| Patent application number | Description | Published |
|---|
| 20090107964 | DEBRIS MINIMIZATION AND IMPROVED SPATIAL RESOLUTION IN PULSED LASER ABLATION OF MATERIALS - A method of minimizing the deposition of debris onto a sample being ablated. The method comprises: 1) reducing a laser pulse energy to approximately a threshold level for ablation; 2) focusing the energy using an immersion object lens having a final element and 3) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase. | 04-30-2009 |
| 20100006550 | METHOD FOR MINIMIZING SAMPLE DAMAGE DURING THE ABLATION OF MATERIAL USING A FOCUSED ULTRASHORT PULSED LASER BEAM WHEREIN THE SLOPE OF FLUENCE BREAKDOWN IS A FUNCTION OF THE PULSE WIDTH - In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused above the surface of a material where laser induced breakdown is desired. The region of least confusion (minimum beam waist or average spot size) is above the surface of the material in which laser induced breakdown is desired since the intensity of the beam falls off in the forward direction, preferably the region of the beam at or within the surface is between the region of least confusion and sufficient to remove material and the minimum intensity necessary for laser induced breakdown of the material to be removed, most preferably the region of minimum intensity is disposed at the surface of the material to be removed. The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime. | 01-14-2010 |
| 20100086876 | TECHNIQUES FOR REDUCING DEGRADATION AND/OR MODIFYING FEATURE SIZE OF PHOTOMASKS - A photomask includes a light transmitting substrate and an absorber layer adjacent thereto. The absorber layer includes a silicide, such as molybdenum silicide, patterned into a plurality of features. The surrounding environment is controlled to prevent undesirable growth by oxidation of the absorber layer when the mask is exposed to light while being used to fabricate integrated circuits. In another aspect, the surrounding environment is controlled to encourage desirable growth by oxidation of the absorber layer when the mask is exposed to light. | 04-08-2010 |
| 20100219168 | SYSTEM AND METHOD FOR ELIMINATING THE STRUCTURE AND EDGE ROUGHNESS PRODUCED DURING LASER ABLATION OF A MATERIAL - The present technology relates generally to laser ablation, and more particularly pertains to a system and method for eliminating structure and edge roughness, which is produced during the laser ablation of a material. Ablation of materials using a femtosecond laser beam produces a fine scale periodic structure in the ablated region. The structure consists of residual (i.e. unablated material) and is always perpendicular to the polarization direction of the laser beam. By changing the polarization direction during the ablation process, the structure is averaged over many directions and thus eliminated. This eliminates structure and edge roughness in a material caused by the laser ablation of the material. The method is employed to the repairing of photomasks so as to cause the optical quality thereof to be improved. | 09-02-2010 |
| 20100289186 | ENHANCED QUALITY OF LASER ABLATION BY CONTROLLING LASER REPETITION RATE - A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhancing the quality of laser ablation. | 11-18-2010 |
| 20110110578 | Evaluation of Image Processing Algorithms - One exemplary aspect of this invention pertains to a method to evaluate an image processing algorithm. The method includes varying a parameter of a model of an imaging system and, for each variation of the parameter, calculating with a data processor a corresponding image of a sample; applying an image processing algorithm to the calculated corresponding images of the sample; and determining an ability of the image processing algorithm to detect the variation in the parameter. | 05-12-2011 |
| Patent application number | Description | Published |
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| 20080319615 | Motor Vehicle Having a Preventatively Acting Safety System - The invention relates to a motor vehicle, in particular a passenger car, having a preventatively acting safety system which comprises safety devices which are actuated as a function of information which is recorded by a driving situation detection device by means of a driving state sensor system and is evaluated in a data evaluation device, with the recorded information being compared with at least one triggering threshold value and the safety devices being actuated when the triggering threshold value is exceeded. According to the invention, the triggering threshold value is adapted as a function of a total vehicle acceleration and a vehicle speed. | 12-25-2008 |
| 20090024282 | Method for a Preventive-Action Protection System In a Motor Vehicle Having an Inter-Vehicle Distance Sensor System - A method is provided for a preventive-action protection system in a motor vehicle having an inter-vehicle distance sensor system and having safety devices for lessening the consequences of accidents, wherein driving state data is acquired by means of a driving state sensor system and is monitored, in evaluation stages, with respect to critical states of vehicle movement dynamics (emergency braking, understeering, oversteering, rolling over). As a further triggering condition, a speed threshold has to be exceeded by the vehicle's own speed or preferably by the relative speed measured by the inter-vehicle distance sensor system. | 01-22-2009 |
| 20090150028 | Motor vehicle with a safety system with a preventive action - In a motor vehicle, such as a passenger car, a preventive-action protection system is provided which includes safety devices that are actuated as a function of information detected by a driving-state sensor system and evaluated in a data evaluation and control device, which compares the detected information with at least one threshold value. When a critical condition of the driving state is detected, the data evaluation and control device actuates at least one safety device assigned to this driving state. Here, a theoretical, lateral-dynamics critical condition is detected and triggering of at least one assigned safety device occurs if a threshold value is exceeded when a current steering angle speed is logically combined with a parameter which represents the current driving-dynamics situation. | 06-11-2009 |
| 20090194979 | Restraint System Comprising an Adjustable Outlet Cross Section - The invention relates to restraint system for a passenger of a vehicle who sits on a vehicle seat that can be placed in different positions. Said restraint system comprises an interior that is defined by a housing ( | 08-06-2009 |
