Patent application number | Description | Published |
20100051064 | METHOD OF CLEANING AND AFTER TREATMENT OF OPTICAL SURFACES IN AN IRRADIATION UNIT - The present invention relates to a method of cleaning and after treatment of optical surfaces in an irradiation unit, said irradiation unit comprising a radiation source ( | 03-04-2010 |
20100051827 | METHOD OF CLEANING OPTICAL SURFACES OF AN IRRADIATION UNIT IN A TWO-STEP PROCESS - The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces thereby forming a volatile compound with a first portion of said contaminations. In an operation pause of the irradiation unit prior to the cleaning step, a pretreatment step is performed, in which a second gas or gas mixture is brought into contact with said optical surfaces. Said second gas or gas mixture is selected to react with a second portion of said contaminations different from said first portion to form a reaction product, which is able to form a volatile compound with said first gas or gas mixture. | 03-04-2010 |
20110048452 | METHOD AND DEVICE FOR CLEANING AT LEAST ONE OPTICAL COMPONENT - A method of cleaning at least one optical component of at least one irradiation device is described, which device comprises at least one radiation source in a vacuum chamber, which source generates in particular extreme ultraviolet and/or soft X-ray radiation whose rays are guided via the optical component onto a workpiece to be treated, during which said optical component is at least partly polluted because of an inorganic substance introduced by the radiation source. | 03-03-2011 |
20110101251 | EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CORROSION-RESISTANT MATERIAL - The invention relates to an improved EUV generating device having coated supply pipes for the liquid tin, in order to provide an extreme UV radiation generating device which is capable of providing a less contaminated flow of tin to and from a plasma generating part. | 05-05-2011 |
20110181848 | EXTREME UV RADIATION GENERATING DEVICE COMPRISING A CONTAMINATION CAPTOR - The invention relates to an improved EUV generating device having a contamination captor for “catching” contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath. | 07-28-2011 |
Patent application number | Description | Published |
20080293079 | Chip for Diagnosing the Presence of Candida - The present invention concerns means and methods of detection of | 11-27-2008 |
20100120145 | THREE-DIMENSIONAL BIOCOMPATIBLE SKELETON STRUCTURE CONTAINING NANOPARTICLES - The invention relates to a cell culture system comprising a three-dimensional, biocompatible frame structure and biocompatible nanoparticles, a method for the cultivation of cells, and the preparation of cells or cell products and tissues per se by means of such a cell culture system. | 05-13-2010 |
20130171434 | POLYMER PARTICLES AND METHOD FOR PRODUCING A THREE-DIMENSIONAL STRUCTURE THEREFROM BY MEANS OF AN ELECTROGRAPHIC METHOD - The present disclosure relates to polymer particles comprising a polymer matrix having a coating of an inorganic semimetal oxide or metal oxide, wherein the polymer matrix has at least one first functional group A and at least one second functional group B, both functional groups A and B being able to enter into at least one covalent bond with one another, functional group A being selected from the group consisting of an azide group, C—C double bond, C—C triple bond, aldehyde group, ketone group, imine group, thioketone group and thiol group, and functional group B being selected from the group consisting of a C—C double bond, C—C triple bond, C—N triple bond, diene group, thiol group and amine group. | 07-04-2013 |
20150309434 | POLYMER PARTICLES AND METHOD FOR PRODUCING A THREE-DIMENSIONAL STRUCTURE THEREFROM BY MEANS OF AN ELECTROGRAPHIC METHOD - The present disclosure relates to polymer particles comprising a polymer matrix having a coating of an inorganic semimetal oxide or metal oxide, wherein the polymer matrix has at least one first functional group A and at least one second functional group B, both functional groups A and B being able to enter into at least one covalent bond with one another, functional group A being selected from the group consisting of an azide group, C—C double bond, C—C triple bond, aldehyde group, ketone group, imine group, thioketone group and thiol group, and functional group B being selected from the group consisting of a C—C double bond, C—C triple bond, C—N triple bond, diene group, thiol group and amine group. | 10-29-2015 |