Patent application number | Description | Published |
20090090395 | METHOD OF REMOVING PARTICLES FROM WAFER - A method of removing particles from a wafer is provided. The method is adopted after a process for removing unreactive metal of a salicide process or after a salicide process and having oxide residue remaining on a wafer or after a chemical vapor deposition (CVD) process that resulted with particles on a wafer. The method includes performing at least two cycles (stages) of intermediate rinse process. Each cycle of the intermediate rinse process includes conducting a procedure of rotating the wafer at a high speed first, and then conducting a procedure of rotating the wafer at a low speed. | 04-09-2009 |
20110053371 | SEMICONDUCTOR PROCESS - A semiconductor manufacturing process is provided. First, a substrate is provided, wherein a patterned conductive layer, a dielectric layer and a patterned metal hard mask layer are sequentially formed thereon. Thereafter, a portion of the dielectric layer is removed to form a damascene opening exposing the patterned conductive layer. Afterwards, the dielectric layer is heated to above 200° C. Thereafter, a plasma treatment process is performed on the damascene opening, wherein the gases used to generate the plasma include hydrogen gas and inert gas. Afterwards, a conductive layer is formed in the damascene opening to fill therein. | 03-03-2011 |
20110195571 | SEMICONDUCTOR PROCESS - A semiconductor process is described. A substrate with at least one conductive region is provided, on which a dielectric layer is formed. An opening is formed in the dielectric layer, such that the conductive region is exposed. A first conductive layer is conformally formed on the surface of the opening. A first cleaning step is conducted using a first cleaning solution. A baking step is conducted after the first cleaning step. Afterwards, the opening is filled with a second conductive layer. | 08-11-2011 |
20120009788 | CLEANING SOLUTION, CLEANING METHOD AND DAMASCENE PROCESS USING THE SAME - A cleaning solution is provided. The cleaning solution includes (a) 0.01-0.1 wt % of hydrofluoric acid (HF); (b) 1-5 wt % of a strong acid, wherein the strong acid is an inorganic acid; (c) 0.05-0.5 wt % of ammonium fluoride (NH | 01-12-2012 |
20120090648 | CLEANING METHOD FOR SEMICONDUCTOR WAFER AND CLEANING DEVICE FOR SEMICONDUCTOR WAFER - A cleaning method of a semiconductor wafer includes the following steps. A semiconductor wafer is provided. A cleaning solution is sprayed to the semiconductor wafer. The semiconductor wafer is driven to spin along a first direction for a first time. The semiconductor wafer is driven to spin along a second direction for a second time. The cleaning method can effectively clean the semiconductor wafer. A cleaning device for cleaning a semiconductor wafer is also provided. | 04-19-2012 |
20120313181 | STRESS FILM FORMING METHOD AND STRESS FILM STRUCTURE - A stress film forming method is used in a fabrication process of a semiconductor device. Firstly, a substrate is provided, wherein a first-polarity-channel MOSFET and a second-polarity-channel MOSFET are formed on the substrate. Then, at least one deposition-curing cycle process is performed to form a cured stress film over the first-polarity-channel MOSFET and the second-polarity-channel MOSFET. Afterwards, an additional deposition process is performed form a non-cured stress film on the cured stress film, wherein the cured stress film and the non-cured stress film are collectively formed as a seamless stress film. | 12-13-2012 |
20130017659 | FABRICATING METHOD OF SEMICONDUCTOR DEVICEAANM LIU; An-ChiAACI Tainan CityAACO TWAAGP LIU; An-Chi Tainan City TW - A fabricating method of a semiconductor device includes the following actions. A substrate having a silicon gate structure formed thereon is provided, and then a modification process is performed on a surface of the silicon gate structure to render the surface from being hydrophobic to be hydrophilic. After that, a mask is formed on the substrate. In succession, a dopant implantation process is performed using the silicon gate structure after the modification process and the mask. After the dopant implantation process, a cleaning process which includes a wet cleaning process is performed to remove the mask. In the above fabricating method, because the surface of the silicon gate structure is modified into a hydrophilic surface, therefore it is easy to remove the residues after the dopant implantation process using the wet cleaning process. | 01-17-2013 |
