in a direction opposite the predetermined offset (−d) of the second grating. A detector is configured to detect the radiation reflected from each first target and to obtain an asymmetry value for each first target from the detected radiation. Further, a module is configured to determine an overlay value for each first target based on at least the obtained asymmetry value and the predetermined offsets and determine a polynomial fit across a plurality of first targets of a corresponding plurality of fields of the substrate for a relationship between the obtained asymmetry value and determined overlay value of each first target. | 10-20-2011 |
| 20120013881 | Method and Apparatus for Determining an Overlay Error - A method of determining an overlay error. Measuring an overlay target having process-induced asymmetry. Constructing a model of the target. Modifying the model, e.g., by moving one of the structures to compensate for the asymmetry. Calculating an asymmetry-induced overlay error using the modified model. Determining an overlay error in a production target by subtracting the asymmetry-induced overlay error from a measured overlay error. In one example, the model is modified by varying asymmetry p | 01-19-2012 |
| Patent application number | Description | Published |
|---|
| 20110063438 | PROCESSING METHOD USING AN ELECTRIC TOOL - The invention relates to a method and an apparatus for processing a workpiece, such as a wall, a ceiling, a floor or the like in a building, by means of an appliance which can be moved, in particular an electric tool, wherein the appliance can be moved to at least one predeterminable nominal position. Essentially continuous position identification, in particular by means of optical methods, is carried out for the respective actual position of the appliance and/or of an object which can be moved corresponding to the appliance. The position information, such as the coordinates of the respective determined actual position and/or information relating to any, discrepancy between the nominal position and the actual position, is transmitted wirelessly to the appliance. The respective position information is indicated to the user on the appliance, for manual position control. | 03-17-2011 |
| 20120013205 | ADJUSTING DEVICE FOR AN ELECTRIC MOTOR - A device for reversing the direction of rotation and/or for adjusting the carbon brushes for a reversible electric motor, in particular for an electric hand tool, with a base and with a mount, which is mounted pivotably on the base and on which brushholders for the carbon brushes wiping over the collector of the electric motor are arranged. The electric motor can be driven by means of power electronics, such as a pulse width controller, a phase gating controller, a phase chopping controller or the like. The power electronics are arranged on the base and/or on the mount. The device furthermore has fixed contacts and switching contacts, which interact with alternate contact-making for reversing the direction of rotation of the electric motor as the mount is pivoted. | 01-19-2012 |
| Patent application number | Description | Published |
|---|
| 20090045761 | DIESEL-ELECTRIC DRIVE SYSTEM HAVING A SYNCHRONOUS GENERATOR WITH PERMANENT-MAGNET EXCITATION - The invention relates to a diesel-electric drive system comprising a permanently excited synchronous generator ( | 02-19-2009 |
| 20090072772 | DIESEL-ELECTRIC DRIVE SYSTEM HAVING A SYNCHRONOUS GENERATOR WITH PERMANENT MAGNET EXCITATION - The invention relates to a diesel-electric drive system comprising a permanently excited synchronous generator ( | 03-19-2009 |
| 20100002409 | Energy storage module - Energy storage modules generally include a housing with component parts arranged therein. The component parts are in this case either capacitors, for example double-layer capacitors and/or electrolyte capacitors. According to the invention, a filler is provided in the housing and binds electrolyte liquid occurring in the even of damage or else electrolyte gases. Beds of material with a large specific surface area, such as zeolites or else active carbons, are suitable as fillers. The surfaces are also possibly catalytically coated. | 01-07-2010 |
| 20100191432 | Method for braking electrically driven vehicles - A method is disclosed for braking electrically driven vehicles, in particular rail vehicles. In at least one embodiment, the behaviour of the brake system is configured directly as a function of the system state, i.e. the operating conditions of the vehicle, such as for example the laden state of the vehicle, temperature of the engines and in particular of the magnets, as well as redundancy requirements, and therefore permit the fully functioning mechanical brake which is present in vehicles nowadays to be eliminated. The method of at least one embodiment for braking electrically driven vehicles which are equipped with spring-store-based friction brakes and whose motive drive is provided by way of permanently excited synchronous machines whose terminals are connected via switches to devices which generate a braking torque includes an open-loop or closed-loop controller being activated and the controller connecting the brake system of the engines which are present and the spring-store-based friction brakes into the circuit individually and successively as a function of the operating conditions of the vehicle and the required brake values. | 07-29-2010 |
| 20100230216 | Brake device for a rail vehicle - A brake device is disclosed for rail vehicles. In at least one embodiment, the brake device includes an electromagnetic spring pressure brake, the brake force being applied by an elastic force to the part to be braked and a magnetic arrangement being provided for neutralizing the brake force. The magnetic arrangement counteracts the elastic force and consists of a coil arrangement and an armature place that are mobile in relation to each other, the mobile part being connected to the brake element that impinges the part to be braked. The brake device for a rail vehicle according to at least one embodiment of the invention allows a high brake force and short reaction times and is very compact. For this purpose, the mobile part is connected to an axially displaceable plunger which on one end can be impinged upon with the elastic force and which is connected on the other end to the brake element. | 09-16-2010 |
