Patent application number | Description | Published |
20090200464 | TEM WITH ABERRATION CORRECTOR AND PHASE PLATE - The invention relates to a TEM with a corrector ( | 08-13-2009 |
20100072366 | METHOD FOR CORRECTING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS - The invention relates to a method for correcting distortions introduced by the projection system ( | 03-25-2010 |
20100159370 | METHOD FOR FORMING MICROSCOPIC STRUCTURES ON A SUBSTRATE - The invention relates to a method for forming microscopic structures. By scanning a focused particle beam over a substrate in the presence of a precursor fluid, a patterned seed layer is formed. By now growing this layer with Atomic Layer Deposition or Chemical Vapour Deposition, a high quality layer can be grown. | 06-24-2010 |
20100224592 | CHARGED PARTICLE BEAM PROCESSING - Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes. | 09-09-2010 |
20100255213 | Method for Forming Microscopic 3D Structures - A method for forming microscopic 3D structures. In the method according to the invention a substrate ( | 10-07-2010 |
20110097706 | MICRO-REACTOR FOR OBSERVING PARTICLES IN A FLUID - The invention relates to a micro-reactor for observing small particles, cells, bacteria, viruses or protein molecules in a fluid. The micro-reactor shows a first channel formed between two layers for containing the fluid, with an inlet and an outlet, the two layers separated by a first distance. A likewise second channel with an inlet and an outlet is placed adjacent to the first channel. A gap connects the first channel and the second channel, at the gap at least one layer showing a window transparent to the method of inspection and at the window the two layers being separated by a very small distance of, for example, 1 μm or less. | 04-28-2011 |
20110266439 | Method of Using a Direct Electron Detector for a TEM - A method of using a direct electron detector in a TEM, in which an image with a high intensity peak, such as a diffractogram or an EELS spectrum, is imaged on said detector. As known the high intensity peak may damage the detector. To avoid this damage, the centre of the image is moved, as a result of which not one position of the detector is exposed to the high intensity, but the high intensity is smeared over the detector, displacing the high intensity peak before damage results. | 11-03-2011 |
20130037714 | Charged-Particle Microscopy Imaging Method - Charged-particle microscopy includes
| 02-14-2013 |