Masaki Nakano
Masaki Nakano, Yokohama-Shi JP
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20090218522 | EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS - In an LPP type EUV light source apparatus, the intensity of radiated EUV light is stabilized by improving the positional stability of droplets. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target supply division including a target tank for storing a target material therein and an injection nozzle for injecting the target material in a jet form, for supplying the target material into the chamber; a charging electrode applied with a direct-current voltage between the target tank and itself, for charging droplets when the target material in the jet form injected from the injection nozzle is broken up into the droplets; a laser for applying a laser beam to the droplets of the target material to generate plasma; and a collector mirror for collecting extreme ultra violet light radiated from the plasma to output the extreme ultra violet light. | 09-03-2009 |
20100025223 | Extreme Ultraviolet Light Source Device - Offset in the ejection direction of target material droplets is corrected in order to stabilize EUV output in an EUV light source device. An extreme ultraviolet light source device includes a droplet generation device | 02-04-2010 |
20100213272 | TARGET SUPPLY APPARATUS - A target supply apparatus controls a gas pressure inside a tank storing a liquid target material to be outputted from a nozzle by a pressure of gas supplied from a gas supply having a pressure regulator. The target supply apparatus comprises a gas passage introducing gas supplied from the gas supply into the tank, and a high-precision pressure regulator arranged on the gas passage and regulating a pressure of gas flowing the gas passage. The high-precision pressure regulator is able to regulate pressure with accuracy higher than the pressure regulator. | 08-26-2010 |
Masaki Nakano, Hiratsuka JP
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20100143202 | TARGET SUPPLY UNIT OF EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF MANUFACTURING THE SAME - In a target supply unit of an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into plasma, clogging of a target nozzle for supplying the target material to a laser beam application point is suppressed. The target supply unit includes: a target container for accommodating the target material; a target nozzle for injecting the target material supplied from the target container; and a reducing gas supply unit for supplying a reducing gas into the target container. Instead of using the reducing gas, a carbon-based material having a reduction action may be provided within the target container for causing reduction reaction. | 06-10-2010 |
20120311969 | TARGET SUPPLY UNIT OF EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF MANUFACTURING THE SAME - In a target supply unit of an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into plasma, clogging of a target nozzle for supplying the target material to a laser beam application point is suppressed. The target supply unit includes: a target container for accommodating the target material; a target nozzle for injecting the target material supplied from the target container; and a reducing gas supply unit for supplying a reducing gas into the target container. Instead of using the reducing gas, a carbon-based material having a reduction action may be provided within the target container for causing reduction reaction. | 12-13-2012 |
Masaki Nakano, Sendai-Shi JP
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20100102309 | ZNO-Based Semiconductor Element - To solve the foregoing problems, provided is a ZnO-based semiconductor element having an entirely novel function distinct from hitherto, using a ZnO-based semiconductor and organic matter for an active role. An organic electrode | 04-29-2010 |
Masaki Nakano, Nagoya-Shi JP
Masaki Nakano, Ebina-Shi JP
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20090102982 | TELEVISION AND METHOD FOR CONTROLLING THE SAME - A television includes a transmitting and receiving unit that transmits and receives video data to/from an external apparatus connected to the television, a connection terminal, which is connected to the transmitting and receiving unit, and located on a side of the television, and a control unit configured to inhibit the transmitting and receiving unit from outputting video data from the connection terminal unless an instruction removing the inhibit is received. | 04-23-2009 |
Masaki Nakano, Kawasaki JP
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20080301673 | Information Terminal, Computer Resource Managine Method, and Virtual Machine Execution Switching Method - An in-vehicle terminal ( | 12-04-2008 |
Masaki Nakano, Machida-Shi JP
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20110202928 | RESOURCE MANAGEMENT METHOD AND EMBEDDED DEVICE - Provided is a resource management method in a system which individually limits a resource amount used by a software module ( | 08-18-2011 |
Masaki Nakano, Kanagawa JP
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20120045907 | ELECTRICAL COMPONENT STRUCTURE - An electric component structure is provided with at least two electrical conductive parts, an insulator and a magnetic flux generating structure. The electrical conductive parts are arranged with an electric line of force existing between adjacent ones of the conductive parts. The insulator holds the conductive parts. The magnetic flux generating structure generates a magnetic flux with magnetic flux lines oriented in a direction different from a direction of the electric line of force existing between the adjacent ones of the conductive parts. | 02-23-2012 |
Masaki Nakano, Machida JP
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20120124221 | ELEMENT TERMINAL AND COMMUNICATION SYSTEM - A terminal allows immediate receipt of notification, while holding down the load on a management control device. The terminal has a timer value storage for storing a timer value, a counter for counting the cycle indicated by the timer value, a connection request part for transmitting a connection request to the management control device every time when the counting is finished, an event detector for detecting an event, and a timer value modifier for modifying the timer value to a value indicating a shorter cycle, upon occurrence of the event. The connection request part further transmits the connection request to the management control device, upon occurrence of detecting the event, and the timer value modifier modifies the timer value a value indicating a longer cycle, upon receiving a message indicating that there is no processing request from the management control device. | 05-17-2012 |
Masaki Nakano, Oyama JP
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20140284502 | TARGET GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS - A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal. | 09-25-2014 |
Masaki Nakano, Nagoya-City JP
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20150160182 | SOIL-WATER-AIR COUPLED ANALYZER, SOIL-WATER-AIR COUPLED ANALYZING METHOD AND SOIL-WATER-AIR COUPLED ANALYZING PROGRAM - Soil-water-air coupled analyzing computes various matrices with respect to a time rate of volume change of a soil skeleton, tangent stiffness and water permeability, air permeability, moisture characteristic and mass of soil, based on the settings of soils such as clay, intermediate soil and sand with regard to respective soil elements of a soil foundation, settings of a solid soil model and settings of analysis conditions, establishes simultaneous equations using these matrices, provides a boundary condition regarding deformation, a stress rate or the like, a hydraulic condition regarding pore water and an air boundary condition regarding pore air and determines solutions of unknown “jerk field”, pore water pressure field and pore air field. This enables the soil foundation made of any type of soil in any state to be analyzed with high accuracy. | 06-11-2015 |