Patent application number | Description | Published |
20090268367 | VARIABLE CAPACITOR, RESONATOR AND MODULATOR - Provided is a variable capacitance element comprising a plurality of single capacitance elements that each include (i) a fixed electrode provided on a surface of a substrate, (ii) a floating electrode provided to be separate from the fixed electrode and facing the fixed electrode, and (iii) an actuator that moves the floating electrode closer to or farther from the fixed electrode; and a floating electrode driving section that supplies the actuators with drive power to move the floating electrodes, such that a combined capacitance of the plurality of single capacitance elements becomes a prescribed capacitance. | 10-29-2009 |
20120268102 | SWITCHING APPARATUS AND TEST APPARATUS - To restrict a bowing amount of a piezoelectric actuator, provided is a switching apparatus comprising a contact point section including a first contact point; and an actuator that moves a second contact point to contact or move away from the first contact point. The actuator includes a first piezoelectric film that expands and contracts according to a drive voltage to change a bowing amount of the actuator, and a second piezoelectric film that is provided in parallel with the first piezoelectric film and restricts bowing of the actuator when the drive voltage is not being supplied to the first piezoelectric film. | 10-25-2012 |
20120286801 | MANUFACTURING METHOD, SWITCHING APPARATUS, TRANSMISSION LINE SWITCHING APPARATUS, AND TEST APPARATUS - An actuator is manufactured that includes piezoelectric film that does not suffer physical damage. Provided is a manufacturing method comprising first insulating layer deposition of depositing a first insulating layer on a substrate using an insulating material; first annealing of annealing the first insulating layer; first electrode layer deposition of depositing a first electrode layer on the first insulating layer using a conductive material; first piezoelectric film deposition of depositing a first piezoelectric film on the first electrode layer by applying a sol-gel material on the first electrode layer and annealing the sol-gel material; second electrode layer deposition of depositing a second electrode layer on the first piezoelectric film using a conductive material; second insulating layer deposition of depositing a second insulating layer on the second electrode layer using an insulating material; and second annealing of annealing the second insulating layer. | 11-15-2012 |
20130026021 | ACTUATOR MANUFACTURING METHOD, SWITCHING APPARATUS, TRANSMISSION LINE SWITCHING APPARATUS, AND TEST APPARATUS - To manufacture a switching apparatus that includes a piezoelectric actuator with increased lifespan, provided is a method for manufacturing a bimorph actuator, comprising first piezoelectric element layer formation of forming a first piezoelectric element layer on a substrate; support layer formation of forming a support layer made of an insulator on the first piezoelectric element layer; second piezoelectric element layer formation of forming a second piezoelectric element layer on the support layer; and removal of removing a portion of the substrate to form an actuator that includes the first piezoelectric element layer, the support layer, and the second piezoelectric element layer. | 01-31-2013 |
20130027057 | SWITCHING APPARATUS, SWITCHING APPARATUS MANUFACTURING METHOD, TRANSMISSION LINE SWITCHING APPARATUS, AND TEST APPARATUS - A package of a switching apparatus that houses an actuator having a movable contact point and in which a fixed contact point, which is electrically connected to or disconnected form the movable contact point, is accurately formed. Provided is a switching apparatus comprising a first substrate provided with a via that electrically connects a top surface thereof and a bottom surface thereof, while maintaining an air-tight state between the top surface and the bottom surface; a second substrate provided on the first substrate and in which is formed a through-hole that houses an actuator; and a third substrate provided on the second substrate and supporting the actuator, which has a moveable contact point. | 01-31-2013 |
20130037395 | SWITCHING APPARATUS AND TEST APPARATUS - A switching apparatus comprising a contact point section including a first contact point; an actuator including a first piezoelectric film that expands and contracts according to a first drive voltage and a second piezoelectric film provided in parallel with the first piezoelectric film and expands and contracts according to a second drive voltage, and a control section that controls the first drive voltage and the second drive voltage is provided. The actuator moves a second contact point to contact or move away from the first contact point according to the contraction and expansion of the first piezoelectric film and the second piezoelectric film. When switching from a contact state to a separated state, the control section stops supplying the first drive voltage and applies the second drive voltage causing the second piezoelectric film to contract to the second piezoelectric film, such that the actuator is biased to return. | 02-14-2013 |
20130038335 | SWITCHING APPARATUS AND TEST APPARATUS - Provided is a switching apparatus comprising a contact point section that includes a first contact point; an actuator that includes a second contact point and moves the second contact point to contact or move away from the first contact point; and a control section that controls a first drive voltage. The actuator includes a first piezoelectric film that expands and contracts according to the first drive voltage and a support layer disposed on the first piezoelectric film. The control section causes the first piezoelectric film to contract by causing a change from a voltage that applies an electric field that is less than a first coercive electric field to a voltage that applies an electric field that exceeds the first coercive electric field, and causes the first piezoelectric film to expand by outputting a voltage that applies an electric field that is less than a second coercive electric field. | 02-14-2013 |
20130285505 | ACTUATOR APPARATUS, TEST APPARATUS, AND TEST METHOD - Provided is an actuator apparatus including: an actuator that is provided with a driving voltage at one end and a reference potential at the other end to enable driving; a first setting section that is connected to the one end of the actuator and sets an operating speed of the actuator; a second setting section that is provided between the one end of the actuator and the reference potential, and sets the driving voltage of the actuator. | 10-31-2013 |