20130200470 | SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING THE SAME - A semiconductor structure and a method of fabricating the same comprising the steps of providing a substrate, forming at least one fin structure on said substrate, forming a gate covering said fin structure, forming a plurality of epitaxial structures covering said fin structures, performing a gate pullback process to reduce the critical dimension (CD) of said gate and separate said gate and said epitaxial structures, forming lightly doped drains (LDD) in said fin structures, and forming a spacer on said gate and said fin structures. | 08-08-2013 |
20130217234 | CLEANING SOLUTION AND DAMASCENE PROCESS USING THE SAME - A cleaning solution is provided. The cleaning solution includes an aliphatic polycarboxylic acid, a chain sulfonic acid substantially less than 4 wt % and an amine containing buffer agent. | 08-22-2013 |
20130230989 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device is provided, wherein the method comprises steps as follows: A first conductive-type metal-oxide-semiconductor transistor and a second conductive-type metal-oxide-semiconductor transistor are firstly formed on a substrate. Subsequently, a first stress-inducing dielectric layer and a first capping layer are formed in sequence on the first conductive-type metal-oxide-semiconductor transistor; and then a second stress-inducing dielectric layer and a second capping layer are formed in sequence on the second conductive-type metal-oxide-semiconductor transistor. Next, the fist capping layer is removed. | 09-05-2013 |
20130277686 | Semiconductor Structure with Metal Gate and Method of Fabricating the Same - A metal gate process comprises the steps of providing a substrate, forming a dummy gate on said substrate, forming dummy spacers on at least one of the surrounding sidewalls of said dummy gate, forming a source and a drain respectively in said substrate at both sides of said dummy gate, performing a replacement metal gate process to replace said dummy gate with a metal gate, removing said dummy spacers, and forming low-K spacers to replace said dummy spacers. | 10-24-2013 |
20140077229 | SEMICONDUCTOR STRUCTURE - A non-planar semiconductor structure comprises a substrate, at least one fin structure on the substrate, a gate covering parts of the fin structures and part of the substrate such that the fin structure is divided into a channel region stacking with the gate and source/drain region at both sides of the gate, a plurality of epitaxial structures covering on the source/drain region of the fin structures, a recess is provided between the channel region of the fin structure and the epitaxial structure, and a spacer formed on the sidewalls of the gate and the epitaxial structures, wherein the portion of the spacer filling in the recesses is flush with the top surface of the epitaxial structures. | 03-20-2014 |
20140113425 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device includes the following steps. At first, at least a gate structure is formed on a substrate. Subsequently, a first material layer and a second material layer sequentially formed on the substrate conformally cover the gate structure. Subsequently, an implantation process is performed on the second material layer, and a wet etching process is further performed to remove a part of the second material layer to form a remaining second material layer. Furthermore, a dry etching process is performed to remove a part of the remaining second material layer to form a partial spacer. | 04-24-2014 |
20150069533 | SEMICONDUCTOR DEVICE HAVING METAL GATE AND MANUFACTURING METHOD THEREOF - A method for manufacturing a semiconductor device having metal gate includes following steps. A substrate having at least a first semiconductor device formed thereon is provided. The first semiconductor device includes a first gate trench formed therein. Next, an n-typed work function metal layer is formed in the first gate trench. After forming the n-typed work function metal layer, a nitridation process is performed to form a first protecting layer on the n-typed work function metal layer. After forming the first protecting layer, an oxidation process is performed to the first protecting layer to form a second protecting layer on the n-typed work function metal layer. Then, a gap filling metal layer is formed to fill up the first gate trench. | 03-12-2015 |