Patent application number | Description | Published |
20090273028 | Short Channel Lateral MOSFET and Method - A short channel Lateral MOSFET (LMOS) and method are disclosed with interpenetrating drain-body protrusions (IDBP) for reducing channel-on resistance while maintaining high punch-through voltage. The LMOS includes:
| 11-05-2009 |
20090294892 | Edge Termination for Semiconductor Devices - A high-voltage termination structure includes a peripheral voltage-spreading network. One or more trench structures are connected at least partly in series between first and second power supply voltages. The trench structures include first and second current-limiting structures connected in series with a semiconductor material, and also includes permanent charge in a trench-wall dielectric. The current-limiting structures in the trench structures are jointly connected in a series-parallel ladder configuration. The current-limiting structures, in combination with the semiconductor material, provide a voltage distribution between the core portion and the edge portion. | 12-03-2009 |
20100025726 | Lateral Devices Containing Permanent Charge - A lateral device includes a gate region connected to a drain region by a drift layer. An insulation region adjoins the drift layer between the gate region and the drain region. Permanent charges are embedded in the insulation region, sufficient to cause inversion in the insulation region. | 02-04-2010 |
20100025763 | Semiconductor on Insulator Devices Containing Permanent Charge - A lateral SOI device may include a semiconductor channel region connected to a drain region by a drift region. An insulation region on the drift layer is positioned between the channel region and the drain region. Permanent charges may be embedded in the insulation region sufficient to cause inversion in the insulation region. The semiconductor layer also overlies a global insulation layer, and permanent charges are preferably embedded in at least selected areas of this insulation layer too. | 02-04-2010 |
20100084704 | Devices Containing Permanent Charge - An edge termination structure includes a final dielectric trench containing permanent charge. The final dielectric trench is surrounded by first conductivity type semiconductor material (doped by lateral outdiffusion from the trenches), which in turn is laterally surrounded by second conductivity type semiconductor material. | 04-08-2010 |
20100327344 | Power Semiconductor Devices and Methods - The present inventors have realized that manufacturability plays into optimization of power semiconductor devices in some surprising new ways. If the process window is too narrow, the maximum breakdown voltage will not be achieved due to doping variations and the like normally seen in device fabrication. Thus, among other teachings, the present application describes some ways to improve the process margin, for a given breakdown voltage specification, by actually reducing the maximum breakdown voltage. In one class of embodiments, this is done by introducing a vertical gradation in the density of fixed electrostatic charge, or in the background doping of the drift region, or both. Several techniques are disclosed for achieving this. | 12-30-2010 |
20110049623 | Short Channel Lateral MOSFET and Method - A short channel Lateral MOSFET (LMOS) and method are disclosed with interpenetrating drain-body protrusions (IDBP) for reducing channel-on resistance while maintaining high punch-through voltage. The LMOS includes lower device bulk layer; upper source and upper drain region both located atop lower device bulk layer; both upper source and upper drain region are in contact with an intervening upper body region atop lower device bulk layer; both upper drain and upper body region are shaped to form a drain-body interface; the drain-body interface has an IDBP structure with a surface drain protrusion lying atop a buried body protrusion while revealing a top body surface area of the upper body region; gate oxide-gate electrode bi-layer disposed atop the upper body region forming an LMOS with a short channel length defined by the horizontal length of the top body surface area delineated between the upper source region and the upper drain region. | 03-03-2011 |
20110220998 | Devices Containing Permanent Charge - An edge termination structure includes a final dielectric trench containing permanent charge. The final dielectric trench is surrounded by first conductivity type semiconductor material (doped by lateral outdiffusion from the trenches), which in turn is laterally surrounded by second conductivity type semiconductor material. | 09-15-2011 |
20120235232 | Short Channel Lateral MOSFET - A short channel Lateral MOSFET (LMOS) and method are disclosed with interpenetrating drain-body protrusions (IDBP) for reducing channel-on resistance while maintaining high punch-through voltage. The LMOS includes lower device bulk layer; upper source and upper drain region both located atop lower device bulk layer; both upper source and upper drain region are in contact with an intervening upper body region atop lower device bulk layer; both upper drain and upper body region are shaped to form a drain-body interface; the drain-body interface has an IDBP structure with a surface drain protrusion lying atop a buried body protrusion while revealing a top body surface area of the upper body region; gate oxide-gate electrode bi-layer disposed atop the upper body region forming an LMOS with a short channel length defined by the horizontal length of the top body surface area delineated between the upper source region and the upper drain region. | 09-20-2012 |
20130105887 | Vertical Gate LDMOS Device | 05-02-2013 |
20130105888 | Transistor with Buried P+ and Source Contact | 05-02-2013 |
20130109143 | Vertical Gate LDMOS Device | 05-02-2013 |
20130115744 | Vertical Gate LDMOS Device - A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material. | 05-09-2013 |
20130299899 | Power Semiconductor Devices and Methods - The present inventors have realized that manufacturability plays into optimization of power semiconductor devices in some surprising new ways. If the process window is too narrow, the maximum breakdown voltage will not be achieved due to doping variations and the like normally seen in device fabrication. Thus, among other teachings, the present application describes some ways to improve the process margin, for a given breakdown voltage specification, by actually reducing the maximum breakdown voltage. In one class of embodiments, this is done by introducing a vertical gradation in the density of fixed electrostatic charge, or in the background doping of the drift region, or both. Several techniques are disclosed for achieving this. | 11-14-2013 |
20140021536 | LATERAL DEVICES CONTAINING PERMANENT CHARGE - A lateral device includes a gate region connected to a drain region by a drift layer. An insulation region adjoins the drift layer between the gate region and the drain region. Permanent charges are embedded in the insulation region, sufficient to cause inversion in the insulation region. | 01-23-2014 |
20140147979 | Vertical Gate LDMOS Device - A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material. | 05-29-2014 |
20140239390 | LATERAL DEVICES CONTAINING PERMANENT CHARGE - A lateral device includes a gate region connected to a drain region by a drift layer. An insulation region adjoins the drift layer between the gate region and the drain region. Permanent charges are embedded in the insulation region, sufficient to cause inversion in the insulation region. | 08-28-2014 |
20140266113 | Voltage Regulators with Multiple Transistors - A voltage regulator has an input terminal and a ground terminal. The voltage regulator includes a high-side device, a low side device, and a controller. The high-side device is coupled between the input terminal and an intermediate terminal. The high-side device includes first and second transistors each coupled between the input terminal and the intermediate terminal, such that the first transistor controls a drain-source switching voltage of the second transistor. The low-side device is coupled between the intermediate terminal and the ground terminal. The controller drives the high-side and low-side devices to alternately couple the intermediate terminal to the input terminal and the ground terminal. | 09-18-2014 |
20140374826 | Vertical Gate LDMOS Device - Described here are transistors and fabrication methods thereof. In one implementation, a transistor includes an n-well region implanted into a surface of a substrate, and a trench in the n-well region. The trench extends from the surface to a first depth. The trench includes a gate of conductive material in the trench, and dielectric material filling a volume of the trench not filled by the conductive material. The transistor also includes a p-type material in a first region extending from a second depth to a third depth, the second depth and the third depth being greater than the first depth. The transistor further includes a source region and a drain region. | 12-25-2014 |